Uto epitaxial, nke a na-akpọkwa ya dị ka epitaxy, bụ otu n'ime usoro kachasị mkpa n'imepụta ihe na ngwaọrụ semiconductor. The na-akpọ epitaxial ibu bụ na ụfọdụ ọnọdụ na otu crystal mkpụrụ na uto nke a oyi akwa nke otu ngwaahịa film usoro, uto nke otu-kristal film a na-akpọ epitaxial oyi akwa epitaxial technology bụ mmalite 1960 na silicon single-crystal thin film nnyocha na ndabere nke ntoputa nke mmepe nke fọrọ nke nta ka ọkara narị afọ ugbu a, ndị mmadụ enwewo ike na-aghọta nke a dịgasị iche iche nke ihe nkiri. Nkà na ụzụ Epitaxial edozila ọtụtụ nsogbu na ihe ndị dị na semiconductor discrete components na sekit jikọtara ọnụ, na-eme ka arụmọrụ nke ngwaọrụ ahụ dịkwuo mma. Ihe nkiri Epitaxial nwere ike ịchịkwa oke ya na akụrụngwa doping nke ọma, njirimara a ebutela mmepe ngwa ngwa nke sekit agbakwunyere semiconductor, banye n'ọkwa zuru oke. Silicon otu kristal site slicing, egweri, polishing na ndị ọzọ usoro nhazi, ka ị nweta mpempe akwụkwọ a na-egbu maramara, ị nwere ike ime pụrụ iche components na integrated sekit na ya. Ma n'ọtụtụ oge nke a polished mpempe akwụkwọ naanị dị ka a n'ibu nkwado maka mkpụrụ, nke ọ dị mkpa na mbụ eto a oyi akwa nke otu-kristal film na kwesịrị ekwesị ụdị conductivity na resistivity, na mgbe ahụ pụrụ iche components ma ọ bụ Integrated sekit emepụta na otu-kristal film. A na-eji usoro a, dịka ọmụmaatụ, na mmepụta nke silicon high-frequency high-power transistor, na-edozi esemokwu n'etiti voltaji na-agbaji na nguzogide usoro. Onye na-anakọta transistor chọrọ nnukwu mgbawa voltaji, nke a na-ekpebi site na mgbochi nke pn junction nke silicon wafer. Iji mezuo ihe a chọrọ, achọrọ ihe nguzogide dị elu. Ndị mmadụ n'ime nnukwu doped n-ụdị ala-eguzogide ihe na epitaxial ọtụtụ ka iri na abuo microns oké ejighị ya kpọrọ doped elu-eguzogide n-ụdị oyi akwa, transistor mmepụta na epitaxial oyi akwa, nke na-edozi elu mmebi voltaji chọrọ site na elu resistivity na ala mkpokọta usoro nguzogide chọrọ site ala substrate resistivity nke esemokwu n'etiti.
Gas-phase epitaxial growth bụ ngwa mbụ na mpaghara semiconductor nke nkà na ụzụ epitaxial tozuru oke, nke na-arụ ọrụ dị mkpa na mmepe nke sayensị semiconductor, na-enye aka n'ịdị mma nke ihe semiconductor na ngwaọrụ na nkwalite arụmọrụ ha. Ka ọ dị ugbu a, nkwadebe nke semiconductor otu ihe nkiri epitaxial kristal bụ ụzọ kachasị mkpa nke ntinye mmiri kemịkal. Ihe a na-akpọ kemịkal vapor deposition, ya bụ, iji ihe ndị na-emepụta gas na-eme ihe n'elu elu siri ike nke mmeghachi omume kemịkal, usoro nke ịmepụta nkwụnye ego siri ike. Teknụzụ CVD nwere ike itolite ihe nkiri otu kristal dị elu, iji nweta ụdị doping achọrọ na ọkpụrụkpụ epitaxial, dị mfe ịghọta mmepụta oke, yabụ ejirila ya na ụlọ ọrụ. N'ime ụlọ ọrụ, wafer epitaxial nke CVD kwadebere na-enwekarị otu ma ọ bụ karịa n'ígwé, nke enwere ike iji chịkwaa nhazi ngwaọrụ na nkesa doping site na mgbasa ma ọ bụ ntinye ion; Njirimara anụ ahụ nke CVD epitaxial oyi akwa dị iche na nke nnukwu ihe, na ikuku oxygen na carbon nke epitaxial oyi akwa na-adịkarị ala, nke bụ uru ya. Otú ọ dị, CVD epitaxial oyi akwa dị mfe na-etolite onwe-doping, na ngwa bara uru kwesịrị ime ụfọdụ jikoro iji belata epitaxial oyi akwa nke onwe-doping, CVD technology ka na akụkụ ụfọdụ nke empirical usoro ala, mkpa ime ọzọ na-omimi nnyocha, nke mere na ọ na-aga n'ihu na-enweta mmepe nke CVD technology.
Usoro mmepe nke CVD dị nnọọ mgbagwoju anya, na mmeghachi omume kemịkalụ na-agụnyekarị ihe dị iche iche na ihe dị iche iche, nwere ike ịmepụta ọnụ ọgụgụ nke ngwaahịa dị n'etiti, na e nwere ọtụtụ mgbanwe dị iche iche nke onwe ha, dị ka okpomọkụ, nrụgide, ọnụego gas, wdg, usoro epitaxial nwere ọnụ ọgụgụ nke azụ na azụ na-aga n'ihu, ibe ha na-emepụta ma melite. Usoro epitaxial nwere ọtụtụ usoro na-aga n'ihu, na-agbasawanye ma na-ezu oke. Iji nyochaa usoro na usoro nke CVD epitaxial growth, nke mbụ, iji dokwuo anya solubility nke reactive bekee na gas na-adọ, nha nhata akụkụ akụkụ nke gas dị iche iche, doro anya kinetic na thermodynamic usoro; mgbe ahụ ịghọta reactive gas sitere na gas na-adọ n'elu nke substrate uka iga, e guzobere ókèala oyi akwa nke gas eruba na elu nke mkpụrụ, uto nke nucleus, nakwa dị ka elu mmeghachi omume, mgbasa na Mbugharị, ma si otú n'ikpeazụ mepụta chọrọ film. N'ime usoro mmepe nke CVD, mmepe na ọganihu nke reactor na-arụ ọrụ dị oke mkpa, nke na-ekpebi n'ụzọ dị ukwuu ịdị mma nke oyi akwa epitaxial. Ọdịdị dị elu nke oyi akwa epitaxial, ntụpọ lattice, nkesa na ịchịkwa adịghị ọcha, ọkpụrụkpụ na otu nke oyi akwa epitaxial na-emetụta kpọmkwem arụmọrụ ngwaọrụ na mkpụrụ.
–E wepụtara akụkọ aonye na-emepụta igwe mkpuchi ikukuGuangdong Zhenhua
Oge nzipu: Mee-04-2024