Epitaxial kev loj hlob, feem ntau kuj hu ua epitaxy, yog ib qho ntawm cov txheej txheem tseem ceeb tshaj plaws hauv kev tsim cov khoom siv semiconductor thiab cov khoom siv. Lub npe hu ua epitaxial kev loj hlob yog nyob rau hauv tej yam kev mob nyob rau hauv ib tug crystal substrate nyob rau hauv kev loj hlob ntawm ib txheej ntawm ib yam khoom zaj duab xis txheej txheem, kev loj hlob ntawm ib tug crystal zaj duab xis yog hu ua epitaxial txheej epitaxial technology yog thaum ntxov 1960s nyob rau hauv lub silicon ib leeg-crystal nyias zaj duab xis kev tshawb fawb nyob rau hauv lub hauv paus ntawm qhov tshwm sim ntawm txoj kev loj hlob ntawm ze li ntawm ib nrab xyoo pua tam sim no, cov neeg muaj peev xwm ua tau ib tug ntau yam ntawm epitaxial zaj duab xis. kev loj hlob. Epitaxial thev naus laus zis tau daws ntau yam teeb meem hauv semiconductor discrete Cheebtsam thiab kev sib txuas ua ke, txhim kho kev ua tau zoo ntawm cov cuab yeej. Epitaxial zaj duab xis tuaj yeem tswj hwm nws cov tuab thiab doping zog, qhov no tau coj mus rau kev txhim kho sai ntawm semiconductor kev sib xyaw ua ke, mus rau theem zoo meej dua. Silicon ib leeg siv lead ua los ntawm slicing, sib tsoo, polishing thiab lwm yam txheej txheem ua, kom tau txais cov ntawv polished, koj tuaj yeem ua cov khoom sib cais thiab sib xyaw ua ke ntawm nws. Tab sis nyob rau hauv ntau lub sij hawm no polished ntawv tsuas yog ib tug neeg kho tshuab kev pab txhawb nqa rau lub substrate, nyob rau hauv uas nws yog tsim nyog los ua ntej loj hlob ib txheej ntawm ib tug crystal zaj duab xis nrog rau cov tsim nyog hom ntawm conductivity thiab resistivity, thiab ces discrete Cheebtsam los yog integrated circuits ua nyob rau hauv ib tug tib-crystal zaj duab xis. Cov qauv no yog siv, piv txwv li, hauv kev tsim cov silicon high-frequency high-power transistors, daws qhov teeb meem ntawm kev tawg voltage thiab series tsis kam. Lub collector ntawm lub transistor xav tau ib tug high breakdown voltage, uas yog txiav txim los ntawm lub resistivity ntawm pn hlws ris ntawm silicon wafer. Txhawm rau ua kom tau raws li qhov yuav tsum tau ua, cov khoom siv tiv thaiv siab yog xav tau. Cov neeg nyob rau hauv hnyav doped n-hom low-resistance cov ntaub ntawv nyob rau hauv lub epitaxial ob peb mus rau ib tug kaum os microns tuab maj mam doped high-resistance n-hom txheej, transistor ntau lawm nyob rau hauv lub epitaxial txheej, uas daws cov high breakdown voltage yuav tsum tau los ntawm lub siab resistivity thiab tsis tshua muaj collector series kuj yuav tsum tau los ntawm cov uas tsis muaj substrate resistivity ntawm contradiction ntawm.
Gas-theem epitaxial kev loj hlob yog thawj daim ntawv thov nyob rau hauv lub semiconductor teb ntawm ib tug paub tab ntau epitaxial txoj kev loj hlob technology, uas plays lub luag hauj lwm tseem ceeb nyob rau hauv txoj kev loj hlob ntawm semiconductor science, zoo heev pab rau qhov zoo ntawm semiconductor cov ntaub ntawv thiab cov cuab yeej thiab lawv cov kev ua tau zoo. Tam sim no, kev npaj ntawm semiconductor ib leeg siv lead ua epitaxial zaj duab xis yog txoj kev tseem ceeb tshaj plaws ntawm cov tshuaj vapor deposition. Lub npe hu ua chemical vapor deposition, uas yog, kev siv cov tshuaj gaseous ntawm cov khoom ntawm cov tshuaj tiv thaiv, cov txheej txheem ntawm kev tsim cov khoom deposits. CVD thev naus laus zis tuaj yeem loj hlob zoo ib leeg-crystal zaj duab xis, kom tau txais cov hom doping thiab epitaxial thickness, yooj yim kom paub cov khoom loj, thiab yog li ntawd tau siv dav hauv kev lag luam. Hauv kev lag luam, epitaxial wafer npaj los ntawm CVD feem ntau muaj ib lossis ntau txheej faus, uas tuaj yeem siv los tswj cov qauv siv thiab doping faib los ntawm diffusion lossis ion implantation; Lub cev lub cev ntawm CVD epitaxial txheej yog txawv los ntawm cov khoom ntawm cov khoom loj, thiab cov pa oxygen thiab carbon cov ntsiab lus ntawm cov txheej epitaxial feem ntau qis heev, uas yog nws qhov zoo dua. Txawm li cas los xij, CVD epitaxial txheej yog ib qho yooj yim los tsim nws tus kheej-doping, hauv kev siv tswv yim yuav tsum tau ua qee yam kev ntsuas los txo cov epitaxial txheej ntawm tus kheej doping, CVD thev naus laus zis tseem nyob hauv qee yam ntawm cov txheej txheem empirical xeev, yuav tsum tau ua ntau qhov kev tshawb fawb tob, kom nws txuas ntxiv mus rau kev txhim kho ntawm CVD thev naus laus zis.
CVD kev loj hlob mechanism yog qhov nyuaj heev, nyob rau hauv cov tshuaj tiv thaiv feem ntau suav nrog ntau yam ntawm cov khoom thiab cov khoom, tuaj yeem tsim cov khoom lag luam nruab nrab, thiab muaj ntau yam kev ywj pheej, xws li kub, siab, roj ntws tus nqi, thiab lwm yam., cov txheej txheem epitaxial muaj ib tug xov tooj ntawm rov qab mus rau successively, ib leeg los tsim thiab txhim kho. Cov txheej txheem epitaxial muaj ntau yam ua tiav, sib koom ua ke thiab ua kom tiav cov kauj ruam. Txhawm rau txheeb xyuas cov txheej txheem thiab cov txheej txheem ntawm CVD epitaxial txoj kev loj hlob, ua ntej ntawm tag nrho cov, kom paub meej cov solubility ntawm reactive tshuaj nyob rau hauv cov roj theem, qhov sib npaug ib nrab siab ntawm ntau yam gases, ntshiab kinetic thiab thermodynamic txheej txheem; Tom qab ntawd kom nkag siab txog cov roj reactive los ntawm cov roj theem mus rau saum npoo ntawm lub substrate huab hwm coj thauj, tsim ntawm ciam txheej ntawm cov pa ntws thiab qhov chaw ntawm lub substrate, kev loj hlob ntawm cov nucleus, nrog rau cov tshuaj tiv thaiv nto, diffusion thiab tsiv teb tsaws, thiab yog li thaum kawg tsim cov yeeb yaj kiab uas xav tau. Nyob rau hauv txoj kev loj hlob ntawm CVD, kev loj hlob thiab kev loj hlob ntawm lub reactor ua lub luag haujlwm tseem ceeb, uas feem ntau txiav txim siab qhov zoo ntawm cov txheej txheem epitaxial. Qhov saum npoo morphology ntawm txheej epitaxial, lattice defects, faib thiab tswj cov impurities, thickness thiab uniformity ntawm epitaxial txheej ncaj qha cuam tshuam rau cov cuab yeej kev ua tau zoo thiab tawm los.
– Zaj lus no yog tso tawm los ntawmtshuab nqus tsev txheej tshuab manufacturersGuangdong Zhenhua
Post lub sij hawm: May-04-2024