Uhlelo lokumboza nge-vacuum luwubuchwepheshe obusetshenziswa ukufaka ifilimu encane noma ukumboza endaweni evacuum. Le nqubo iqinisekisa ukumboza kwekhwalithi ephezulu, okufanayo, nokuqina, okubalulekile ezimbonini ezahlukahlukene njenge-elekthronikhi, i-optics, izimoto, kanye ne-aerospace. Kunezinhlobo ezahlukene zezinhlelo zokumboza nge-vacuum, ngayinye efanelekile kuzinhlelo ezithile. Nazi izinhlobo ezimbalwa ezibalulekile:
Ukususwa Komusi Ongokoqobo (i-PVD): Le nqubo ihilela ukudluliselwa kwezinto ezibonakalayo kusuka emthonjeni oqinile noma owuketshezi kuya endaweni engaphansi. Izindlela ezivamile zifaka:
Ukuphalaza: Izinto zikhishwa endaweni eqondiwe bese zifakwa endaweni engaphansi komhlaba.
Ukuhwamuka: Izinto ziyashiswa kuze kube yilapho zihwamuka bese ziqina phezu kwesisekelo.
Ukususwa Komusi Wekhemikhali (i-CVD): Le nqubo ihilela ukusabela kwamakhemikhali phakathi kwesandulela sesigaba somusi kanye nobuso be-substrate, okwakha ifilimu eqinile. Izinhlobo zifaka:
I-Plasma-Enhanced CVD (PECVD): Isebenzisa i-plasma ukuthuthukisa ukusabela kwamakhemikhali.
I-Metal-Organic CVD (MOCVD): Isebenzisa amakhemikhali ensimbi-organic njengezinto ezandulelayo.
Ukubekwa Kwezingqimba Ze-Atomic (ALD): Inqubo elawulwa kakhulu ebeka izingqimba ze-athomu ngayinye ngesikhathi, iqinisekisa ukujiya nokwakheka okunembile.
Ukuphalaza kweMagnetron: Uhlobo lwe-PVD lapho kusetshenziswa khona amasimu kazibuthe ukuvimba i-plasma, okwandisa ukusebenza kahle kwenqubo yokuphalaza.
Ukufakwa kwe-Ion Beam: Kusebenzisa imishayo ye-ion ukukhipha izinto ezivela endaweni ethile bese zifakwa endaweni engaphansi komhlaba.
Izicelo:
Ama-semiconductor: Ama-coatings ama-microchip kanye nezingxenye ze-elekthronikhi.
I-Optics: Izembozo ezivimbela ukukhanya, izibuko, namalensi.
Izimoto: Ukugqoka izingxenye zenjini kanye nokuhlobisa okuqediwe.
Izindiza: Izimbozo zokuvimbela ukushisa kanye nezendlalelo zokuvikela.
Izinzuzo:
Ukugqoka Okufanayo: Kufinyelela ukujiya nokwakheka okufanayo kuyo yonke i-substrate.
Ukunamathela Okuphezulu: Izimbozo zinamathela kahle ku-substrate, ziqinisa ukuqina.
Ubumsulwa kanye nekhwalithi: Indawo yokuhlanza i-vacuum inciphisa ukungcola, okuholela ekumbozweni okumsulwa kakhulu.
–Lesi sihloko sikhishwe yi-umenzi womshini wokumboza nge-vacuumI-Guangdong Zhenhua
Isikhathi sokuthunyelwe: Julayi-09-2024