Sistimi ea ho koahela ka vacuum ke theknoloji e sebelisoang ho sebelisa filimi e tšesaane kapa ho koahela holim'a sebaka tikolohong ea vacuum. Ts'ebetso ena e netefatsa ho koahela ka boleng bo holimo, ho ts'oanang le ho tšoarella, e leng habohlokoa liindastering tse fapaneng tse kang tsa elektroniki, tsa optics, tsa likoloi le tsa lifofane. Ho na le mefuta e fapaneng ea litsamaiso tsa ho koahela ka vacuum, e 'ngoe le e 'ngoe e loketse lits'ebetso tse itseng. Mona ke mefuta e 'maloa ea bohlokoa:
Ho ntsha mouoane wa mmele (PVD): Ts'ebetso ena e kenyelletsa phetiso ya sebele ya thepa ho tloha mohloding o tiileng kapa o metsi ho ya ho substrate. Mekhoa e tlwaelehileng e kenyeletsa:
Ho ntsha matheba: Thepa e ntshwa ho tloha moo e shebilweng teng mme e bewa hodima substrate.
Ho fetoha ha mouoane: Thepa e futhumatsoa ho fihlela e fetoha mouoane ebe e fetoha mouoane holim'a substrate.
Ho ntshwa ha mouoane ka dikhemikhale (CVD): Ts'ebetso ena e kenyelletsa karabelo ya dikhemikhale pakeng tsa selelekela sa mouoane le bokaholimo ba substrate, ho etsa filimi e tiileng. Mefuta e fapaneng e kenyeletsa:
CVD e Ntlafalitsoeng ke Plasma (PECVD): E sebelisa plasma ho ntlafatsa liketso tsa lik'hemik'hale.
CVD ea Tšepe-E Hloekileng (MOCVD): E sebelisa metsoako ea tšepe-e manyolo e le lintho tse tlang pele ho eona.
Ho Hlahisa Mealo ea Atomic (ALD): Ts'ebetso e laoloang haholo e behang mealo ea athomo ka bonngoe, e netefatsang botenya le sebopeho se nepahetseng.
Ho qhala ha Magnetron: Mofuta oa PVD moo masimo a makenete a sebelisoang ho thibela plasma, ho eketsa katleho ea ts'ebetso ea ho qhala.
Ho lahla mahlasedi a Ion: Ho sebedisa mahlasedi a ion ho ntsha thepa ho tloha ho sepheo le ho e kenya hodima substrate.
Likopo:
Li-semiconductor: Liaparo tsa li-microchip le likarolo tsa elektroniki.
Optics: Liaparo tse thibelang ho bonahatsa, liipone le lilense.
Likoloi: Liaparo bakeng sa likarolo tsa enjene le mekhabiso e khabisitsoeng.
Sepakapaka: Liaparo tsa tšireletso ea mocheso le likarolo tse sireletsang.
Melemo:
Liaparo tse Tšoanang: E fihlella botenya le sebopeho se tsitsitseng ho pholletsa le substrate.
Ho Khomarela ho Hoholo: Liaparo li khomarela hantle substrate, li eketsa ho tšoarella.
Bohloeki le Boleng: Tikoloho ea vacuum e fokotsa tšilafalo, e leng se fellang ka ho koaheloa ka bohloeki bo phahameng.
–Sengoloa sena se lokollotsoe kemoetsi oa mochini oa ho roala ka vacuum cleanerGuangdong Zhenhua
Nako ea poso: Phupu-09-2024