Inkqubo yokugquma nge-vacuum yiteknoloji esetyenziselwa ukufaka ifilimu encinci okanye i-coating kumphezulu kwindawo yokugquma nge-vacuum. Le nkqubo iqinisekisa i-coating esemgangathweni ophezulu, efanayo, nehlala ixesha elide, ebalulekileyo kumashishini ahlukeneyo afana ne-elektroniki, i-optics, iimoto, kunye ne-aerospace. Kukho iintlobo ezahlukeneyo zeenkqubo zokugquma nge-vacuum, nganye ifanelekile kwizicelo ezithile. Nazi iintlobo ezimbalwa eziphambili:
Ukutsalwa komphunga ngokwasemzimbeni (i-PVD): Le nkqubo ibandakanya ukudluliselwa kwezinto ngokwasemzimbeni ukusuka kumthombo oqinileyo okanye olwelo ukuya kwisiseko. Iindlela eziqhelekileyo ziquka:
Ukutshiza: Izinto ezisetyenzisiweyo zikhutshwa kwindawo ekujoliswe kuyo zize zibekwe kwindawo engaphantsi komhlaba.
Ukufuma: Izinto ziyafudunyezwa de zibe ngumphunga zize zijiye kwi-substrate.
Ukutsalwa koMphunga weKhemikhali (i-CVD): Le nkqubo ibandakanya ukusabela kweekhemikhali phakathi kwesandulela sesigaba somphunga kunye nomphezulu wesiseko, okwenza ifilimu eqinileyo. Iindidi ziquka:
I-Plasma-Enhanced CVD (PECVD): Isebenzisa i-plasma ukuphucula ii-chemical reactions.
I-Metal-Organic CVD (MOCVD): Isebenzisa iikhompawundi zesinyithi-zendalo njengezinto ezizandulelayo.
Ukubekwa kweLayer yeAtomic (ALD): Inkqubo elawulwa kakhulu ebeka iileya zeathomu nganye nganye, iqinisekisa ubukhulu kunye nokwakheka okuchanekileyo.
Ukutshiza ngeMagnetron: Uhlobo lwePVD apho kusetyenziswa khona amasimi emagnethi ukuvala iplasma, nto leyo enyusa ukusebenza kakuhle kwenkqubo yokutshiza.
Ukubekwa kwe-ion beam: Kusebenzisa imiqadi ye-ion ukutshiza izinto ezivela kwindawo ekujoliswe kuyo kwaye zibekwe kwi-substrate.
Izicelo:
IiSemiconductors: Iingubo zee-microchips kunye nezixhobo ze-elektroniki.
I-Optics: Iingubo ezikhusela ukukhanya, izibuko, kunye neelensi.
Iimoto: Iingubo zezixhobo zenjini kunye nokugqitywa kokuhombisa.
I-Aerospace: Iingubo zokuthintela ubushushu kunye neengqimba zokukhusela.
Iingenelo:
Iingubo Ezifanayo: Zifikelela kubukhulu obufanayo kunye nokwakheka okulinganayo kwisiseko sonke.
Ukuncamathela Okuphezulu: Iingubo zinamathela kakuhle kwi-substrate, nto leyo eqinisa ukuqina.
Ubunyulu kunye noMgangatho: Indawo yokucoca umoya inciphisa ungcoliseko, nto leyo ebangela ukuba iingubo zibe nyulu kakhulu.
–Eli nqaku likhutshwe nguumenzi womatshini wokugquma nge-vacuumGuangdong Zhenhua
Ixesha leposi: Julayi-09-2024