Ko te pūnaha paninga korehau he hangarau e whakamahia ana hei pani i tētahi kiriata angiangi, paninga rānei ki tētahi mata i roto i te taiao korehau. Mā tēnei tukanga ka whakarite kia kounga teitei, kia ōrite, kia pakari hoki te paninga, he mea nui tēnei i roto i ngā momo ahumahi pēnei i te hikohiko, te whatu, te motuka, me te rererangi. He rerekē ngā momo pūnaha paninga korehau, ia momo e tika ana mō ngā tono motuhake. Anei ētahi momo matua:
Te Whakatakotoranga Kohu Ā-tinana (PVD): Kei roto i tēnei tukanga te whakawhiti ā-tinana o te rauemi mai i tētahi pūtake totoka, wai rānei ki te papa. Ko ngā tikanga noa ko:
Te pupuhi: Ka makahia te rauemi mai i te ūnga ka whakatakotoria ki runga i te papa.
Te mimiti: Ka whakamahanahia te rauemi kia mimiti rā anō, kātahi ka whakatōtō ki runga i te papa.
Te Whakatakotoranga Kohu Matū (CVD): Kei roto i tēnei tukanga he tauhohenga matū i waenga i te matūmua o te kohu me te mata o te papa, ka hanga he kiriata totoka. Ko ētahi o ngā momo ko:
CVD Whakarei-Plasma (PECVD): Ka whakamahi i te plasma hei whakarei ake i ngā tauhohenga matū.
CVD Whakarewa-Waro (MOCVD): E whakamahi ana i ngā matū whakarewa-waro hei matū mua.
Te Whakatakotoranga Papanga Atomika (ALD): He tukanga tino whakahaeretia e whakatakoto ana i ngā paparanga atomika takitahi, kia tika ai te matotoru me te hanganga.
Te Whakarewatanga Magnetron: He momo PVD e whakamahia ai ngā papa aukume hei whakawhāiti i te plasma, kia nui ake ai te whai huatanga o te tukanga whakarewatanga.
Te Whakatakotoranga Hiko Katote: Ka whakamahi i ngā hihi katote hei pupuhi i te rauemi mai i tētahi ūnga ka whakatakoto ki runga i te papa.
Ngā tono:
Ngā Kaiārahi-ā-Iwi: Ngā paninga mō ngā maramara iti me ngā wāhanga hiko.
Whatu: Ngā paninga ārai-whakaata, ngā whakaata, me ngā karāhe arotahi.
Aunoa: Ngā paninga mō ngā wāhanga miihini me ngā whakaotinga whakapaipai.
Rererangi: Ngā paninga ārai wera me ngā paparanga tiaki.
Ngā Painga:
Ngā Paninga ōrite: Ka tutuki te matotoru me te hanganga ōrite puta noa i te papa.
Te Piripiri Nui: Ka piri pai ngā paninga ki te papa, ka roa ake te mau.
Te Parakore me te Kounga: Ka whakaitihia te poke e te taiao korehau, ka hua ake he paninga parakore teitei.
–Nā tekaihanga mīhini paninga korehauGuangdong Zhenhua
Wā tuku: Hōngongoi-09-2024