Ukukhiqizwa kwamadivayisi efilimu encane ebonakalayo kwenziwa ekamelweni le-vacuum, futhi ukukhula kwesendlalelo sefilimu kuyinqubo encane kakhulu. Kodwa-ke, njengamanje, izinqubo ezinkulu ezingalawulwa ngqo ezinye zezinto ezinkulu ezinobudlelwano obungaqondile nekhwalithi yesendlalelo sefilimu. Noma kunjalo, ngocwaningo oluqhubekayo lokuhlola isikhathi eside, abantu bathole ubudlelwano obujwayelekile phakathi kwekhwalithi yefilimu nalezi zinto ezinkulu, ezibe yincazelo yenqubo yokuqondisa ukukhiqizwa kwamadivayisi okuhamba ngefilimu, futhi zidlala indima ebalulekile ekukhiqizweni kwamadivayisi efilimu encane ebonakalayo esezingeni eliphezulu.
1. Umphumela we-vacuum plating
Ithonya lezinga le-vacuum ezimpahleni zefilimu libangelwa ukulahleka kwamandla kanye nokusabela kwamakhemikhali okubangelwa ukushayisana kwesigaba segesi phakathi kwegesi eseleyo nama-athomu nama-molecule efilimu. Uma izinga le-vacuum liphansi, amathuba okuhlangana phakathi kwama-molecule omhwamuko wezinto zefilimu nama-molecule egesi asele ayanda, futhi amandla e-kinetic ama-molecule omhwamuko ancishiswa kakhulu, okwenza ama-molecule omhwamuko angakwazi ukufinyelela i-substrate, noma angakwazi ukudabula ungqimba lokumunca igesi ku-substrate, noma angakwazi ukudabula ungqimba lokumunca igesi kodwa amandla okumunca ne-substrate mancane kakhulu. Ngenxa yalokho, ifilimu ebekwe amadivayisi efilimu encane e-optical ikhululekile, ubuningi bokuqongelela buphansi, amandla omshini aphansi, ukwakheka kwamakhemikhali akuhlanzekile, futhi inkomba yokubona kanye nokuqina kwengqimba yefilimu kubi.
Ngokuvamile, ngokwanda kwe-vacuum, isakhiwo sefilimu siyathuthuka, ukwakheka kwamakhemikhali kuba msulwa, kodwa ukucindezeleka kuyanda. Uma kuphezulu ubumsulwa befilimu yensimbi kanye nefilimu ye-semiconductor, kungcono, kuncike ezingeni le-vacuum, elidinga i-void ephezulu eqondile. Izakhiwo eziyinhloko zamafilimu athintekile yi-vacuum degree yi-refractive index, i-scattering, amandla omshini kanye nokungancibiliki.
2. Ithonya lesilinganiso sokufakwa kwemali
Izinga lokufakwa kwento liyipharamitha yenqubo echaza isivinini sokufakwa kwento ifilimu, evezwa ubukhulu bento ifilimu eyakhiwe ebusweni be-plating ngesikhathi seyunithi, futhi iyunithi ingu-nm·s-1.
Izinga lokufakwa linethonya elisobala ku-refractive index, ukuqina, amandla omshini, ukunamathela kanye nokucindezeleka kwefilimu. Uma izinga lokufakwa liphansi, iningi lama-molecule omhwamuko liyabuya lisuka ku-substrate, ukwakheka kwama-nuclei ekristalu kuhamba kancane, futhi ukujiya kungenziwa kuphela kuma-aggregates amakhulu, okwenza isakhiwo sefilimu sikhululeke. Ngokwanda kwezinga lokufakwa, kuzokwakhiwa ifilimu encane neqinile, ukusabalala kokukhanya kuzoncipha, futhi ukuqina kuzokwanda. Ngakho-ke, indlela yokukhetha kahle izinga lokufakwa kwefilimu kuyinkinga ebalulekile enqubweni yokuhwamuka, futhi ukukhetha okuthile kufanele kunqunywe ngokwezinto zefilimu.
Kunezindlela ezimbili zokuthuthukisa izinga lokufakwa: (1) ukwandisa izinga lokushisa lomthombo wokuhwamuka (2) ukwandisa indlela yendawo yomthombo wokuhwamuka.
Isikhathi sokuthunyelwe: Mashi-29-2024