Zinthu ndi Njira Zogwirira Ntchito Zokhudza Ubwino wa Zipangizo Zopyapyala Zopangira Filimu (Gawo 1)

Kupanga zipangizo zoyezera filimu yopyapyala kumachitika m'chipinda chopanda mpweya, ndipo kukula kwa filimuyo ndi njira yowonera zinthu zazing'ono. Komabe, pakadali pano, njira zoyezera filimu zomwe zitha kuyendetsedwa mwachindunji ndi zinthu zina zazikulu zomwe zili ndi ubale wosalunjika ndi mtundu wa filimuyo. Ngakhale zili choncho, kudzera mu kafukufuku wopitilira nthawi yayitali, anthu apeza ubale wokhazikika pakati pa khalidwe la filimuyo ndi zinthu zazikuluzikulu izi, zomwe zakhala njira yowongolera kupanga zida zoyendera mafilimu, ndipo zimagwira ntchito yofunika kwambiri popanga zipangizo zapamwamba zoyezera filimu yopyapyala.

1. Zotsatira za vacuum plating

Mphamvu ya vacuum degree pa katundu wa filimuyi imachokera ku kutayika kwa mphamvu ndi momwe mankhwala amagwirira ntchito chifukwa cha kugundana kwa mpweya pakati pa mpweya wotsalira ndi maatomu ndi mamolekyu a filimuyi. Ngati vacuum degree ili yochepa, mwayi woti mamolekyu a nthunzi a filimuyi ndi mamolekyu otsala a mpweyawo agwirizane umawonjezeka, ndipo mphamvu ya kinetic ya mamolekyu a nthunzi imachepa kwambiri, zomwe zimapangitsa kuti mamolekyu a nthunzi asafike pa substrate, kapena asathe kupyola mu gawo la adsorption la gasi pa substrate, kapena asathe kupyola mu gawo la adsorption la gasi koma mphamvu ya adsorption ndi gawoli ndi yochepa kwambiri. Zotsatira zake, filimu yomwe imayikidwa ndi zipangizo zowunikira ndi filimu yopyapyala imakhala yotayirira, kuchuluka kwa kusonkhana kumakhala kochepa, mphamvu ya makina ndi yofooka, kapangidwe ka mankhwala si koyera, ndipo chizindikiro cha refractive ndi kuuma kwa gawo la filimu ndi kofooka.

Kawirikawiri, pamene vacuum ikuwonjezeka, kapangidwe ka filimuyo kamakula, kapangidwe ka mankhwala kamakhala koyera, koma kupsinjika kumawonjezeka. Kuyera kwa filimu yachitsulo ndi semiconductor filimu ikakula, zimakhala bwino, zimadalira kuchuluka kwa vacuum, komwe kumafuna void yayikulu. Makhalidwe akuluakulu a mafilimu omwe amakhudzidwa ndi vacuum ndi refractive index, scattering, mphamvu ya makina komanso kusasungunuka.
2. Mphamvu ya kuchuluka kwa ndalama zomwe zaperekedwa

Kuchuluka kwa kuyika ndi njira yofotokozera liwiro la kuyika kwa filimuyi, yomwe imawonetsedwa ndi makulidwe a filimuyo yomwe imapangidwa pamwamba pa pulasitiki munthawi ya unit, ndipo unit ndi nm·s-1.

Kuchuluka kwa kuyika kwa filimuyi kumakhudza kwambiri kulimba kwa refractive index, kulimba, mphamvu ya makina, kumamatira ndi kupsinjika kwa filimuyi. Ngati kuchuluka kwa kuyika kwa filimuyi kuli kochepa, mamolekyu ambiri a nthunzi amabwerera kuchokera pansi, mapangidwe a nuclei ya kristalo amakhala pang'onopang'ono, ndipo kuzizira kumatha kuchitika kokha pamagulu akuluakulu, zomwe zimapangitsa kuti kapangidwe ka filimuyi kakhale komasuka. Ndi kuwonjezeka kwa kuchuluka kwa kuyika kwa filimuyi, filimu yopyapyala komanso yokhuthala idzapangidwa, kufalikira kwa kuwala kudzachepa, ndipo kulimba kudzawonjezeka. Chifukwa chake, momwe mungasankhire bwino kuchuluka kwa kuyika kwa filimuyi ndi nkhani yofunika kwambiri pa njira yotulutsira nthunzi, ndipo kusankha kwina kuyenera kutsimikiziridwa malinga ndi zinthu za filimuyi.

Pali njira ziwiri zowonjezera kuchuluka kwa madzi omwe amaikidwa: (1) njira yowonjezera kutentha kwa madzi omwe amatuluka (2) njira yowonjezera malo omwe amatuluka madzi omwe amatuluka.