Ukukhiqizwa kwemishini yefilimu emincane ye-optical kwenziwa ekamelweni le-vacuum, futhi ukukhula kongqimba lwefilimu kuyinqubo encane. Kodwa-ke, okwamanje, izinqubo ze-macroscopic ezingalawulwa ngokuqondile ezinye izici ze-macroscopic ezinobudlelwane obungaqondile nekhwalithi yongqimba lwefilimu. Noma kunjalo, ngocwaningo lokuhlola oluqhubekayo lwesikhathi eside, abantu bathole ubudlelwano obujwayelekile phakathi kwekhwalithi yefilimu kanye nalezi zici ezinkulu, osekuphenduke inqubo ecaciswayo yokuqondisa ukwenziwa kwamadivayisi ohambo lwefilimu, futhi idlala indima ebalulekile ekwakhiweni kwemishini yekhwalithi ephezulu yefilimu emincane ye-optical.
1. Umphumela we-vacuum plating
Umthelela wedigri ye-vacuum ezimpahleni zefilimu kungenxa yokulahlekelwa amandla kanye nokusabela kwamakhemikhali okubangelwa ukushayisana kwesigaba segesi phakathi kwegesi esele nama-athomu efilimu nama-molecule. Uma i-vacuum degree iphansi, amathuba okuhlangana phakathi kwama-molecule omhwamuko wento yefilimu kanye nama-molecule egesi asele ayanda, futhi amandla e-kinetic ama-molecule omhwamuko ancipha kakhulu, okwenza ama-molecule omhwamuko angakwazi ukufinyelela ku-substrate, noma angakwazi ukugqekeza ungqimba lwegesi oluku-adsorption ku-substrate ekwazi ukugqabula ungqimba, noma i-basorption. Amandla e-adsorption ane-substrate mancane kakhulu. Ngenxa yalokho, ifilimu efakwe amadivaysi efilimu emincane ye-optical iyaxega, ukuminyana okunqwabelanayo kuphansi, amandla emishini ampofu, ukwakheka kwamakhemikhali akuhlanzekile, futhi inkomba ye-refractive nobulukhuni besendlalelo sefilimu kubi.
Ngokuvamile, ngokwanda kwe-vacuum, isakhiwo sefilimu siyathuthukiswa, ukwakheka kwamakhemikhali kuba msulwa, kodwa ukucindezeleka kuyanda. Ukuphakama kokuhlanzeka kwefilimu yensimbi nefilimu ye-semiconductor, kungcono, kuncike ezingeni le-vacuum, elidinga i-void ephakeme eqondile. Izakhiwo eziyinhloko zamafilimu athintwe yi-vacuum degree inkomba ye-refractive, ukusabalalisa, amandla emishini kanye nokungancibiliki.
2. Umthelela wesilinganiso sokubekwa
Izinga lokubeka liyipharamitha yenqubo echaza isivinini sokumiswa kwefilimu, esivezwa ukujiya kwefilimu okwakhiwa endaweni ecwebezelayo ngesikhathi seyunithi, futhi iyunithi ithi nm·s-1.
Izinga lokubeka linomthelela osobala kunkomba ye-refractive, ukuqina, amandla emishini, ukunamathela kanye nokucindezeleka kwefilimu. Uma izinga lokubeka liphansi, iningi lama-molecule e-vapor libuya ku-substrate, ukwakheka kwe-crystal nuclei kuhamba kancane, futhi ukufingqa kungenziwa kuphela kuma-aggregate amakhulu, ngaleyo ndlela kwenza isakhiwo sefilimu sikhululeke. Ngokukhuphuka kwezinga lokubeka, ifilimu enhle neminyene izokwakhiwa, ukusabalalisa ukukhanya kuzokwehla, futhi ukuqina kuzokwanda. Ngakho-ke, indlela yokukhetha kahle izinga lokubekwa kwefilimu kuyindaba ebalulekile enqubweni yokuhwamuka, futhi ukukhethwa okuqondile kufanele kunqunywe ngokusho kwefilimu.
Kunezindlela ezimbili zokuthuthukisa izinga lokubeka: (1) ukwandisa izinga lokushisa lomthombo wokuhwamuka (2) ukwandisa indlela yendawo yomthombo wokuhwamuka.
Isikhathi sokuthumela: Mar-29-2024