Kugadzirwa kwemagetsi akaonda akaonda firimu kunoitwa mukamuri yevacuum, uye kukura kweiyo firimu layer ndeye microscopic process. Nekudaro, parizvino, macroscopic maitiro anogona kudzorwa zvakananga mamwe macroscopic zvinhu zvine hukama husina kunangana nehuhu hweiyo firimu layer. Kunyange zvakadaro, kuburikidza nekutsvaga kwenguva refu kwekuedza kwekuedza, vanhu vakawana hukama hwenguva dzose pakati pemhando yefirimu uye izvi macro factor, iyo yave nzira yekutungamira kugadzirwa kwemafirimu ekufambisa michina, uye inoita basa rinokosha mukugadzirwa kwepamusoro-soro optical thin film device.
1. Mhedzisiro yevacuum plating
Kupesvedzera kwedhigirii revacuum pazvinhu zvemufirimu kunokonzerwa nekurasikirwa kwesimba uye kuita kwemakemikari kunokonzerwa nekudhumhana kwechikamu chegasi pakati pegasi rasara nemaatomu emufirimu nemamorekuru. Kana iyo vacuum dhigirii yakadzikira, mukana wekusanganiswa pakati pemamorekuru emhute emufirimu zvinhu uye mamwe mamorekuru egasi asara anowedzera, uye simba rekinetic remamorekuru emhute rinodzikira zvakanyanya, zvichiita kuti mamorekuru emhute atadze kusvika kune substrate, kana kutadza kutyora gasi adsorption layer pane substrate inokwanisa kutsemura chikamu, adsorption simba neiyo substrate idiki kwazvo. Nekuda kweizvozvo, iyo firimu yakaiswa neoptical yakaonda firimu michina yakasununguka, kuwanda kwekuunganidza kwakaderera, simba remagetsi harina kunaka, chimiro chemakemikari hachina kuchena, uye iyo refractive index uye kuoma kweiyo firimu layer hazvina kunaka.
Kazhinji, nekuwedzera kwevacuum, chimiro chemufirimu chinovandudzwa, chimiro chemakemikari chinova chakachena, asi kushungurudzika kunowedzera. Iyo yakakwirira kuchena kwesimbi firimu uye semiconductor firimu, zviri nani, ivo vanovimba nedhigirii yevacuum, iyo inoda yakakwirira yakananga isina. Iwo makuru zvimiro zvemafirimu akakanganiswa nedhigirii yevacuum ndeye refractive index, kuparadzira, simba remagetsi uye kusapinda.
2. Pesvedzero yedeposition rate
Deposition rate inzira inotsanangura kukurumidza kwekuisa kwefirimu, kunoratidzwa nekukora kwefirimu rakaumbwa pamusoro peplating munguva yeyuniti, uye chikwata nm·s-1.
Iyo deposition rate ine pesvedzero iri pachena pane refractive index, kusimba, simba remagetsi, kunamatira uye kushushikana kwefirimu. Kana iyo deposition rate yakaderera, mazhinji emhute mamorekuru anodzoka kubva kune substrate, kuumbwa kwekristaro nuclei kunononoka, uye condensation inogona kungoitwa pane yakakura aggregates, nokudaro kuita kuti chimiro chefirimu chisununguke. Nekuwedzera kwehuwandu hwekuisa, firimu rakanaka uye rakasviba richaumbwa, kupararira kwechiedza kunoderera, uye kusimba kuchawedzera. Naizvozvo, nzira yekusarudza nemazvo chiyero chekuisa firimu inyaya yakakosha mukuita evaporation, uye iyo chaiyo sarudzo inofanirwa kutariswa zvinoenderana nefirimu zvinhu.
Pane nzira mbiri dzekuvandudza deposition rate: (1) kuwedzera evaporation sosi tembiricha nzira (2) kuwedzera evaporation sosi nzvimbo nzira.
Nguva yekutumira: Mar-29-2024