Emkhakheni wokufakwa kwefilimu encane, ubuchwepheshe bokubhoboza bube yindlela esetshenziswa kabanzi ukufeza amafilimu amancane aqondile futhi afanayo ezimbonini ezahlukahlukene. Ukuguquguquka nokuthembeka kwalawa mathekhinoloji kwandisa izinhlelo zawo zokusebenza, okuvumela onjiniyela nabacwaningi ukuthi bahlele amafilimu amancane ngezinjongo ezithile. Kulesi sihloko sebhulogi, sizobheka ngokujulile izinhlobo ezahlukene zobuchwepheshe bokubhoboza obuvame ukusetshenziswa namuhla, sichaze izici zabo ezihlukile, izinzuzo kanye nezinhlelo zokusebenza.
1. Ukuphalaza kwe-DC
Ukusputtering kwe-DC kungenye yezindlela eziyisisekelo nezisetshenziswa kabanzi zokufaka ifilimu encane. Le nqubo ihilela ukusebenzisa umthombo wamandla we-DC ukukhiqiza ukukhishwa kokukhanya endaweni yegesi enomfutho ophansi. Ama-ion amahle ku-plasma ahlasela izinto eziqondiwe, akhiphe ama-athomu futhi awabeke ku-substrate. Ukusputtering kwe-DC kwaziwa ngokulula kwawo, ukusebenza kahle kwezindleko, kanye nekhono lokufaka amafilimu amancane asezingeni eliphezulu kuma-substrate ahlukahlukene, kufaka phakathi ingilazi, izinto zobumba, kanye nezinsimbi.
Izicelo ze-DC sputtering:
- Ukukhiqizwa kwe-semiconductor
- Ukugqoka okubonakalayo
- Amaseli elanga acwebezelayo
2. Imvamisa Yomsakazo kanye Nokukhuhla Okusheshayo
Ukuphalaza kwe-Radio Frequency (RF) kuyindlela esetshenziswa ngamandla e-RF yokuphalaza kwe-DC. Kule ndlela, izinto eziqondiwe zigcwele ama-ion akhiqizwa amandla e-radio frequency. Ukuba khona kwensimu ye-RF kuthuthukisa inqubo ye-ionization, okuvumela ukulawulwa okunembile kokwakheka kwefilimu. Ukuphalaza kwe-reactive, ngakolunye uhlangothi, kuhilela ukufaka igesi ephendulayo, njenge-nitrogen noma i-oxygen, ekamelweni lokuphalaza. Lokhu kwenza ukwakheka kwamafilimu amancane amakhemikhali, njenge-oxides noma i-nitrides, anezakhiwo zezinto ezithuthukisiwe.
Ukusetshenziswa kwe-RF kanye ne-Reactive Sputtering:
- Ukugqoka okulwa nokubonakaliswa
- Isithiyo se-semiconductor
- Ama-waveguide e-Optical
3. Ukuphalaza kwe-Magnetron
Ukuphalaza nge-Magnetron kuyindlela ethandwayo yokubeka izinga eliphezulu. Lobu buchwepheshe busebenzisa insimu yamagnetic eduze kwendawo okuqondiwe kuyo ukwandisa ukuminyana kwe-plasma, okuholela ekusebenzeni kahle kwe-ionization ephezulu kanye nokunamathela okuhle kakhulu kwefilimu encane. Insimu yamagnetic eyengeziwe ivimba i-plasma eduze kwendawo okuqondiwe kuyo, inciphisa ukusetshenziswa kwendawo okuqondiwe kuyo uma kuqhathaniswa nezindlela ezivamile zokuphalaza. Ukuphalaza nge-Magnetron kuqinisekisa amazinga aphezulu okubeka kanye nezakhiwo ezinhle zokumboza, okwenza kube kuhle kakhulu ekukhiqizeni okukhulu.
Ukusetshenziswa kwe-magnetron sputtering:
- i-transistor yefilimu encane
- Imidiya yokugcina izinto ezisebenzisa ugesi
- Ukuhlobisa ngengilazi nensimbi
4. Ukuphalaza kwe-ion beam
Ukusputtering nge-ion beam (IBS) kuyindlela eguquguqukayo yokusputtering ngezinto eziqondiwe kusetshenziswa i-ion beam. I-IBS ilawuleka kakhulu, ivumela ukulawulwa okunembile kobukhulu befilimu nokunciphisa ukulahleka kwezinto. Lobu buchwepheshe buqinisekisa ukwakheka okulungile ngokwe-stoichiometric kanye namazinga aphansi okungcola. Ngokufana kwayo okuhle kakhulu kwefilimu kanye nokukhethwa okubanzi kwezinto eziqondiwe, i-IBS ingakhiqiza amafilimu abushelelezi, angenasici, okwenza ifaneleke ukusetshenziswa okukhethekile.
Ukusetshenziswa kwe-Ion Beam Sputtering:
- Isibuko se-X-ray
- Izihlungi ezibonakalayo
- Ukugqoka okulwa nokuguguleka kanye nokungaguquguquki okuphansi
Ekuphetheni
Umhlaba wobuchwepheshe bokubhoboza ubanzi futhi uyahlukahluka, unikeza onjiniyela nabacwaningi amathuba amaningi okubekwa kwefilimu encane. Ulwazi lwezinhlobo ezahlukene zamasu okubhoboza kanye nokusetshenziswa kwawo kubalulekile ukuze kufezwe izakhiwo zefilimu encane ezifanele ngokwezidingo ezithile. Kusukela ekubhobozeni okulula kwe-DC kuya ekubhobozeni okuqondile kwe-ion beam, indlela ngayinye idlala indima ebalulekile ezimbonini eziningi, inikela ekuthuthukisweni kobuchwepheshe obusezingeni eliphezulu.
Ngokuqonda intuthuko yakamuva kwezobuchwepheshe bokupompa, singasebenzisa amandla amafilimu amancane ukuze sihlangabezane nezidingo ezikhulayo zemboni yanamuhla. Kungakhathaliseki ukuthi kusezintweni zikagesi, kuma-optoelectronics noma ezintweni ezithuthukisiwe, ubuchwepheshe bokupompa buyaqhubeka nokubumba indlela esiklama futhi sikhiqize ngayo ubuchwepheshe besikhathi esizayo.
Isikhathi sokuthunyelwe: Agasti-15-2023