Ma ke kahua o ka waiho ʻana o ka ʻili lahilahi, ua lilo ka ʻenehana sputtering i mea hoʻohana nui ʻia e hoʻokō i nā ʻili lahilahi pololei a like hoʻi i nā ʻoihana like ʻole. ʻO ka versatility a me ka hilinaʻi o kēia mau ʻenehana e hoʻonui i kā lākou noi, e ʻae ana i nā ʻenekinia a me nā mea noiʻi e hoʻopilikino i nā ʻili lahilahi no nā kumu kikoʻī. Ma kēia pou blog, e nānā hohonu mākou i nā ʻano ʻenehana sputtering like ʻole i hoʻohana pinepine ʻia i kēia lā, e wehewehe ana i ko lākou mau ʻano kūikawā, nā pono a me nā noi.
1. Hoʻoheheʻe DC
ʻO ka DC sputtering kekahi o nā ʻano hana hoʻokomo ʻili lahilahi maʻalahi a hoʻohana nui ʻia. Pili ke kaʻina hana i ka hoʻohana ʻana i kahi kumu mana DC e hana i kahi hoʻokuʻu ʻālohilohi i loko o kahi kaiapuni kinoea haʻahaʻa. Hoʻopōkā nā ion maikaʻi i loko o ka plasma i ka mea i manaʻo ʻia, e hoʻokuke ana i nā ʻātoma a waiho iā lākou ma luna o ka substrate. Ua kaulana ʻo DC sputtering no kona maʻalahi, kūpono ke kumukūʻai, a me ka hiki ke waiho i nā ʻili lahilahi kiʻekiʻe ma nā ʻano substrates like ʻole, me ke aniani, nā keramika, a me nā metala.
Nā noi o ka DC sputtering:
- Hana ʻana i ka semiconductor
- Uhi ʻōpae
- Nā pūnaewele lā ʻili lahilahi
2. Alapine Lekiō a me ka Reactive Sputtering
ʻO ka Radio Frequency (RF) sputtering kahi ʻano mana RF i kōkua ʻia o ka DC sputtering. Ma kēia ʻano hana, ua hoʻopuehu ʻia ka mea i manaʻo ʻia me nā ion i hana ʻia e ka mana alapine lekiō. ʻO ke alo o kahi kahua RF e hoʻonui i ke kaʻina hana ionization, e ʻae ana i ka kaohi pololei o ka haku mele ʻana o ke kiʻiʻoniʻoni. ʻO ka reactive sputtering, ma ka ʻaoʻao ʻē aʻe, e pili ana i ka hoʻokomo ʻana i kahi kinoea reactive, e like me ka nitrogen a i ʻole oxygen, i loko o ke keʻena sputtering. Hiki i kēia ke hoʻokumu ʻia nā kiʻiʻoniʻoni lahilahi o nā hui, e like me nā oxides a i ʻole nitrides, me nā waiwai mea i hoʻonui ʻia.
Nā noi o RF a me Reactive Sputtering:
- Uhi anti-reflex
- Pale Semiconductor
- Nā alakaʻi nalu Optical
3. Ka hoʻoheheʻe ʻana o Magnetron
He koho kaulana ka Magnetron sputtering no ka hoʻokahe kiʻekiʻe. Hoʻohana kēia ʻenehana i kahi kahua magnetic kokoke i ka ʻili o ka pahuhopu e hoʻonui i ka nui o ka plasma, e hopena ana i ka pono o ka ionization kiʻekiʻe a me ka hoʻopili ʻana o ka ʻili lahilahi maikaʻi loa. Hoʻopaʻa ka kahua magnetic hou i ka plasma kokoke i ka pahuhopu, e hōʻemi ana i ka hoʻohana ʻana i ka pahuhopu i hoʻohālikelike ʻia me nā ʻano sputtering maʻamau. Hōʻoia ka Magnetron sputtering i nā helu hoʻokahe kiʻekiʻe a me nā waiwai uhi kiʻekiʻe, e kūpono ana no ka hana nui.
Nā noi o ka magnetron sputtering:
- transistor ʻili lahilahi
- Pāpaho mālama makeneka
- Nā uhi hoʻonaninani ma ke aniani a me ka metala
4. Ka hoʻoheheʻe ʻana o ke kukuna ion
He ʻano hana maʻalahi ka Ion beam sputtering (IBS) no ka sputtering i nā mea i manaʻo ʻia me ka hoʻohana ʻana i kahi ion beam. Hiki ke hoʻomalu nui ʻia ka IBS, e ʻae ana i ka hoʻomalu pololei ʻana i ka mānoanoa o ka ʻili a me ka hoʻēmi ʻana i ka nalowale o nā mea. Hōʻoia kēia ʻenehana i ka hoʻohui pololei ʻana o ka ʻili a me nā pae haumia haʻahaʻa. Me kona ʻano like ʻole o ka ʻili a me ke koho ākea o nā mea i manaʻo ʻia, hiki i ka IBS ke hana i nā ʻili laumania a ʻaʻohe kīnā, e kūpono ai no nā noi kūikawā.
Nā noi o ka Ion Beam Sputtering:
- Aniani kukuna X
- Nā kānana optical
- Uhi pale ʻaʻahu a me ka haʻahaʻa haʻalulu
i ka hopena
He ākea a ʻokoʻa ke ao o ka ʻenehana sputtering, e hāʻawi ana i nā ʻenekinia a me nā mea noiʻi i nā hiki he nui no ka waiho ʻana o ka ʻili lahilahi. He mea nui ka ʻike o nā ʻano ʻenehana sputtering like ʻole a me kā lākou noi e hoʻokō i nā waiwai ʻili lahilahi maikaʻi loa e like me nā koi kikoʻī. Mai ka DC sputtering maʻalahi a hiki i ka ion beam sputtering pololei, he kuleana koʻikoʻi kēlā me kēia ʻano hana i nā ʻoihana he nui, e kōkua ana i ka holomua o ka ʻenehana ʻoi loa.
Ma ka hoʻomaopopo ʻana i nā hoʻomohala hou loa i ka ʻenehana sputtering, hiki iā mākou ke hoʻohana i ka mana o nā ʻili lahilahi e hoʻokō i nā koi e ulu nei o ka ʻoihana hou. Inā paha ma nā mea uila, optoelectronics a i ʻole nā mea holomua, ke hoʻomau nei ka ʻenehana sputtering i ke ʻano o kā mākou hoʻolālā a me ka hana ʻana i nā ʻenehana o ka lā ʻapōpō.
Ka manawa hoʻouna: Aug-15-2023