Hauv kev ua cov yeeb yaj kiab nyias nyias, kev siv tshuab sputtering tau dhau los ua ib txoj hauv kev siv dav dav los ua kom cov yeeb yaj kiab nyias nyias thiab sib xws hauv ntau yam lag luam. Qhov ua tau ntau yam thiab kev ntseeg tau ntawm cov thev naus laus zis no nthuav lawv cov ntawv thov, tso cai rau cov engineers thiab cov kws tshawb fawb los kho cov yeeb yaj kiab nyias nyias rau cov hom phiaj tshwj xeeb. Hauv tsab ntawv blog no, peb yuav saib tob txog ntau hom kev siv tshuab sputtering uas siv niaj hnub no, piav qhia txog lawv cov yam ntxwv tshwj xeeb, cov txiaj ntsig thiab cov ntawv thov.
1. DC sputtering
DC sputtering yog ib qho ntawm cov txheej txheem tso cov zaj duab xis nyias yooj yim tshaj plaws thiab siv dav. Cov txheej txheem no suav nrog kev siv lub zog DC los tsim cov teeb ci ntsa iab hauv ib puag ncig roj tsawg. Cov ions zoo hauv cov plasma bombard cov khoom siv, dislodging atoms thiab tso lawv rau ntawm lub substrate. DC sputtering paub txog nws qhov yooj yim, kev siv nyiaj tsim nyog, thiab muaj peev xwm tso cov zaj duab xis nyias zoo rau ntawm ntau yam substrates, suav nrog iav, ceramics, thiab hlau.
Cov ntawv thov ntawm DC sputtering:
- Kev tsim khoom siv semiconductor
- Txheej kho qhov muag
- Cov hlwb hnub ci nyias nyias
2. Xov Tooj Cua Zaus thiab Reactive Sputtering
Xov Tooj Cua Zaus (RF) sputtering yog RF lub zog pab txhawb nqa variant ntawm DC sputtering. Hauv txoj kev no, cov khoom siv lub hom phiaj yog bombarded nrog ions tsim los ntawm lub zog zaus xov tooj cua. Qhov muaj nyob ntawm RF teb ua rau cov txheej txheem ionization txhim kho, tso cai rau kev tswj hwm ntau dua ntawm cov khoom sib xyaw ntawm zaj duab xis. Reactive sputtering, ntawm qhov tod tes, cuam tshuam nrog kev qhia cov roj reactive, xws li nitrogen lossis oxygen, rau hauv sputtering chamber. Qhov no ua rau muaj cov zaj duab xis nyias ntawm cov tshuaj, xws li oxides lossis nitrides, nrog cov khoom siv txhim kho.
Cov ntawv thov ntawm RF thiab Reactive Sputtering:
- Txheej tiv thaiv kev cuam tshuam
- Kev thaiv semiconductor
- Cov cuab yeej siv hluav taws xob kho qhov muag
3. Magnetron sputtering
Magnetron sputtering yog ib qho kev xaiv nrov rau kev tso cov khoom ntau. Cov thev naus laus zis no siv lub zog sib nqus ze ntawm qhov chaw ntawm lub hom phiaj kom ua rau cov plasma ceev dua, ua rau muaj kev ua haujlwm ionization ntau dua thiab kev nplaum zoo heev. Lub zog sib nqus ntxiv ua rau cov plasma nyob ze rau lub hom phiaj, txo cov khoom siv piv rau cov txheej txheem sputtering ib txwm muaj. Magnetron sputtering ua kom muaj cov nqi tso cov khoom ntau dua thiab cov khoom zoo dua, ua rau nws zoo tagnrho rau kev tsim khoom loj.
Cov ntawv thov ntawm magnetron sputtering:
- transistor zaj duab xis nyias
- Cov ntaub ntawv khaws cia hlau nplaum
- Cov txheej pleev kom zoo nkauj rau ntawm iav thiab hlau
4. Ion beam sputtering
Ion beam sputtering (IBS) yog ib txoj kev siv tau ntau yam rau kev siv cov khoom siv sputtering los tsim cov khoom siv. IBS muaj peev xwm tswj tau zoo heev, ua rau kev tswj tau qhov tuab ntawm zaj duab xis thiab txo qhov poob ntawm cov khoom siv. Cov thev naus laus zis no ua kom muaj cov khoom sib xyaw ua ke thiab cov qib kev ua qias tuaj tsawg. Nrog nws cov zaj duab xis zoo heev thiab kev xaiv ntau yam khoom siv, IBS tuaj yeem tsim cov zaj duab xis du thiab tsis muaj qhov tsis zoo, ua rau nws tsim nyog rau cov ntawv thov tshwj xeeb.
Cov ntawv thov ntawm Ion Beam Sputtering:
- Daim iav X-ray
- Cov ntxaij lim dej kho qhov muag
- Txheej tiv thaiv kev hnav thiab kev sib txhuam tsawg
xaus lus
Lub ntiaj teb ntawm kev siv tshuab sputtering yog dav thiab ntau yam, muab ntau txoj hauv kev rau cov engineers thiab cov kws tshawb fawb rau ntau txoj hauv kev rau kev tso cov zaj duab xis nyias. Kev paub txog ntau hom kev siv tshuab sputtering thiab lawv cov ntawv thov yog qhov tseem ceeb kom ua tiav cov khoom zoo tshaj plaws ntawm cov zaj duab xis nyias raws li cov kev xav tau tshwj xeeb. Txij li DC sputtering yooj yim mus rau qhov tseeb ion beam sputtering, txhua txoj kev ua lub luag haujlwm tseem ceeb hauv ntau yam lag luam, pab txhawb rau kev nce qib ntawm cov thev naus laus zis tshiab.
Los ntawm kev nkag siab txog kev tsim kho tshiab hauv kev siv tshuab sputtering, peb tuaj yeem siv lub zog ntawm cov yeeb yaj kiab nyias nyias los ua kom tau raws li qhov xav tau ntawm kev lag luam niaj hnub no. Txawm hais tias nyob rau hauv cov khoom siv hluav taws xob, optoelectronics lossis cov ntaub ntawv siab heev, kev siv tshuab sputtering txuas ntxiv mus rau txoj hauv kev uas peb tsim thiab tsim cov thev naus laus zis ntawm tag kis.
Lub sijhawm tshaj tawm: Lub Yim Hli-15-2023