Mu rwego rwo gushyira filime ntoya mu buryo busanzwe, ikoranabuhanga ryo gusohora filime za "sputtering" ryabaye uburyo bukoreshwa cyane kugira ngo hagerwe ku filime ntoya kandi zihuye neza mu nganda zitandukanye. Uburyo izi koranabuhanga zikora ku buryo butandukanye kandi bwizewe bwazo bwagura uburyo zikoreshwa, bigatuma abahanga mu by'ikoranabuhanga n'abashakashatsi bahindura filime ntoya ku ntego runaka. Muri iyi nyandiko ya blog, turareba mu buryo bwimbitse ubwoko butandukanye bw'ikoranabuhanga ryo gusohora filime za "sputtering" rikoreshwa muri iki gihe, dusobanure imiterere yazo yihariye, ibyiza byazo n'uburyo zikoreshwa.
1. Gutera amazi mu buryo bwa DC
Gukoresha DC sputtering ni bumwe mu buryo bw'ibanze kandi bukoreshwa cyane mu gushyira filime ntoya. Ubu buryo burimo gukoresha isoko y'amashanyarazi ya DC kugira ngo habeho gusohora urumuri mu kirere gifite umwuka muke. Iyoni nziza mu maraso zitera ibikoresho byibasira, zigakuramo atome hanyuma zikazishyira kuri substrate. Gukoresha DC sputtering bizwiho ko byoroshye, gukoresha amafaranga make, no gushobora gushyira filime ntoya nziza ku bikoresho bitandukanye, harimo ikirahure, ibumba, n'ibyuma.
Imikoreshereze ya DC sputtering:
- Gukora ibikoresho bya semiconductor
- Gusiga irangi ry'urumuri
- Uturemangingo tw'izuba duto cyane
2. Ijwi rya Radiyo n'imvugo ikoreshwa mu gusohora amajwi
Gutera amashanyarazi hakoreshejwe radiyo (RF Frequency) ni ubwoko bwa DC sputtering bufashijwe n'imbaraga za RF. Muri ubu buryo, ibikoresho bigamije bishyirwamo iyoni zikorwa n'imbaraga za radiyo. Kuba hari umurima wa RF byongera uburyo bwo gutera amashanyarazi hakoreshejwe radiyo, bigatuma habaho kugenzura neza imiterere ya filime. Ku rundi ruhande, gutera amashanyarazi hakoreshejwe radiyo (reactive sputtering) bikubiyemo kwinjiza umwuka uhindura imikorere, nka azote cyangwa ogisijeni, mu cyumba gitera amashanyarazi. Ibi bituma habaho filime nto z'ibinyabutabire, nka ogisijeni cyangwa nitrides, zifite imiterere myiza y'ibikoresho.
Imikoreshereze ya RF na Reactive Stuttering:
- Irangi rirwanya kugarura urumuri
- Uruzitiro rwa semiconductor
- Amashanyarazi y'amajwi y'urumuri
3. Gutera amashanyarazi ya Magnetron
Gukoresha Magnetron sputtering ni amahitamo akunzwe cyane yo gushyiramo ibintu ku rwego rwo hejuru. Ubu buryo bukoresha imbaraga za rukuruzi hafi y'ubuso bw'ikintu kigamije kongera ubucucike bwa plasma, bigatuma habaho imikorere myiza ya ionization no gufatana neza kwa filime nto. Imbaraga za rukuruzi ziyongereyeho zigabanya plasma hafi y'ikintu kigamije, bigabanya ikoreshwa ry'ikintu kigamije ugereranije n'uburyo busanzwe bwo gukoresha sputtering. Gukoresha Magnetron sputtering bitanga umusaruro mwinshi wo gushyiramo ibintu no gusiga neza, bigatuma biba byiza cyane mu nganda nini.
Imikoreshereze ya magnetron sputtering:
- transistor y'imashini ntoya
- Ibyuma bikoresha ikoranabuhanga rya rukuruzi
- Imitako y'ibirahure n'icyuma
4. Gutera umuraba wa iyoni
Gukoresha icyuma gishyushya imirasire ya Ion (IBS) ni uburyo bworoshye bwo gukoresha icyuma gishyushya imirasire y’ion. IBS iragenzurwa cyane, ituma habaho kugenzura neza ubugari bwa filime no kugabanya igihombo cy’ibikoresho. Ubu buryo butuma imiterere yayo ihinduka neza kandi ikaba ifite urwego ruto rwo kwandura. Kubera ko ifite filime imwe nziza kandi itoranya ibikoresho byinshi, IBS ishobora gukora filime zoroshye kandi zidafite inenge, bigatuma ikoreshwa mu buryo bwihariye.
Imikoreshereze ya Ion Beam Sputtering:
- Indorerwamo ya X-ray
- Imashini ziyungurura urumuri
- Irinda kwangirika no gupfuka buhoro
mu gusoza
Isi y'ikoranabuhanga ryo gusohora ibyuma ni nini kandi itandukanye, itanga amahirwe menshi ku bahanga mu bya tekiniki n'abashakashatsi yo gushyira ibyuma mu buryo buciriritse. Ubumenyi ku bwoko butandukanye bw'ikoranabuhanga ryo gusohora ibyuma mu buryo buciriritse n'ikoreshwa ryabyo ni ingenzi kugira ngo hagerwe ku miterere myiza ya filime yoroheje hakurikijwe ibisabwa byihariye. Kuva kuri DC yoroshye kugeza kuri ion beam sputtering, buri buryo bugira uruhare runini mu nganda nyinshi, bugatanga umusanzu mu iterambere ry'ikoranabuhanga rigezweho.
Dusobanukiwe iterambere rigezweho mu ikoranabuhanga ryo gusohora ibikoresho, dushobora gukoresha imbaraga za filime nto kugira ngo duhuze n'ibyifuzo by'inganda zigezweho. Haba mu by'ikoranabuhanga, ibikoresho by'ikoranabuhanga cyangwa ibikoresho bigezweho, ikoranabuhanga ryo gusohora ibikoresho rikomeje kugira uruhare mu buryo dushushanya kandi tugatunganya ikoranabuhanga ry'ejo hazaza.
Igihe cyo kohereza: Kanama-15-2023