Munyaya yekuisa firimu rakatetepa, tekinoroji yekuputira yave nzira inoshandiswa zvakanyanya kuwana mafirimu akatetepa akanyatsojeka uye akafanana mumaindasitiri akasiyana-siyana. Kuchinja-chinja uye kuvimbika kwetekinoroji idzi kunowedzera mashandisirwo adzo, zvichibvumira mainjiniya nevaongorori kugadzira mafirimu akatetepa kune zvinangwa chaizvo. Muchinyorwa chino cheblog, tichatarisa zvakadzama mhando dzakasiyana dzematekinoroji ekuputira anoshandiswa mazuva ano, tichitsanangura hunhu hwawo hwakasiyana, mabhenefiti uye mashandisirwo awo.
1. Kusvipa kweDC
Kuisa ma "DC sputtering" ndeimwe yenzira dziri nyore uye dzinoshandiswa zvakanyanya dzekuisa ma "thin film deposition". Maitiro aya anosanganisira kushandisa sosi yemagetsi yeDC kugadzira kuburitsa chiedza munzvimbo ine gasi rine simba shoma. Ma "positive ions" ari muplasma anoputira chinhu chaanoda, achibvisa maatomu uye achiisa pa "substrate". Kuisa ma "DC sputtering" kunozivikanwa nekureruka kwayo, kushanda zvakanaka pamutengo, uye kugona kuisa ma "thin films" emhando yepamusoro pa "substrate" dzakasiyana-siyana, kusanganisira girazi, ceramics, uye simbi.
Mashandisirwo eDC sputtering:
- Kugadzira semiconductor
- Kuputira kwemaziso
- Masero ezuva akatetepa
2. Kupararira kweRadio uye Kupararira kweReactive
Kupupira kweRadio Frequency (RF) inzira inoshandiswa neRF power assisted yeDC sputtering. Munzira iyi, chinhu chinonangwa chinoputirwa nemaion anogadzirwa nesimba reradio frequency. Kuvapo kweRF field kunowedzera maitiro eionization, zvichibvumira kudzora kwakanyatsojeka kwekugadzirwa kwefirimu. Kupupira kweReactive, kune rumwe rutivi, kunosanganisira kuisa gasi rinoita reactive, senge nitrogen kana oxygen, mukamuri rinopupira. Izvi zvinogonesa kuumbwa kwemafirimu matete emakomponi, akadai se oxides kana nitrides, ane hunhu hwakawedzerwa hwezvinhu.
Mashandisirwo eRF uye Reactive Sputtering:
- Kuvhara kunodzivirira kufungisisa
- Chidziviriro cheSemiconductor
- Mafambiro emagetsi eOptical
3. Kusvipa kweMagnetron
Kusputtering kweMagnetron isarudzo yakakurumbira yekuisa zvinhu muchimiro chepamusoro. Iyi tekinoroji inoshandisa simba remagineti riri pedyo nenzvimbo inopinzwa kuti iwedzere huwandu hweplasma, zvichiita kuti ionization ishande zvakanaka uye kunamatira zvakanaka kwefirimu rakatetepa. Simba remagineti rekuwedzera rinovhara plasma iri pedyo nenzvimbo inopinzwa, zvichideredza kushandiswa kwechinhu chinopinzwa kana tichienzanisa nenzira dzemazuva ese dzekusputtering. Kusputtering kweMagnetron kunovimbisa mwero wekuisa zvinhu muchimiro chepamusoro uye hunhu hwakanaka hwekuputira, zvichiita kuti ive yakanaka pakugadzira zvinhu zvakawanda.
Mashandisirwo ekushandisa magnetron sputtering:
- transistor yakatetepa yefirimu
- Nzvimbo yekuchengetedza ine magineti
- Kushongedza magirazi nesimbi
4. Kubuda kwedanda reIon
Kupukutira simbi yeIon beam (IBS) inzira inoshandiswa zvakasiyana-siyana yekupukutira zvinhu zvinoshandiswa uchishandisa simbi yeion. IBS inodzoreka zvakanyanya, ichibvumira kudzora ukobvu hwefirimu uye kuderedza kurasikirwa kwezvinhu. Iyi tekinoroji inoita kuti kuumbwa kwayo kuve kwakarurama uye kusvibiswa kwakaderera. Nekufanana kwayo kwakanaka kwefirimu uye kusarudzwa kwakakura kwezvinhu zvinoshandiswa, IBS inogona kugadzira mafirimu akapfava, asina zvikanganiso, zvichiita kuti ive yakakodzera kushandiswa kwakakosha.
Mashandisirwo eIon Beam Sputtering:
- Girazi reX-ray
- Mafirita emaziso
- Kuvhara kunodzivirira kupfeka uye kusingakweshe
mukupedzisa
Nyika yetekinoroji yekuputira yakafara uye yakasiyana-siyana, ichipa mainjiniya nevaongorori mikana yakawanda yekuisa firimu rakatetepa. Ruzivo rwemhando dzakasiyana dzematekiniki ekuputira uye mashandisirwo adzo rwakakosha kuti uwane hunhu hwakanaka hwefirimu rakatetepa zvichienderana nezvinodiwa chaizvo. Kubva pakuputira kweDC kuri nyore kusvika pakuputira kweion beam chaiyo, nzira imwe neimwe inoita basa rakakosha mumaindasitiri akasiyana-siyana, zvichibatsira mukufambira mberi kwetekinoroji yemazuva ano.
Nekunzwisisa kufambira mberi kwazvino mu tekinoroji yekusputtering, tinogona kushandisa simba remafirimu matete kuti tisangane nezvinodiwa zviri kukura mumaindasitiri emazuva ano. Ingave mune zvemagetsi, optoelectronics kana zvinhu zvepamusoro, tekinoroji yekusputtering inoramba ichiumba nzira yatinogadzira nekugadzira matekinoroji emangwana.
Nguva yekutumira: Nyamavhuvhu-15-2023