Pankhani yoika mafilimu opyapyala, ukadaulo wopaka utoto wakhala njira yogwiritsidwa ntchito kwambiri kuti akwaniritse mafilimu opyapyala olondola komanso ofanana m'mafakitale osiyanasiyana. Kusinthasintha ndi kudalirika kwa ukadaulo uwu kumakulitsa ntchito zawo, zomwe zimathandiza mainjiniya ndi ofufuza kusintha mafilimu opyapyala kuti akwaniritse zolinga zinazake. Mu positi iyi ya blog, tiwona mozama mitundu yosiyanasiyana ya ukadaulo wopaka utoto womwe umagwiritsidwa ntchito masiku ano, kufotokoza makhalidwe awo apadera, ubwino wawo, ndi ntchito zawo.
1. Kutulutsa madzi kwa DC
Kutulutsa filimu yopyapyala ya DC ndi njira imodzi yosavuta komanso yogwiritsidwa ntchito kwambiri yotulutsira filimu yopyapyala. Njirayi imaphatikizapo kugwiritsa ntchito mphamvu ya DC kuti ipange kutulutsa kuwala mu mpweya wochepa. Ma ayoni abwino mu plasma amawononga zinthu zomwe akufuna, kutulutsa maatomu ndikuziyika pa substrate. Kutulutsa filimu yopyapyala ya DC kumadziwika chifukwa cha kusavuta kwake, kugwiritsa ntchito ndalama zochepa, komanso kuthekera koyika mafilimu opyapyala apamwamba kwambiri pa substrate zosiyanasiyana, kuphatikizapo galasi, ziwiya zadothi, ndi zitsulo.
Kugwiritsa ntchito DC sputtering:
- Kupanga ma semiconductor
- Chophimba cha kuwala
- Maselo a dzuwa opyapyala
2. Ma Radio Frequency ndi Reactive Sputtering
Kutulutsa kwa ma radio frequency (RF) ndi njira yothandizira mphamvu ya RF ya kutulutsa kwa DC. Munjira iyi, chinthu chomwe chikufunidwacho chimadzazidwa ndi ma ayoni opangidwa ndi mphamvu ya ma radio frequency. Kupezeka kwa gawo la RF kumawonjezera njira yopangira ma ion, zomwe zimathandiza kuti filimuyo ilamulidwe bwino. Kumbali ina, kutulutsa kwa ma radio frequency kumaphatikizapo kulowetsa mpweya wochitapo kanthu, monga nayitrogeni kapena mpweya, mu chipinda chotulutsira ma sputter. Izi zimathandiza kupanga mafilimu opyapyala a mankhwala, monga ma oxides kapena nitrides, okhala ndi zinthu zowonjezera.
Kugwiritsa ntchito RF ndi Reactive Sputtering:
- Chophimba choletsa kuwunikira
- Chotchinga cha semiconductor
- Ma waveguide a kuwala
3. Kutulutsa kwa Magnetron
Kupopera kwa Magnetron ndi njira yotchuka yopopera kwapamwamba. Ukadaulo uwu umagwiritsa ntchito mphamvu ya maginito pafupi ndi malo ofunikira kuti uwonjezere kuchuluka kwa plasma, zomwe zimapangitsa kuti ionization ikhale yogwira ntchito bwino komanso kuti filimu yopyapyala ikhale yolimba kwambiri. Mphamvu yowonjezera ya maginito imaletsa plasma pafupi ndi malo ofunikira, kuchepetsa kugwiritsa ntchito kwa malo ofunikira poyerekeza ndi njira zachikhalidwe zopopera. Kupopera kwa Magnetron kumatsimikizira kuchuluka kwa malo ofunikira komanso mawonekedwe abwino kwambiri ophikira, zomwe zimapangitsa kuti ikhale yoyenera kupanga zinthu zambiri.
Kugwiritsa ntchito magnetron sputtering:
- transistor yopyapyala ya filimu
- Malo osungira maginito
- Zophimba zokongoletsera pagalasi ndi chitsulo
4. Kutulutsa kwa chitsulo cha ayoni
Kupopera kwa ion beam (IBS) ndi njira yogwiritsira ntchito kwambiri popopera zinthu zomwe zili mu chandamale pogwiritsa ntchito ion beam. IBS imatha kulamulidwa bwino, zomwe zimathandiza kuti makulidwe a filimu aziyang'aniridwa bwino komanso kuchepetsa kutayika kwa zinthuzo. Ukadaulo uwu umatsimikizira kapangidwe koyenera komanso kuchuluka kochepa kwa kuipitsidwa. Ndi kufanana kwa filimu yake komanso kusankha kwakukulu kwa zinthu zomwe zili mu chandamale, IBS imatha kupanga mafilimu osalala, opanda chilema, zomwe zimapangitsa kuti ikhale yoyenera kugwiritsidwa ntchito mwapadera.
Kugwiritsa Ntchito Kutulutsa kwa Ion Beam:
- Galasi la X-ray
- Zosefera zowala
- Chophimba choletsa kusweka komanso chosakokera kwambiri
Pomaliza
Dziko la ukadaulo wothira ma sputter ndi lalikulu komanso losiyanasiyana, limapatsa mainjiniya ndi ofufuza mwayi wambiri wothira ma sputter. Kudziwa mitundu yosiyanasiyana ya njira zothira ma sputter ndi momwe amagwiritsidwira ntchito ndikofunikira kuti pakhale mawonekedwe abwino kwambiri a sputter malinga ndi zofunikira zinazake. Kuyambira kuthira ma sputter osavuta a DC mpaka kuthira ma ion beam molondola, njira iliyonse imagwira ntchito yofunika kwambiri m'mafakitale ambiri, zomwe zimathandiza kupititsa patsogolo ukadaulo wamakono.
Mwa kumvetsetsa zomwe zachitika posachedwa muukadaulo wothira ma sputtering, titha kugwiritsa ntchito mphamvu ya mafilimu opyapyala kuti tikwaniritse zosowa zomwe zikukulirakulira m'makampani amakono. Kaya ndi zamagetsi, zamagetsi kapena zipangizo zamakono, ukadaulo wothira ma sputtering ukupitilizabe kusintha momwe timapangira ndikupanga ukadaulo wamtsogolo.
Nthawi yotumizira: Ogasiti-15-2023