I roto i te mara o te whakatakoto kiriata angiangi, kua noho te hangarau sputtering hei tikanga whānui hei whakatutuki i ngā kiriata angiangi tika me te ōrite i roto i ngā momo ahumahi. Nā te maha o ngā whakamahinga me te pono o ēnei hangarau ka whānui ake ā rātou tono, ka taea ai e ngā miihini me ngā kairangahau te whakarite i ngā kiriata angiangi mō ngā kaupapa motuhake. I roto i tēnei pou rangitaki, ka tirohia hohonutia e mātou ngā momo hangarau sputtering e whakamahia whānuitia ana i ēnei rā, me te whakamārama i ō rātou āhuatanga ahurei, ngā painga me ngā tono.
1. Te pupuhi DC
Ko te pupuhi DC tētahi o ngā tikanga whakatakoto kiriata angiangi tino taketake, ā, e whakamahia whānuitia ana. Ko te tukanga he whakamahi i tētahi pūtake hiko DC hei whakaputa i tētahi rerenga kanapa i roto i tētahi taiao hau pēhanga iti. Ka pupuhihia e ngā katote pai i roto i te plasma te rauemi ūnga, ka wetekina ngā ngota ka whakatakotoria ki runga i te papa. E mōhiotia ana te pupuhi DC mō tōna māmā, te whai hua o te utu, me te kaha ki te whakatakoto i ngā kiriata angiangi kounga teitei ki runga i ngā momo papa, tae atu ki te karāhe, te uku, me ngā konganuku.
Ngā tono o te pupuhi DC:
- Te hanga hiko haurua-ārahi
- Paninga whatu
- Ngā pūtau rā kiriata angiangi
2. Auautanga Reo Irirangi me te Whakapūtanga Tauhohe
Ko te whakapūtanga auau reo irirangi (RF) he momo whakapūtanga DC e āwhinahia ana e te mana RF. I roto i tēnei tikanga, ka pupuhihia te rauemi ūnga ki ngā katote i hangaia e te mana auau reo irirangi. Mā te noho mai o tētahi mara RF ka whakarei ake i te tukanga whakapūtanga, ka taea ai te whakahaere tika ake i te hanganga o te kiriata. Ko te whakapūtanga tauhohe, i tētahi atu taha, ko te whakauru i tētahi hau tauhohe, pērā i te hauota, te hāora rānei, ki roto i te rūma whakapūtanga. Mā tēnei ka taea te hanga i ngā kiriata angiangi o ngā matū, pērā i ngā waikura, i ngā nitride rānei, me ngā āhuatanga rauemi kua whakarei ake.
Ngā tono o te RF me te Reactive Sputtering:
- Paninga ārai-whakaata
- Ārai hiko-haurua
- Ngā arataki ngaru whatu
3. Te pupuhi a te Magnetron
He mea rongonui te Magnetron sputtering mō te whakatakotoranga tere teitei. Ka whakamahia e tēnei hangarau he papa aukume e tata ana ki te mata o te ūnga hei whakanui ake i te kiato o te plasma, ka hua ake he pai ake te whai huatanga o te ionization me te piri pai o te kiriata angiangi. Ka herea te plasma e te papa aukume tāpiri ki te ūnga, ka whakaiti i te whakamahinga o te ūnga ki te whakataurite ki ngā tikanga sputtering tuku iho. Ka whakarite te Magnetron sputtering i ngā reiti whakatakotoranga teitei ake me ngā āhuatanga paninga pai ake, he mea pai mō te hanga nui.
Ngā tono o te pupuhi magnetron:
- transistor kiriata angiangi
- Pāpāho rokiroki aukume
- Ngā paninga whakapaipai i runga i te karāhe me te whakarewa
4. Te pupuhi o te hihi katote
He tikanga maha ngā mahi a te IBS mō te whakapūpū i ngā rauemi ūnga mā te whakamahi i te hihi katote. He tino ngāwari te whakahaere i te IBS, e āhei ai te whakahaere tika i te matotoru o te kiriata me te whakaiti i te ngaronga o ngā rauemi. Mā tēnei hangarau ka whakarite kia tika te hanganga me te iti o ngā taumata poke. Mā te ōritetanga pai o te kiriata me te whānuitanga o ngā rauemi ūnga, ka taea e te IBS te whakaputa kiriata maeneene, kore-hapa, e pai ai mō ngā tono motuhake.
Ngā tono o te Ion Beam Sputtering:
- Whakaata hihi-X
- Ngā tātari whatu
- Paninga ārai-kakahu me te iti-waku
hei whakamutunga
He whānui, he kanorau hoki te ao o te hangarau pupuhi, e tuku ana ki ngā kaihangarau me ngā kairangahau he maha ngā huarahi hei whakatakoto i ngā kiriata angiangi. He mea nui te mōhio ki ngā momo tikanga pupuhi me ā rātou tono kia tutuki ai ngā āhuatanga kiriata angiangi tino pai e ai ki ngā whakaritenga motuhake. Mai i te pupuhi DC māmā ki te pupuhi hihi katote tika, he mea nui ia tikanga i roto i ngā ahumahi maha, e whai wāhi ana ki te whakatairanga i te hangarau hou.
Mā te mārama ki ngā whanaketanga hou o te hangarau sputtering, ka taea e tātou te whakamahi i te mana o ngā kiriata angiangi hei whakatutuki i ngā hiahia e tipu haere ana o te ahumahi hou. Ahakoa i roto i ngā hikohiko, ngā optoelectronics, ngā rauemi matatau rānei, kei te hanga tonu te hangarau sputtering i te huarahi e hoahoa ai, e hanga ai hoki i ngā hangarau o āpōpō.
Wā tuku: 15 o Ākuhata-2023