Kwicandelo lokubeka ifilimu encinci, iteknoloji yokutshiza iye yaba yindlela esetyenziswa kakhulu ukufezekisa iifilimu ezincinci ezichanekileyo nezifanayo kumashishini ahlukeneyo. Ukuguquguquka nokuthembeka kwezi teknoloji kwandisa usetyenziso lwazo, okuvumela iinjineli kunye nabaphandi ukuba benze iifilimu ezincinci ngeenjongo ezithile. Kule posi yebhlog, siza kujonga ngokunzulu iintlobo ezahlukeneyo zobuchwepheshe bokutshiza ezisetyenziswa kakhulu namhlanje, sichaze iimpawu zazo ezizodwa, iingenelo kunye nosetyenziso.
1. Ukutshiza nge-DC
Ukutshiza nge-DC yenye yezona ndlela zilula nezisetyenziswa kakhulu zokubeka ifilimu encinci. Le nkqubo ibandakanya ukusebenzisa umthombo wamandla we-DC ukuvelisa ukukhupha ukukhanya kwindawo yegesi enoxinzelelo oluphantsi. Ii-ions ezintle kwi-plasma zihlasela izinto ekujoliswe kuzo, zikhuphe ii-athomu kwaye zifake kwi-substrate. Ukutshiza nge-DC kwaziwa ngokulula kwayo, ukusebenza kakuhle kweendleko, kunye nokukwazi ukufaka iifilimu ezincinci ezikumgangatho ophezulu kwii-substrate ezahlukeneyo, kubandakanya iglasi, i-ceramics, kunye neentsimbi.
Izicelo ze-DC sputtering:
- Ukuveliswa kwee-semiconductor
- Ukwaleka okubonakalayo
- Iiseli zelanga ezibhityileyo
2. I-Radio Frequency kunye ne-Reactive Sputtering
Ukutshiza ngeRadio Frequency (RF) yindlela encediswa ngamandla eRF yokutshiza ngeDC. Kule ndlela, izinto ekujoliswe kuzo zigqunywa ngee-ion eziveliswa ngamandla erediyo. Ubukho bentsimi yeRF buphucula inkqubo ye-ionization, nto leyo evumela ulawulo oluchanekileyo lokwakheka kwefilimu. Ukutshiza ngeRadio Frequency, kwelinye icala, kubandakanya ukufaka igesi ephendulayo, efana nenitrogen okanye ioksijini, kwigumbi lokutshiza. Oku kwenza kube lula ukwenziwa kweefilimu ezincinci zeekhompawundi, ezifana nee-oxides okanye ii-nitrides, ezineempawu eziphuculweyo zezinto.
Usetyenziso lwe-RF kunye ne-Reactive Sputtering:
- Ukwaleka okuchasene nokubonakalisa
- Isithintelo se-semiconductor
- Izikhokelo zamaza ezibonakalayo
3. Ukutshiza ngemagnetron
Ukutshiza ngeMagnetron lukhetho oludumileyo lokufakwa kwexabiso eliphezulu. Le teknoloji isebenzisa intsimi yemagnethi kufutshane nomphezulu wethagethi ukwandisa uxinano lweplasma, nto leyo ekhokelela ekusebenzeni kakuhle kwe-ionization kunye nokunamathela okuhle kakhulu kwefilimu encinci. Intsimi yemagnethi eyongezelelweyo ithintela iplasma kufutshane nethagethi, inciphisa ukusetyenziswa kwethagethi xa kuthelekiswa neendlela zesiqhelo zokutshiza. Ukutshiza ngeMagnetron kuqinisekisa amazinga aphezulu okufakwa kweplasma kunye neempawu eziphezulu zokugquma, okwenza ukuba ilungele imveliso enkulu.
Ukusetyenziswa kwe-magnetron sputtering:
- i-transistor yefilimu encinci
- Imidiya yokugcina izinto ngemagnethi
- Iingubo zokuhombisa kwiglasi nakwisinyithi
4. Ukutshiza kwemitha ye-ion
Ukutshiza ngemitha ye-ion (IBS) yindlela eguquguqukayo yokutshiza izixhobo ekujoliswe kuzo kusetyenziswa umqadi we-ion. I-IBS ilawuleka kakhulu, ivumela ulawulo oluchanekileyo lobukhulu befilimu kunye nokunciphisa ukulahleka kwezinto. Le teknoloji iqinisekisa ukwakheka okuchanekileyo ngokwe-stoichiometric kunye namanqanaba aphantsi ongcoliseko. Ngokufana kwayo okuhle kwefilimu kunye nokukhethwa okubanzi kwezinto ekujoliswe kuzo, i-IBS inokuvelisa iifilimu ezigudileyo, ezingenaziphene, nto leyo eyenza ifaneleke ukusetyenziswa okukhethekileyo.
Ukusetyenziswa kwe-Ion Beam Sputtering:
- Isibuko se-X-reyi
- Izihluzi ezibonakalayo
- Ukwaleka okuchasene nokuguguleka kunye nokungaguquguquki okuncinci
ukuququmbela
Ihlabathi lobuchwepheshe bokutshiza libanzi kwaye lahlukahlukene, linika iinjineli nabaphandi amathuba amaninzi okubeka ifilimu encinci. Ulwazi ngeentlobo ezahlukeneyo zobugcisa bokutshiza kunye nokusetyenziswa kwazo kubalulekile ukuze kufezekiswe iipropati ezifanelekileyo zefilimu encinci ngokweemfuno ezithile. Ukusuka kwi-DC sputtering elula ukuya kwi-ion beam sputtering echanekileyo, indlela nganye idlala indima ebalulekileyo kumashishini amaninzi, inegalelo ekuphuculeni itekhnoloji yanamhlanje.
Ngokuqonda uphuhliso lwamva nje kwitekhnoloji yokutshiza, singasebenzisa amandla eefilimu ezincinci ukuhlangabezana neemfuno ezikhulayo zoshishino lwanamhlanje. Nokuba zikwizinto ze-elektroniki, i-optoelectronics okanye izixhobo eziphambili, itekhnoloji yokutshiza iyaqhubeka nokubumba indlela esiyila kwaye senza ngayo iitekhnoloji zekamva.
Ixesha lokuthumela: Agasti-15-2023