Emkhakheni wokufakwa kwefilimu emincane, ubuchwepheshe be-sputtering sebuyindlela esetshenziswa kabanzi ukuze kuzuzwe amafilimu amancane anembile futhi afanayo ezimbonini ezahlukahlukene. Ukuguquguquka nokuthembeka kwalobu buchwepheshe kunweba izinhlelo zabo zokusebenza, okuvumela onjiniyela nabacwaningi ukuthi bahlanganise amafilimu azacile ngezinjongo ezithile. Kulokhu okuthunyelwe kwebhulogi, sizobheka ngokujulile izinhlobo ezahlukene zobuchwepheshe be-sputtering obuvame ukusetshenziswa namuhla, sichaza izici zabo eziyingqayizivele, izinzuzo kanye nezicelo.
1. DC sputtering
I-DC sputtering ingenye yezindlela eziyisisekelo nezisetshenziswa kabanzi zokubeka ifilimu emincane. Le nqubo ihlanganisa ukusebenzisa umthombo wamandla we-DC ukuze ukhiqize ukuphuma okukhanyayo endaweni yegesi enengcindezi ephansi. Ama-ion amahle ku-plasma abhomba okokusebenza okuqondiwe, akhiphe ama-athomu futhi awafake ku-substrate. I-DC sputtering yaziwa ngobulula bayo, ukusebenza ngempumelelo kwezindleko, nekhono lokubeka amafilimu amancanyana ekhwalithi ephezulu kuma-substrates ahlukahlukene, okuhlanganisa ingilazi, izitsha zobumba, nezinsimbi.
Izicelo ze-DC sputtering:
- Ukukhiqizwa kwe-semiconductor
- I-Optical enamathela
- Ifilimu elincanyana lamaseli elanga
2. I-Radio Frequency kanye ne-Reactive Sputtering
I-Radio Frequency (RF) sputtering iwuhlobo lwe-RF olusiza amandla we-DC sputtering. Ngale ndlela, into eqondiwe ishaywa ngama-ion akhiqizwa amandla efrikhwensi yomsakazo. Ukuba khona kwenkundla ye-RF kuthuthukisa inqubo ye-ionization, okuvumela ukulawula okunembe kakhudlwana kokwakheka kwefilimu. Ngakolunye uhlangothi, ukuphalaza okusebenzayo kuhilela ukungenisa igesi esebenzayo, njenge-nitrogen noma umoya-mpilo, egunjini lokufafaza. Lokhu kuvumela ukwakheka kwamafilimu amancanyana ezinhlanganisela, njengama-oxides noma ama-nitrides, anezakhiwo ezithuthukisiwe.
Izicelo ze-RF kanye ne-Reactive Sputtering:
- I-anti-reflection enamathela
- Isithiyo se-semiconductor
- Optical waveguides
3. Ukufafaza kukaMagnetron
I-Magnetron sputtering iyisinqumo esithandwayo sokubeka izinga eliphezulu. Lobu buchwepheshe busebenzisa inkambu kazibuthe eduze nendawo okuqondiwe kuyo ukwandisa ukuminyana kwe-plasma, okuholela ekusebenzeni kahle kwe-ionization kanye nokunamathela okuhle kwefilimu emincane. Inkambu kazibuthe eyengeziwe ivalela i-plasma eduze kokuhlosiwe, inciphisa ukusetshenziswa okuqondiwe uma kuqhathaniswa nezindlela ezivamile zokufafaza. I-Magnetron sputtering iqinisekisa amazinga aphezulu okubekwa kanye nezakhiwo zokumboza eziphakeme, okuyenza ilungele ukukhiqizwa kwenani elikhulu.
Izicelo ze-magnetron sputtering:
- ifilimu encane ye-transistor
- Magnetic isitoreji media
- Izingubo zokuhlobisa engilazini nensimbi
4. Ion beam spttering
I-Ion beam sputtering (IBS) iyindlela eguquguqukayo yokufaka izinto eziqondiwe usebenzisa i-ion beam. I-IBS iyalawuleka kakhulu, ivumela ukulawula ukujiya kwefilimu okunembayo kanye nokunciphisa ukulahleka kwezinto. Lobu buchwepheshe buqinisekisa ukwakheka okulungile kwe-stoichiometrically kanye namazinga aphansi okungcola. Ngokufana kwayo okuhle kakhulu kwefilimu nokukhethwa okubanzi kwezinto eziqondiwe, i-IBS ingakhiqiza amafilimu abushelelezi, angenasici, ayenze afanelekele izinhlelo zokusebenza ezikhethekile.
Izicelo ze-Ion Beam Sputtering:
- Isibuko se-X-ray
- Izihlungi ze-Optical
- I-anti-wear kanye ne-low-friction coating
Ekuphetheni
Umhlaba wobuchwepheshe be-sputtering mkhulu futhi uyahlukahluka, unikeza onjiniyela nabacwaningi amathuba amaningi okufakwa kwefilimu emincane. Ulwazi lwezinhlobo ezahlukene zamasu okuphalaza kanye nokusetshenziswa kwawo kubalulekile ukuze kuzuzwe izakhiwo zefilimu ezacile ezifanele ngokwezidingo ezithile. Ukusuka ku-DC sputtering kuya ku-ion beam sputtering, indlela ngayinye idlala indima ebalulekile ezimbonini eziningi, inikela ekuthuthukisweni kobuchwepheshe obusezingeni eliphezulu.
Ngokuqonda intuthuko yakamuva yobuchwepheshe be-sputtering, singasebenzisa amandla amafilimu amancane ukuze ahlangabezane nezidingo ezikhulayo zemboni yesimanje. Kungakhathaliseki ukuthi ku-electronics, optoelectronics noma izinto ezithuthukisiwe, ubuchwepheshe be-sputtering buyaqhubeka nokubumba indlela esiklama futhi sikhiqize ngayo ubuchwepheshe bakusasa.
Isikhathi sokuthumela: Aug-15-2023