Izixhobo zokugquma i-vacuum luhlobo lwetekhnoloji ecekethekileyo yokubeka ifilimu kwindawo yevacuum, esetyenziswa kakhulu kwi-electronics, optics, isayensi yezinto eziphathekayo, amandla njalo njalo. Isixhobo sokugquma ivacuum ikakhulu yenziwe ngala malungu alandelayo:
I-Vacuum Chamber: Le nxalenye ephambili yezixhobo zokugubungela i-vacuum, apho zonke iinkqubo zokugqoka zenziwa. Igumbi le-vacuum kufuneka likwazi ukumelana nokusingqongileyo kunye nokugcina ukutywinwa okulungileyo.
Vacuum Pump: Isetyenziselwa ukukhupha umoya ngaphakathi kwegumbi lokuhlambela ukudala indawo yokucoca. Iimpompo ze-vacuum eziqhelekileyo ziquka iimpompo zomatshini kunye neepompo ze-molecular.
Umthombo woMphunga: Isetyenziselwa ukufudumeza kunye nokukhupha izinto zokugquma. Umthombo wokufudumeza unokuba kukufudumeza kokumelana, ukufudumeza kwe-electron beam, ukufudumeza kwelaser njalo njalo.
Isakhelo sokubeka (isiBambi seSubstrate): sisetyenziselwa ukubeka i-substrate ukuze igqunywe. Umnini we-substrate unokujikelezwa okanye ahanjiswe ukuze aqinisekise ukufana kwengubo.
Inkqubo yokulawula: Isetyenziselwa ukulawula yonke inkqubo yokugquma, kubandakanywa ukuqala kunye nokuyeka ipompo ye-vacuum, ukulawulwa kweqondo lokushisa lomthombo we-evaporation, kunye nokulungiswa kwezinga lokubeka.
Izixhobo zokulinganisa kunye nokubeka iliso: Isetyenziselwa ukubeka iliso kwiiparamitha eziphambili kwinkqubo yokugubungela ngexesha langempela, njengeqondo le-vacuum, iqondo lokushisa, izinga lokubeka, njl.
Inkqubo yonikezelo lwamandla: ukubonelela ngamandla afunekayo kwisixhobo sokugquma.
Inkqubo yokupholisa: isetyenziselwa ukupholisa igumbi le-vacuum kunye namanye amacandelo okuvelisa ubushushu ukuqinisekisa ukusebenza okuqhelekileyo kwezixhobo.
Ukulungelelaniswa okusebenzayo kwala macandelo kwenza ukuba izixhobo zokugquma i-vacuum zilawule ngokuchanekileyo ubukhulu, ukwakheka kunye nokwakheka kwefilimu ukuhlangabezana neemfuno ezahlukeneyo zoshishino kunye nezesayensi.
–Eli nqaku likhutshwa nguumenzi womatshini wokugqumaGuangdong Zhenhua
Ixesha lokuposa: Jul-27-2024