Lisebelisoa tsa ho roala ka vacuum ke mofuta oa theknoloji e tšesaane ea ho boloka filimi tikolohong ea vacuum, e sebelisoang haholo li-elektroniki, optics, mahlale a thepa, matla le tse ling. Lisebelisoa tsa ho roala ka vacuum li entsoe haholo ka likarolo tse latelang:
Kamore ea Vacuum: Ena ke karolo ea bohlokoa ea lisebelisoa tsa vacuum coating, moo lits'ebetso tsohle tsa ho roala li etsoang teng. Kamore ea vacuum e tlameha ho khona ho mamella tikoloho ea vacuum le ho boloka ho koaloa hantle.
Pompo ea Vacuum: E sebelisoa ho ntša moea ka har'a kamore ea vacuum ho theha tikoloho ea vacuum. Lipompo tse tloaelehileng tsa vacuum li kenyelletsa lipompo tsa mechini le lipompo tsa limolek'hule.
Mohloli oa mouoane: O sebelisetsoa ho futhumatsa le ho monya thepa ea ho roala. Mohloli oa mouoane e ka ba ho futhumatsa ho hanyetsang, ho futhumatsa mahlaseli a elektrone, ho futhumatsa ka laser le tse ling.
Foreime ea ho tlosa (Setshwari sa Substrate): e sebelisetsoa ho beha substrate e tla koaheloa. Setshwari sa substrate se ka potolosoa kapa sa suthisoa ho netefatsa hore seaparo se tšoana.
Sistimi ea Taolo: E sebelisoa ho laola ts'ebetso eohle ea ho roala, ho kenyeletsoa ho qala le ho emisa ha pompo ea vacuum, taolo ea mocheso oa mohloli oa mouoane, le tokiso ea sekhahla sa ho beoa.
Lisebelisoa tsa ho lekanya le ho beha leihlo: Li sebelisoa ho beha leihlo liparamente tsa bohlokoa ts'ebetsong ea ho roala ka nako ea sebele, joalo ka tekanyo ea vacuum, mocheso, sekhahla sa ho beha, jj.
Sistimi ea phepelo ea motlakase: ho fana ka matla a hlokahalang bakeng sa lisebelisoa tsa ho roala ka vacuum.
Sistimi ea ho pholisa: e sebelisetsoa ho pholisa kamore ea vacuum le likarolo tse ling tse hlahisang mocheso ho netefatsa ts'ebetso e tloaelehileng ea lisebelisoa.
Ho hokahana hantle ha likarolo tsena ho nolofalletsa lisebelisoa tsa ho roala ka vacuum ho laola botenya, sebopeho le sebopeho sa filimi ka nepo ho fihlela litlhoko tse fapaneng tsa indasteri le tsa saense.
–Sengoloa sena se lokollotsoe kemoetsi oa mochini oa ho roala ka vacuum cleanerGuangdong Zhenhua
Nako ea poso: Phupu-27-2024

