Kwinkalo yokubekwa kwefilimu ebhityileyo, itekhnoloji yokutshiza iye yaba yindlela esetyenziswa ngokubanzi ukufezekisa iifilimu ezichanekileyo nezifanayo kumashishini ahlukeneyo. Ukuguquguquka kunye nokuthembeka kobu buchwepheshe bandisa usetyenziso lwabo, kuvumela iinjineli kunye nabaphandi ukuba balungelelanise iifilimu ezibhityileyo ngeenjongo ezithile. Kule post blog, siza kujonga nzulu kwiindidi ezahlukeneyo zetekhnoloji ye-sputtering esetyenziswa ngokuqhelekileyo namhlanje, ichaza iimpawu zabo ezizodwa, izibonelelo kunye nokusetyenziswa.
1. I-DC sputtering
I-DC sputtering yenye yezona ndlela zisisiseko kwaye zisetyenziswa ngokubanzi iindlela zokubeka ifilimu ebhityileyo. Inkqubo ibandakanya ukusebenzisa umthombo wamandla we-DC ukuvelisa ukukhutshwa okukhanyayo kwindawo yoxinzelelo oluphantsi lwegesi. Ii-ion ezintle kwiplasma zibhobhoza izinto ekujoliswe kuzo, zikhupha iiathomu kwaye zizibeke kwi-substrate. I-DC sputtering iyaziwa ngobulula bayo, ukusebenza kakuhle kweendleko, kunye nokukwazi ukufaka iifilimu ezikumgangatho ophezulu ezibhityileyo kwiinxalenye ezahlukeneyo, kubandakanya iglasi, iiseramikhi, kunye neentsimbi.
Usetyenziso lwe-DC sputtering:
- Ukwenziwa kweSemiconductor
- Ukwaleka kwamehlo
- Iiseli zelanga zefilimu ezincinci
2. I-Radio Frequency kunye ne-Reactive Sputtering
I-Radio Frequency (RF) sputtering luhlobo lwe-RF oluncediswa ngamandla e-DC sputtering. Ngale ndlela, imathiriyeli ekujoliswe kuyo ibethelwa ngee-ion eziveliswa ngamandla omoya werediyo. Ubukho bendawo ye-RF buphucula inkqubo ye-ionization, ivumela ulawulo oluchanekileyo lokuqulunqwa kwefilimu. Ukutshiza okusebenzayo, kwelinye icala, kubandakanya ukungenisa igesi esebenzayo, efana nenitrogen okanye ioksijini, kwigumbi lokutshiza. Oku kuvumela ukwakheka kweefilim ezibhityileyo zeekhompawundi, ezinje ngeeoksidi okanye iinitridi, ezineempawu eziphuculweyo.
Usetyenziso lweRF kunye neReactive Sputtering:
- Ukwaleka okuchasayo
- Umqobo weSemiconductor
-Optical waveguides
3. Ukutshiza ngemagnethi
I-Magnetron sputtering lukhetho oludumileyo lokubekwa kwizinga eliphezulu. Le teknoloji isebenzisa intsimi yamagnetic kufuphi nendawo ekujoliswe kuyo ukwandisa ukuxinana kweplasma, okukhokelela ekusebenzeni okuphezulu kwe-ionization kunye nokubambelela kakuhle kwefilimu. Intsimi yamagnetic eyongezelelweyo ivala i-plasma kufuphi nethagethi, ukunciphisa ukusetyenziswa okujoliswe kuyo xa kuthelekiswa neendlela eziqhelekileyo zokutshiza. I-Magnetron sputtering iqinisekisa amazinga aphezulu okubekwa kunye neempawu zokugquma eziphezulu, okwenza ukuba ilungele ukwenziwa kwezinto ezinkulu.
Ukusetyenziswa kwe-magnetron sputtering:
-ifilimu encinci ye-transistor
-Imidiya yokugcina imagnethi
- Iingubo zokuhlobisa kwiglasi kunye nesinyithi
4. Ion beam sputtering
Ion beam sputtering (IBS) bubuchule obuguquguqukayo bokutshiza imathiriyeli ekujoliswe kuyo kusetyenziswa umqa we-ion. I-IBS ilawulwa kakhulu, ivumela ulawulo oluchanekileyo lwefilimu kunye nokunciphisa ukulahleka kwezinto eziphathekayo. Le teknoloji iqinisekisa ukubunjwa okuchanekileyo kwe-stoichiometrically kunye namanqanaba aphantsi okungcoliseka. Ngokufana kwayo okuhle kakhulu kwefilimu kunye nokukhethwa okubanzi kwezinto ekujoliswe kuzo, i-IBS inokuvelisa iifilimu ezigudileyo, ezingenasiphako, eziyenza ifaneleke kwizicelo ezikhethekileyo.
Usetyenziso lwe-Ion Beam Sputtering:
- Isibuko se-X-ray
- Izihluzi zamehlo
-Anti-ukunxiba kunye ne-low-friction coating
ukuququmbela
Ihlabathi letekhnoloji ye-sputtering likhulu kwaye liyahluka, libonelela ngeenjineli kunye nabaphandi ngamathuba amaninzi okubekwa kwefilimu encinci. Ulwazi lweendlela ezahlukeneyo zobuchule bokutshiza kunye nokusetyenziswa kwazo kubalulekile ukufezekisa iipropathi zefilimu ezicekethekileyo ngokweemfuno ezithile. Ukusuka kwi-DC sputtering elula ukuya kwi-ion beam sputtering echanekileyo, indlela nganye idlala indima ebalulekileyo kumashishini amaninzi, inegalelo kuphuhliso lwetekhnoloji yokusika.
Ngokuqonda uphuhliso lwamva nje lwetekhnoloji ye-sputtering, sinokusebenzisa amandla eefilimu ezincinci ukuhlangabezana neemfuno ezikhulayo zeshishini langoku. Nokuba kwi-electronics, i-optoelectronics okanye imathiriyeli ephucukileyo, itekhnoloji yesputtering iyaqhubeka nokubumba indlela esiyilwa ngayo kunye nokwenza itekhnoloji yangomso.
Ixesha lokuposa: Aug-15-2023