Sebakeng sa ho beha lifilimi tse tšesaane, theknoloji ea sputtering e se e le mokhoa o sebelisoang haholo ho fihlela lifilimi tse tšesaane tse nepahetseng le tse ts'oanang liindastering tse fapaneng. Ho feto-fetoha ha maemo le ho tšepahala ha theknoloji ena ho holisa ts'ebeliso ea bona, ho lumella baenjiniere le bafuputsi ho hlophisa lifilimi tse tšesaane bakeng sa merero e itseng. Ka poso ena ea blog, re tla shebisisa ka ho teba mefuta e fapaneng ea theknoloji ea sputtering e sebelisoang kajeno, e hlalosang litšobotsi tsa eona tse ikhethang, melemo le lits'ebetso.
1. DC sputtering
DC sputtering ke e 'ngoe ea mekhoa ea mantlha le e sebelisoang haholo ea ho beha lifilimi tse tšesaane. Ts'ebetso ena e kenyelletsa ho sebelisa mohloli oa motlakase oa DC ho hlahisa khanya e khanyang tikolohong ea khase e tlase. Li-ion tse ntle ka har'a plasma li hlasela lintho tse shebiloeng, li ntša liathomo ebe li li beha holim'a substrate. DC sputtering e tsebahala ka ho ba bonolo, ho baballa litšenyehelo, le bokhoni ba ho beha lifilimi tse tšesaane tsa boleng bo holimo ho li-substrates tse fapaneng, ho kenyeletsoa likhalase, lirafshoa le litšepe.
Likopo tsa DC sputtering:
- Ho etsa semiconductor
- Ho roala ka optical
- Lisele tsa letsatsi tse tšesaane tsa filimi
2. Maqhubu a seea-le-moea-pono le Ho Sputtering ka Reactive
Radio Frequency (RF) sputtering ke mofuta o sebelisoang ke matla oa RF oa DC sputtering. Ka mokhoa ona, thepa e shebiloeng e hlaseloa ka li-ion tse hlahisoang ke matla a maqhubu a seea-le-moea. Ho ba teng ha lebala la RF ho ntlafatsa ts'ebetso ea ionization, ho lumella taolo e nepahetseng haholoanyane ea sebopeho sa filimi. Ka lehlakoreng le leng, ho fafatsa ka matla ho akarelletsa ho kenya khase e sebetsang, e kang naetrojene kapa oksijene, ka kamoreng ea ho fafatsa. Sena se etsa hore ho thehoe lifilimi tse tšesaane tsa metsoako, joalo ka li-oxide kapa nitrides, tse nang le thepa e ntlafalitsoeng.
Lisebelisoa tsa RF le Reactive Sputtering:
- Anti-reflection barbotage
- Tšitiso ea semiconductor
- Li-waveguides tsa Optical
3. Magnetron sputtering
Magnetron sputtering ke khetho e tsebahalang bakeng sa ho beha maemo a holimo. Theknoloji ena e sebelisa matla a khoheli haufi le sebaka seo ho shebiloeng ho sona ho eketsa letsoalo la plasma, e leng se bakang ts'ebetso e phahameng ea ionization le ho khomarela lifilimi tse tšesaane haholo. Matla a khoheli a eketsehileng a koalla plasma haufi le sepheo, a fokotsa tšebeliso ea sepheo ha e bapisoa le mekhoa e tloaelehileng ea ho fafatsa. Magnetron sputtering e netefatsa litekanyetso tse phahameng tsa deposition le thepa e phahameng ea ho roala, e etsa hore e be e loketseng bakeng sa tlhahiso e kholo.
Lisebelisoa tsa magnetron sputtering:
- transistor ea filimi e tšesaane
- Mecha ea polokelo ea makenete
- Liaparo tse khabisitsoeng ka khalase le tšepe
4. Ho phatloha ha lehlaka la Ion
Ion beam sputtering (IBS) ke mokhoa o feto-fetohang oa ho fafatsa lisebelisoa tse lebisitsoeng ho sebelisa ion ea ion. IBS e laoloa haholo, e lumella taolo e nepahetseng ea botenya ba filimi le ho fokotsa tahlehelo ea thepa. Theknoloji ena e netefatsa sebopeho se nepahetseng sa stoichiometrically le maemo a tlase a tšilafalo. Ka mokhoa o ts'oanang oa lifilimi le khetho e pharaletseng ea lisebelisoa tse shebiloeng, IBS e ka hlahisa lifilimi tse boreleli, tse se nang sekoli, e etsa hore e tšoanelehe bakeng sa lits'ebetso tse khethehileng.
Lisebelisoa tsa Ion Beam Sputtering:
- seipone sa X-ray
- Lifilimi tsa mahlo
- Thibelo e khahlanong le ho apara le ho roala ka tlaase ho khohlano
ha re phethela
Lefatše la theknoloji ea sputtering le leholo ebile le fapane, le fa baenjiniere le bafuputsi menyetla e mengata ea ho beha lifilimi tse tšesaane. Tsebo ea mefuta e fapaneng ea mekhoa ea sputtering le ts'ebeliso ea eona e bohlokoa ho fihlela thepa e nepahetseng ea lifilimi tse tšesaane ho latela litlhoko tse ikhethileng. Ho tloha ho sputtering e bonolo ea DC ho ea ho ion beam sputtering e nepahetseng, mokhoa o mong le o mong o bapala karolo ea bohlokoa liindastering tse ngata, o kenya letsoho tsoelo-peleng ea theknoloji e tsoetseng pele.
Ka ho utloisisa lintlafatso tsa morao-rao tsa theknoloji ea sputtering, re ka sebelisa matla a lifilimi tse tšesaane ho fihlela litlhoko tse ntseng li hola tsa indasteri ea sejoale-joale. Ebang ke lisebelisoa tsa elektroniki, optoelectronics kapa lisebelisoa tse tsoetseng pele, theknoloji ea sputtering e tsoela pele ho theha tsela eo re ralang le ho etsa mahlale a hosane.
Nako ea poso: Aug-15-2023