Mumunda wekudhirowa kwemafirimu matete, tekinoroji yekupuruzira yave nzira inoshandiswa zvakanyanya kuti iwane chaiyo uye yunifomu mafirimu matete mumaindasitiri akasiyana. Iko kuita kwakasiyana-siyana uye kuvimbika kweaya matekinoroji anowedzera mashandisirwo awo, achibvumira mainjiniya nevatsvaguri kuti vagadzirise mafirimu matete nezvinangwa chaizvo. Mune ino blog positi, isu tichatarisa zvakadzama mhando dzakasiyana dzetekinoroji dzematekinoroji dzinowanzoshandiswa nhasi, tichitsanangura maitiro avo akasiyana, mabhenefiti uye mashandisiro.
1. DC kupopota
DC sputtering ndeimwe yeakanyanya uye anoshandiswa zvakanyanya akatetepa firimu deposition maitiro. Maitiro acho anosanganisira kushandisa DC magetsi sosi kugadzira kupenya kuburitsa munzvimbo yakaderera-kudzvanywa gasi. Positive ions muplasma inobhomba zvinhu zvakanangwa, ichibvisa maatomu nekuaisa pane substrate. DC sputtering inozivikanwa nekureruka kwayo, kuita-mutengo, uye kugona kuisa emhando yepamusoro mafirimu matete pane akasiyana ma substrates, anosanganisira girazi, ceramics, uye simbi.
Zvishandiso zveDC sputtering:
- Semiconductor kugadzira
- Optical coating
- Mutete firimu solar masero
2. Radio Frequency uye Reactive Sputtering
Radio Frequency (RF) sputtering iRF simba rinobatsirwa musiyano weDC sputtering. Munzira iyi, zvinhu zvinonangwa zvinobhombwa nemaion anogadzirwa neredhiyo frequency simba. Kuvapo kwemunda weRF kunosimudzira maitiro eionization, zvichibvumira kunyatso kudzora kwekuumbwa kwefirimu. Reactive sputtering, kune rumwe rutivi, kunosanganisira kupinza gasi rinoita basa, rakadai senitrogen kana oxygen, mukamuri rekupfirira. Izvi zvinogonesa kuumbwa kwemafirimu akatetepa emakomponi, senge maokisijeni kana nitrides, ane zvinhu zvinowedzerwa.
Zvishandiso zveRF uye Reactive Sputtering:
- Anti-reflection coating
- Semiconductor chipingamupinyi
- Optical waveguides
3. Magnetron sputtering
Magnetron sputtering isarudzo yakakurumbira yekukwirira-reti deposition. Iyi tekinoroji inoshandisa magineti padhuze nekwainotarirwa kuti iwedzere plasma density, zvichikonzera kushanda kweionization yepamusoro uye yakanakisa kutetepa firimu kunamatira. Iyo yekuwedzera magineti inovhara iyo plasma padyo nezvainotarirwa, ichidzikisa chinangwa chekushandisa kana ichienzaniswa neyakajairwa nzira dzekupopota. Magnetron sputtering inovimbisa yakakwira deposition mitengo uye yepamusoro yekubatisa zvivakwa, zvichiita kuti ive yakanakira kugadzirwa kwakakura.
Zvishandiso zvemagnetron sputtering:
- yakaonda firimu transistor
-Magineti yekuchengetedza midhiya
- Decorative coatings pagirazi nesimbi
4. Ion danda kuputika
Ion beam sputtering (IBS) inzira inosiyana-siyana yekuputira zvinhu zvinonangwa uchishandisa danda reion. IBS inodzoreka zvakanyanya, ichibvumira chaiyo firimu ukobvu kutonga uye kuderedza kurasikirwa kwezvinhu. Iyi tekinoroji inovimbisa stoichiometrically yakaringana kuumbwa uye yakaderera kusvibiswa mazinga. Nekufanana kwayo kwemafirimu uye kusarudzwa kwakakura kwezvinhu zvinotarirwa, IBS inogona kuburitsa akatsetseka, asina hurema-mafirimu mafirimu, ichiita kuti ive yakakodzera kune yakakosha maapplication.
Zvishandiso zveIon Beam Sputtering:
- X-ray girazi
- Optical mafirita
- Anti-kupfeka uye yakaderera-kupokana coating
mukupedzisa
Nyika yetekinoroji yekupuruzira yakakura uye yakasiyana, ichipa mainjiniya nevatsvaguri mikana yakawanda yekuonda kwemafirimu. Kuziva kwemhando dzakasiyana dzemaitiro ekupfira uye mashandisiro awo kwakakosha kuti uwane yakakwana yakaonda firimu zvimiro zvinoenderana nezvinodiwa chaizvo. Kubva pakapfava DC sputtering kusvika chaiyo ion beam sputtering, imwe neimwe nzira inoita basa rakakosha mumaindasitiri akawanda, ichibatsira mukusimudzira tekinoroji yekucheka-kumucheto.
Nekunzwisisa zvichangobva kuitika mutekinoroji yekupopota, tinogona kushandisa simba remafirimu matete kuti asangane nezvinodiwa zvinokura zveindasitiri yemazuva ano. Zvingave mumagetsi, optoelectronics kana zvigadzirwa zvepamberi, tekinoroji yekupuruzira inoramba ichigadzira nzira yatinogadzira uye kugadzira matekinoroji emangwana.
Nguva yekutumira: Aug-15-2023