Mu rwego rwo gushira amafirime yoroheje, tekinoroji ya sputtering yabaye uburyo bukoreshwa cyane kugirango ugere kuri firime zuzuye kandi zoroshye mu nganda zitandukanye. Ubwinshi bwokwizerwa kwikoranabuhanga ryagura ibikorwa byabo, bituma abajenjeri nabashakashatsi badoda firime yoroheje kubikorwa byihariye. Muri iyi nyandiko ya blog, tuzareba byimbitse muburyo butandukanye bwa tekinoroji ya sputtering ikoreshwa muri iki gihe, dusobanura ibiranga umwihariko, inyungu nibisabwa.
1. DC gusohora
DC gusohora ni bumwe muburyo bwibanze kandi bukoreshwa cyane muburyo bwo kubika firime. Inzira ikubiyemo gukoresha ingufu za DC kugirango zitange urumuri rwinshi mubidukikije bya gaze. Iyoni nziza muri plasma itera ibisasu intego, ikuraho atome ikabishyira kuri substrate. DC gusohora bizwiho ubworoherane, gukoresha neza, hamwe nubushobozi bwo kubitsa firime nziza cyane yoroheje kuri substrate zitandukanye, zirimo ibirahuri, ububumbyi, nicyuma.
Porogaramu ya DC gusohora:
- Gukora Semiconductor
- Gufata neza
- Imirasire y'izuba ntoya
2. Umuyoboro wa Radiyo hamwe na Sputtering
Radio Frequency (RF) gusohora ni imbaraga za RF zifasha variant ya DC. Muri ubu buryo, ibikoresho bigenewe guterwa na ion zakozwe na radiyo yumurongo wa radiyo. Kubaho kwa RF umurima byongera inzira ya ionisation, bigatuma igenzura neza neza ibigize firime. Ku rundi ruhande, gusohora ibintu neza, bikubiyemo kwinjiza gaze, nka azote cyangwa ogisijeni, mu cyumba gisohoka. Ibi bifasha gukora firime yoroheje yibintu, nka oxyde cyangwa nitride, hamwe nibintu byongerewe imbaraga.
Porogaramu ya RF na Sputtering:
- Kurwanya-kwigaragaza
- Inzitizi ya Semiconductor
- Amashanyarazi meza
3. Magnetron yihuta
Magnetron gusohora ni amahitamo azwi cyane kubitsa hejuru. Iri koranabuhanga rikoresha umurima wa magneti hafi yubuso bwateganijwe kugirango wongere ubwinshi bwa plasma, bigatuma habaho ionisiyoneri ikora neza hamwe na firime nziza cyane. Umwanya wa magnetiki wongeyeho ufunga plasma hafi yintego, igabanya ibyo ukoresha ugereranije nuburyo busanzwe bwo gusohora. Imashini ya Magnetron itanga igipimo cyinshi cyo kubika hamwe nuburyo bwiza bwo gutwikira, bigatuma biba byiza mubikorwa binini.
Gukoresha magnetron gusohora:
- tristoriste yoroheje
- Itangazamakuru ryabitswe
- Kwambika imitako ku kirahure n'icyuma
4. Ion beam sputtering
Ion beam sputtering (IBS) nubuhanga butandukanye bwo gusasa ibikoresho bigenewe ukoresheje ion beam. IBS irashobora kugenzurwa cyane, itanga neza neza ubugari bwa firime no kugabanya gutakaza ibintu. Ubu buhanga butuma stoichiometric ikosora ibihimbano hamwe nurwego ruto rwanduye. Hamwe na firime nziza cyane hamwe no guhitamo ibikoresho bigenewe, IBS irashobora gukora firime nziza, idafite inenge, bigatuma ikoreshwa muburyo budasanzwe.
Porogaramu ya Ion Beam Gusohora:
- Indorerwamo ya X-ray
- Akayunguruzo keza
- Kurwanya kwambara no gutwikirwa hasi
mu gusoza
Isi yikoranabuhanga rya sputtering nini kandi iratandukanye, itanga injeniyeri nabashakashatsi uburyo bwinshi bwo gushira firime yoroheje. Ubumenyi bwubwoko butandukanye bwubuhanga bwo gusohora nibisabwa ni ngombwa kugirango ugere kubintu byiza bya firime yoroheje ukurikije ibisabwa byihariye. Kuva kuri DC yoroshye kugeza kuri ion beam sputtering, buri buryo bugira uruhare runini mubikorwa byinshi, bigira uruhare mugutezimbere ikoranabuhanga rigezweho.
Mugusobanukirwa iterambere rigezweho muburyo bwa tekinoroji, dushobora gukoresha imbaraga za firime zoroheje kugirango duhuze ibyifuzo byinganda zigezweho. Haba muri elegitoroniki, optoelectronics cyangwa ibikoresho byateye imbere, tekinoroji ya sputtering ikomeje gushiraho uburyo dushushanya no gukora tekinoroji y'ejo.
Igihe cyo kohereza: Kanama-15-2023