Zipangizo zokutira za vacuum ndi mtundu waukadaulo wocheperako woyika mafilimu pamalo opanda zingwe, omwe amagwiritsidwa ntchito kwambiri pamagetsi, zamagetsi, zamagetsi, sayansi yazinthu, mphamvu ndi zina. Zida zokutira vacuum zimapangidwa makamaka ndi zigawo izi:
Vacuum Chamber: Ichi ndiye gawo loyambira la zida zokutira zotsekera, momwe njira zonse zokutira zimachitikira. Chipinda chochotsera vacuum chiyenera kupirira malo opanda vacuum ndikusunga chisindikizo chabwino.
Pampu ya Vacuum: Imagwiritsidwa ntchito potulutsa mpweya mkati mwa chipinda cha vacuum kuti pakhale malo opanda vacuum. Mapampu a vacuum wamba amaphatikiza mapampu amakina ndi mapampu a molekyulu.
Gwero la Evaporation: Amagwiritsidwa ntchito kutenthetsa ndi kusungunula zinthu zokutira. Gwero la evaporation likhoza kukhala kutentha kwamphamvu, kutentha kwa ma elekitironi, kutentha kwa laser ndi zina zotero.
Choyikapo (Substrate Holder): chimagwiritsidwa ntchito kuyika gawo lapansi kuti likutidwe. Chosungira gawo lapansi chikhoza kuzunguliridwa kapena kusunthidwa kuti chitsimikizidwe chofanana cha zokutira.
Dongosolo Loyang'anira: Amagwiritsidwa ntchito kuwongolera njira yonse yokutira, kuphatikiza kuyambika ndi kuyimitsidwa kwa pampu ya vacuum, kuwongolera kutentha kwa gwero la evaporation, ndi kusintha kwa kuchuluka kwa malo.
Zida zoyezera ndi kuyang'anira: Zomwe zimagwiritsidwa ntchito poyang'anira magawo ofunikira pakuyala mu nthawi yeniyeni, monga digiri ya vacuum, kutentha, mlingo wa deposition, etc.
Dongosolo lamagetsi: kuti apereke mphamvu yofunikira pazida zokutira za vacuum.
Dongosolo lozizira: lomwe limagwiritsidwa ntchito kuziziritsa chipinda cha vacuum ndi zida zina zopangira kutentha kuti zitsimikizire kuti zida zikuyenda bwino.
Kugwirizana kothandiza kwa zigawozi kumapangitsa kuti zida zopangira vacuum zizitha kuwongolera makulidwe, kapangidwe kake ndi kapangidwe ka filimuyo kuti ikwaniritse zosowa zosiyanasiyana zamakampani ndi sayansi.
-Nkhaniyi yatulutsidwa ndiwopanga makina opangira vacuumGuangdong Zhenhua
Nthawi yotumiza: Jul-27-2024

