Pankhani yoyika filimu yopyapyala, ukadaulo wa sputtering wasanduka njira yogwiritsidwa ntchito kwambiri kuti akwaniritse mafilimu olondola komanso ofanana m'mafakitale osiyanasiyana. Kusinthasintha komanso kudalirika kwa matekinolojewa kumakulitsa ntchito zawo, kulola mainjiniya ndi ofufuza kuti azitha kupanga mafilimu opyapyala pazifukwa zinazake. Mu positi iyi yabulogu, tiwona mozama mitundu yosiyanasiyana ya matekinoloje otayira omwe amagwiritsidwa ntchito masiku ano, kufotokoza mawonekedwe awo apadera, mapindu ndi ntchito.
1. DC kuseweretsa
DC sputtering ndi imodzi mwa njira zoyambira kwambiri komanso zogwiritsidwa ntchito kwambiri poyika mafilimu. Njirayi imaphatikizapo kugwiritsa ntchito gwero lamagetsi la DC kuti lizitulutsa kuwala m'malo otsika kwambiri. Ma ion abwino mu plasma amawombera zinthu zomwe akufuna, kutulutsa maatomu ndikuyika pagawo laling'ono. DC sputtering imadziwika ndi kuphweka kwake, kutsika mtengo, komanso kuthekera koyika mafilimu owonda kwambiri pamagawo osiyanasiyana, kuphatikiza magalasi, zoumba, ndi zitsulo.
Ntchito za DC sputtering:
- Kupanga semiconductor
- Kupaka kwa kuwala
- Ma cell a solar amakanema
2. Mawayilesi pafupipafupi komanso Kutulutsa Kwachangu
Radio Frequency (RF) sputtering ndi mtundu wa RF wothandizidwa ndi DC sputtering. Mwanjira iyi, zinthu zomwe zimayang'aniridwa zimaphulitsidwa ndi ma ion opangidwa ndi mphamvu yamagetsi yawayilesi. Kukhalapo kwa gawo la RF kumathandizira njira ya ionization, kulola kuwongolera bwino momwe filimuyo idapangidwira. Komano, kutulutsa mpweya wotuluka, monga nayitrojeni kapena okosijeni, kumaloŵetsamo mpweya wotayirira. Izi zimathandiza kupanga mafilimu oonda azinthu, monga ma oxides kapena nitrides, okhala ndi zinthu zowonjezera.
Kugwiritsa ntchito RF ndi Reactive Sputtering:
- Anti-reflection zokutira
- Chotchinga cha semiconductor
- Optical waveguides
3. Kulaza kwa maginitoni
Magnetron sputtering ndi chisankho chodziwika bwino pakuyika kwapamwamba. Tekinoloje iyi imagwiritsa ntchito mphamvu ya maginito pafupi ndi malo omwe chandamale kuti iwonjezere kachulukidwe ka plasma, zomwe zimapangitsa kuti ionization igwire bwino ntchito komanso kumamatira bwino kwambiri kwa filimu yopyapyala. Mphamvu ya maginito yowonjezera imatseketsa plasma pafupi ndi chandamale, kuchepetsa kugwiritsira ntchito chandamale poyerekeza ndi njira wamba za sputtering. Magnetron sputtering amawonetsetsa kuti mitengo ikukwera kwambiri komanso zokutira zapamwamba, zomwe zimapangitsa kuti zikhale zoyenera kupanga zazikulu.
Kugwiritsa ntchito magnetron sputtering:
- transistor yopyapyala ya filimu
- Makanema osungira maginito
- Zokongoletsera zokongoletsera pagalasi ndi zitsulo
4. Kuphulika kwa mtengo wa ion
Ion beam sputtering (IBS) ndi njira yosunthika yoponyera zida zomwe mukufuna kugwiritsa ntchito mtengo wa ion. IBS ndiyotheka kulamuliridwa, kulola kuwongolera makulidwe a kanema ndikuchepetsa kutayika kwa zinthu. Ukadaulo uwu umatsimikizira kupangidwa kolondola kwa stoichiometrically komanso milingo yotsika yoipitsidwa. Ndi mawonekedwe ake abwino kwambiri amakanema komanso kusankha kwakukulu kwa zida zomwe mukufuna, IBS imatha kupanga makanema osalala, opanda cholakwika, kuwapangitsa kukhala oyenera kugwiritsa ntchito mwapadera.
Kugwiritsa ntchito Ion Beam Sputtering:
- galasi la X-ray
- Zosefera zowoneka
- Anti-kuvala komanso zokutira zotsika kwambiri
Pomaliza
Ukadaulo waukadaulo wa sputtering ndi waukulu komanso wosiyanasiyana, wopatsa mainjiniya ndi ofufuza mwayi wambiri woyika filimu yopyapyala. Kudziwa za mitundu yosiyanasiyana ya njira zopopera ndi kugwiritsa ntchito kwake ndikofunikira kuti mukwaniritse bwino kwambiri mafilimu opyapyala malinga ndi zofunikira zenizeni. Kuyambira kuphatikizika kosavuta kwa DC kupita ku sputtering yeniyeni ya ion, njira iliyonse imakhala ndi gawo lofunikira m'mafakitale ambiri, zomwe zimathandizira kupita patsogolo kwaukadaulo wotsogola.
Pomvetsetsa zaposachedwa kwambiri paukadaulo wa sputtering, titha kugwiritsa ntchito mphamvu zamakanema oonda kuti tikwaniritse zofuna zamakampani amakono. Kaya ndi zamagetsi, ma optoelectronics kapena zida zapamwamba, ukadaulo wa sputtering ukupitiliza kukonza momwe timapangira ndi kupanga ukadaulo wa mawa.
Nthawi yotumiza: Aug-15-2023