Site na mmụba ngwa ngwa nke ọchịchọ ụlọ ọrụ ekwentị mkpanaaka, ikike ibu nke igwe mkpuchi anya ọdịnala enweghị ike imezu ihe a chọrọ. ZHENHUA ewepụtala ngwa mkpuchi anya magnetron sputtering iji mezuo ihe a chọrọ.
(1) Ebe a na-etinye ihe eji arụ ọrụ na-eji usoro cylindrical eme ihe, nke nwere nnukwu ebe mkpuchi. Ike ibu ngwaahịa ahụ dị okpukpu abụọ karịa nke ngwa elektrọn evaporation nke otu nkọwapụta ahụ. E ji usoro mgbanwe na ntụgharị mee ihe e ji arụ ọrụ, nke nwere ike ịgbanwe ka ọ dabara na ihe eji arụ ọrụ nke ụdị dị iche iche ma na-ejikarị ya eme ihe nke ukwuu.
(2) Site na iji sistemụ magnetron cylindrical target sputtering nke etiti ugboro na sistemụ enyemaka ion, ihe mkpuchi ahụ dị obere, nwere ndeksi refractive dị elu ma kwụsie ike, njikọta siri ike, ọ dịghịkwa mfe ịnabata molekul uzuoku mmiri. N'ọtụtụ ebe, ihe nkiri ahụ na-ejigide arụmọrụ anya kwụsiri ike karịa ihe nkiri ahụ nke ngwa ikuku eletrọn ọdịnala na-etinye.
(3) E ji sistemụ nlekota kristal chịkwaa ọkpụrụkpụ ihe nkiri ahụ nke ọma, usoro a nwere nkwụsi ike dị elu na ikike imeghachi ya nke ọma. Sistemụ njikwa SPEEDFLO mechiri emechi na sistemụ njikwa akpaka nwere ike imeziwanye ọnụego itinye ego nke SiO2 nke ọma.
(4) Nhazi ihe eji arụ ọrụ thermostatic nwere ike ijikwa okpomọkụ ngwaahịa nke ọma, ma nwee ike imeghari ya na ngwaahịa PET na PC dị gịrịgịrị.
Enwere ike iji ngwa a tinye TiO2, SiO2, Nb2O5, In, Ag, Cr na ihe ndị ọzọ, ma nwee ike ime ọtụtụ ihe nkiri agba anya, ihe nkiri AR, ihe nkiri spectroscopic, wdg. A na-eji ya eme ihe nke ukwuu na ihe nkiri PET / efere mejupụtara, iko mkpuchi ekwentị mkpanaaka, etiti etiti ekwentị mkpanaaka, ngwaahịa eletrọnịkị 3C, ugogbe anya, karama ihe na-esi ísì ụtọ, kristal na ngwaahịa ndị ọzọ.
| CFM1916 |
| φ1900*H1600(mm) |