Nyob rau hauv lub tshav pob ntawm nyias zaj duab xis deposition, sputtering technology tau dhau los ua ib tug dav siv txoj kev kom ua tau meej thiab niaj hnub nyias films nyob rau hauv ntau yam industries. Lub versatility thiab kev ntseeg siab ntawm cov thev naus laus zis no nthuav dav lawv cov kev siv, tso cai rau cov engineers thiab cov kws tshawb fawb los txiav cov yeeb yaj kiab nyias rau lub hom phiaj tshwj xeeb. Hauv no blog ncej, peb yuav ua tib zoo saib qhov sib txawv ntawm sputtering technologies uas nquag siv niaj hnub no, piav qhia lawv cov yam ntxwv tshwj xeeb, cov txiaj ntsig thiab kev siv.
1. DC sputtering
DC sputtering yog ib qho ntawm cov txheej txheem yooj yim tshaj plaws thiab dav siv nyias zaj duab xis tso tawm cov txheej txheem. Cov txheej txheem suav nrog kev siv lub zog DC los tsim kom muaj lub teeb tawm hauv qhov chaw muaj roj tsawg. Cov ions zoo nyob rau hauv cov ntshav plasma bombard lub hom phiaj cov khoom, dislodging atoms thiab tso lawv rau ntawm lub substrate. DC sputtering paub txog nws txoj kev yooj yim, siv tau zoo, thiab muaj peev xwm tso cov yeeb yaj kiab zoo rau ntau yam substrates, suav nrog iav, ceramics, thiab hlau.
Kev siv ntawm DC sputtering:
- Kev tsim khoom semiconductor
- Optical txheej
- Nyias zaj duab xis solar cells
2. Xov tooj cua zaus thiab Reactive Sputtering
Xov tooj cua Frequency (RF) sputtering yog RF lub zog pab hloov pauv ntawm DC sputtering. Nyob rau hauv txoj kev no, lub hom phiaj cov khoom yog bombarded nrog ions generated los ntawm xov tooj cua zaus hwj chim. Lub xub ntiag ntawm RF teb txhim kho cov txheej txheem ionization, tso cai rau kev tswj hwm ntau dua ntawm cov yeeb yaj kiab. Reactive sputtering, ntawm qhov tod tes, koom nrog kev qhia cov pa roj reactive, xws li nitrogen lossis oxygen, mus rau hauv lub chamber sputtering. Qhov no ua rau tsim cov yeeb yaj kiab nyias ntawm cov tebchaw, xws li oxides lossis nitrides, nrog cov khoom siv zoo dua qub.
Kev siv ntawm RF thiab Reactive Sputtering:
- Anti-reflection txheej
- Semiconductor barrier
- Optical waveguides
3. Magnetron sputtering
Magnetron sputtering yog qhov kev xaiv nrov rau kev tso nyiaj siab. Cov thev naus laus zis no siv qhov chaw sib nqus nyob ze ntawm lub hom phiaj saum npoo kom nce cov ntshav plasma, ua rau muaj kev ua haujlwm zoo dua ionization thiab zoo heev nyias zaj duab xis adhesion. Qhov chaw sib nqus ntxiv ua rau lub plasma nyob ze rau lub hom phiaj, txo cov hom phiaj noj piv rau cov qauv siv sputtering. Magnetron sputtering ua kom ntseeg tau tias qhov tso nyiaj ntau dua thiab cov txheej txheem zoo tshaj plaws, ua rau nws zoo tagnrho rau kev tsim khoom loj.
Daim ntawv thov ntawm magnetron sputtering:
- nyias zaj duab xis transistor
-Magnetic cia media
- Kho kom zoo nkauj txheej ntawm iav thiab hlau
4. Ion beam sputtering
Ion beam sputtering (IBS) yog txheej txheem ntau yam rau sputtering cov ntaub ntawv siv lub ion beam. IBS yog tswj tau heev, tso cai rau cov yeeb yaj kiab tuab tswj thiab txo cov khoom poob. Cov cuab yeej no ua kom muaj qhov tseeb ntawm stoichiometrically muaj pes tsawg leeg thiab tsis tshua muaj paug. Nrog nws cov yeeb yaj kiab zoo sib xws thiab xaiv dav ntawm cov khoom siv, IBS tuaj yeem tsim cov yeeb yaj kiab du, tsis muaj qhov tsis xws luag, ua rau nws tsim nyog rau cov ntawv thov tshwj xeeb.
Daim ntawv thov ntawm Ion Beam Sputtering:
- X-ray daim iav
- Cov lim dej kho qhov muag
-Txoj kev hnav thiab kev sib txhuam qis
nyob rau hauv xaus
Lub ntiaj teb ntawm sputtering thev naus laus zis yog qhov loj thiab ntau yam, muab cov kws tshaj lij thiab cov kws tshawb fawb muaj ntau txoj hauv kev rau cov yeeb yaj kiab nyias. Kev paub txog cov txheej txheem sib txawv ntawm cov txheej txheem sputtering thiab lawv cov ntawv thov yog qhov tseem ceeb kom ua tiav cov yeeb yaj kiab zoo tshaj plaws raws li cov cai tshwj xeeb. Los ntawm qhov yooj yim DC sputtering mus rau qhov tseeb ion beam sputtering, txhua txoj kev ua lub luag haujlwm tseem ceeb hauv ntau qhov kev lag luam, pab txhawb rau kev nce qib ntawm kev siv thev naus laus zis.
Los ntawm kev nkag siab txog qhov kev txhim kho tshiab tshaj plaws hauv kev siv tshuab sputtering, peb tuaj yeem siv lub zog ntawm cov yeeb yaj kiab nyias kom tau raws li qhov xav tau ntawm kev lag luam niaj hnub no. Txawm hais tias nyob rau hauv electronics, optoelectronics los yog cov ntaub ntawv siab heev, sputtering technology txuas ntxiv mus rau txoj kev peb tsim thiab tsim cov technologies ntawm tag kis.
Post lub sij hawm: Aug-15-2023