Ma ke kahua o ka hoʻopaʻa ʻana i nā kiʻiʻoniʻoni lahilahi, ua lilo ka ʻenehana sputtering i mea hoʻohana nui ʻia e hoʻokō i nā kiʻiʻoniʻoni ʻoniʻoni pololei a kūlike i nā ʻoihana like ʻole. ʻO ka versatility a me ka hilinaʻi o kēia mau ʻenehana e hoʻonui i kā lākou mau noi, e ʻae ana i nā ʻenekinia a me nā mea noiʻi e hana i nā kiʻiʻoniʻoni lahilahi no nā kumu kikoʻī. Ma kēia moʻomanaʻo moʻomanaʻo, e nānā hohonu mākou i nā ʻano ʻenehana sputtering i hoʻohana mau ʻia i kēia mau lā, e wehewehe ana i kā lākou mau ʻano, nā pono a me nā noi.
1. DC sputtering
ʻO DC sputtering kekahi o nā ʻenehana hoʻopaʻa kiʻi ʻoniʻoni maʻamau a hoʻohana nui ʻia. ʻO ke kaʻina hana e pili ana i ka hoʻohana ʻana i kahi kumu mana DC no ka hoʻopuka ʻana i ka hoʻoheheʻe ʻana i loko o kahi wahi kinoea haʻahaʻa haʻahaʻa. ʻO nā ion maikaʻi i loko o ka plasma e hoʻopololei i nā mea i hoʻopaʻa ʻia, e hoʻohemo i nā atom a waiho iā lākou ma luna o ka substrate. ʻIke ʻia ʻo DC sputtering no kona maʻalahi, kumukūʻai, a me ka hiki ke waiho i nā kiʻi ʻoniʻoni lahilahi kiʻekiʻe ma nā ʻano substrate like ʻole, me ke aniani, ka seramika, a me nā metala.
Nā hoʻohana ʻana o DC sputtering:
- Hana semiconductor
- Ka uhi ʻike
- Kiʻiʻoniʻoni ʻoniʻoni ʻoniʻoni solar cell
2. Ka Lekiō a me ka Reactive Sputtering
ʻO ka Radio Frequency (RF) sputtering he mana RF i kōkua ʻia o DC sputtering. Ma kēia ʻano, hoʻopā ʻia ka mea i manaʻo ʻia me nā ion i hana ʻia e ka mana alapine radio. ʻO ka loaʻa ʻana o kahi kahua RF e hoʻonui i ke kaʻina hana ionization, e ʻae i ka mana pololei o ka haku ʻana o ke kiʻiʻoniʻoni. ʻO ka sputtering reactive, ma kekahi ʻaoʻao, pili i ka hoʻokomo ʻana i kahi kinoea reactive, e like me ka nitrogen a i ʻole oxygen, i loko o ke keʻena sputtering. Hiki i kēia ke hana i nā kiʻiʻoniʻoni lahilahi o nā pūhui, e like me nā oxides a i ʻole nitrides, me nā waiwai waiwai i hoʻonui ʻia.
Nā noi o RF a me Reactive Sputtering:
- Ka uhi ʻana i ka noʻonoʻo
- Pale Semiconductor
- Nā alakaʻi nalu
3. Kaʻi ʻana o Magnetron
He koho kaulana ʻo Magnetron sputtering no ka deposition kiʻekiʻe. Ke hoʻohana nei kēia ʻenehana i kahi māla magnetic kokoke i ka ʻili i manaʻo ʻia e hoʻonui i ka density plasma, e hopena i ka ʻoi aku ka maikaʻi o ka ionization a me ka hoʻopili ʻana i nā kiʻiʻoniʻoni lahilahi. Hoʻopili ke kahua magnetic hou i ka plasma kokoke i ka pahu hopu, e hōʻemi ana i ka hoʻohana ʻana i ka pahuhopu i hoʻohālikelike ʻia me nā ʻano sputtering maʻamau. Mālama ʻo Magnetron sputtering i nā kumukūʻai deposition kiʻekiʻe a me nā waiwai uhi ʻoi aku ka maikaʻi, e kūpono ia no ka hana nui.
Nā hoʻohana o ka magnetron sputtering:
- transistor kiʻiʻoniʻoni lahilahi
- Media hoʻopaʻa magnet
- Nā uhi hoʻonani ma ke aniani a me ke metala
4. ʻO ke kukuna ion sputtering
ʻO ka Ion beam sputtering (IBS) he ʻano hana maʻalahi no ka sputtering i nā mea i hoʻopaʻa ʻia me ka hoʻohana ʻana i ke kukui ion. Hiki ke kaohi ʻia ʻo IBS, e ʻae ana i ka hoʻomalu ʻana i ka mānoanoa kiʻiʻoniʻoni pololei a me ka hōʻemi ʻana i ka poho waiwai. Mālama kēia ʻenehana i ka haku mele stoichiometrically pololei a me nā pae contamination haʻahaʻa. Me kona kūlana kiʻiʻoniʻoni maikaʻi loa a me ke koho ākea o nā mea i hoʻopaʻa ʻia, hiki i ka IBS ke hana i nā kiʻiʻoniʻoni maʻemaʻe, kīnā ʻole, kūpono ia no nā noi kūikawā.
Nā noi o ka Ion Beam Sputtering:
- Hōʻike aniani X-ray
- Nā kānana Optical
- ʻAi ʻaʻahu a me ka haʻahaʻa haʻahaʻa
i ka hopena
Nui a ʻano like ʻole ka honua o ka ʻenehana sputtering, e hāʻawi ana i nā ʻenekinia a me nā mea noiʻi i nā manawa he nui no ka waiho ʻana i nā kiʻiʻoniʻoni lahilahi. He mea nui ka ʻike o nā ʻano ʻenehana sputtering a me kā lākou mau noi no ka hoʻokō ʻana i nā waiwai kiʻiʻoniʻoni lahilahi e like me nā koi kikoʻī. Mai ka maʻalahi DC sputtering a i ka ion beam sputtering pololei, he mea koʻikoʻi kēlā me kēia ʻano hana i nā ʻoihana he nui, e hāʻawi ana i ka holomua o ka ʻenehana ʻoki.
Ma ka hoʻomaopopo ʻana i nā mea hou loa i ka ʻenehana sputtering, hiki iā mākou ke hoʻohana i ka mana o nā kiʻiʻoniʻoni lahilahi e hoʻokō i nā koi ulu o ka ʻoihana hou. Inā i loko o ka uila, optoelectronics a i ʻole nā mea holomua, ke hoʻomau nei ka ʻenehana sputtering i ke ʻano o kā mākou hoʻolālā a hana ʻana i nā ʻenehana o ka lā ʻapōpō.
Ka manawa hoʻouna: ʻAukake-15-2023