Imishini yokufaka ama-sputter, eyaziwa nangokuthi izinhlelo zokufutha, iyimishini ekhethekile kakhulu esetshenziswa enqubweni yokufaka ifilimu encane. Isebenza ngesimiso sokufutha, okuhilela ukuqhuma into eqondiwe ngama-ion noma ama-athomu anamandla aphezulu. Le nqubo ikhipha umfudlana wama-athomu kusuka kunto eqondiwe, bese ifakwa ku-substrate ukuze kwakheke ifilimu encane.
Ukusetshenziswa kwemishini yokufaka ama-sputter kukhule kakhulu ngenxa yekhono layo lokukhiqiza amafilimu ahlanzekile kakhulu, afanayo kakhulu futhi anobukhulu obulawulwayo. Amafilimu anjalo anezinhlelo eziningi kuma-microelectronics, ama-optics, amaseli elanga, imidiya yokugcina yamagnetic kanye neminye imikhakha.
Intuthuko yakamuva emkhakheni wemishini yokufaka ama-sputter iholele ekusebenzeni okuthuthukisiwe kanye nezici ezithuthukisiwe. Intuthuko ephawulekayo ukufakwa kobuchwepheshe bokufaka ama-sputter be-magnetron, okuvumela amazinga aphezulu okufaka kanye nekhwalithi yefilimu ethuthukisiwe. Lokhu kusungula izinto ezintsha kuvumela ukufakwa kwezinto ezahlukahlukene, okuhlanganisa izinsimbi, ama-oxide ensimbi kanye nama-semiconductor.
Ngaphezu kwalokho, imishini yokufaka ama-sputter manje isifakwe izinhlelo zokulawula ezithuthukisiwe eziqinisekisa ukulawulwa okunembile kwamapharamitha okufaka njengokucindezela kwegesi, ubuningi bamandla, ukwakheka okuqondiwe kanye nokushisa kwe-substrate. Lokhu kuthuthuka kuthuthukisa ukusebenza kwefilimu futhi kuvumela ukukhiqizwa kwamafilimu anezakhiwo ezenzelwe izinhlelo ezithile.
Ngaphezu kwalokho, intuthuko eqhubekayo emkhakheni we-nanotechnology nayo izuza kakhulu emishinini yokufaka ama-sputter. Abacwaningi basebenzisa le mishini ukudala izakhiwo ezincane kanye nezingubo ezakhiwe ngendlela eqondile kakhulu. Imishini yokufaka ama-sputter iyakwazi ukufaka amafilimu amancane phezu kwezimo eziyinkimbinkimbi nezindawo ezinkulu, okwenza kube kuhle kakhulu ezinhlotsheni ezahlukene zezinhlelo zokusebenza ze-nanoscale.
Muva nje kubikwe ukuthi ithimba lososayensi abavela esikhungweni socwaningo esidumile lithuthukise ngempumelelo umshini omusha wokufaka ama-sputter ongabeka amafilimu amancane ngokunemba okungakaze kubonwe. Lo mshini osezingeni eliphezulu uhlanganisa ama-algorithms okulawula asezingeni eliphezulu kanye nomklamo omusha we-magnetron ukuze kufezwe ukufana okuphezulu kwefilimu kanye nokulawula ukujiya. Ithimba locwaningo libona umshini walo uzoguqula inqubo yokukhiqiza yamadivayisi kagesi esizukulwane esilandelayo kanye nezinhlelo zokugcina amandla.
Ukuthuthukisa izinto ezintsha ezinomsebenzi othuthukisiwe kuyinto ephishekelwa umphakathi wesayensi. Imishini yokufaka ama-sputter isibe ithuluzi elibalulekile kulokhu kuhlola, okwenza kube lula ukutholakala nokuhlanganiswa kwezinto ezintsha ezinezakhiwo ezihlukile. Abacwaningi basebenzisa le mishini ukutadisha izindlela zokukhula kwefilimu, ukutadisha izinto ezinezakhiwo ezilungiselelwe, nokuthola izinto ezintsha ezingabumba ikusasa lobuchwepheshe.
–Lesi sihloko sikhishwe yi-umenzi womshini wokumboza nge-vacuumI-Guangdong Zhenhua
Isikhathi sokuthunyelwe: Okthoba-30-2023