Imashini zikoresha sputter, zizwi kandi nka sputtering systems, ni ibikoresho byihariye bikoreshwa mu buryo bwo gushyira sputtering film. Zikora ku ihame ryo gushyira sputtering, rikubiyemo gutera sputtering tool ukoresheje ions cyangwa atome zifite ingufu nyinshi. Ubu buryo busohora atome nyinshi mu bikoresho bikoreshwa, hanyuma zigashyirwa ku gice cyo hasi kugira ngo habeho sputtering film.
Ikoreshwa ry'imashini zikoresha sputter ryagutse cyane bitewe n'ubushobozi bwazo bwo gukora filime zifite isuku nyinshi, zihuye neza kandi zifite ubugari bugenzurwa. Filime nk'izo zifite akamaro kanini mu byuma bito by'ikoranabuhanga, optique, solar cells, storage media na magnetic.
Iterambere riherutse gukorwa mu rwego rw'imashini zikoresha sputter ryatumye imikorere yazo irushaho kuba myiza ndetse n'imiterere yazo irushaho kuba myiza. Iterambere rigaragara ni ugukoresha ikoranabuhanga rya magnetron sputtering, rituma habaho ubwiza bw'imashini zikoresha sputter. Iri hinduka ryemerera gushyiramo ibikoresho bitandukanye, birimo ibyuma, okiside z'ibyuma na semiconductors.
Byongeye kandi, imashini zikoresha sputter ubu zifite uburyo bugezweho bwo kugenzura butuma habaho kugenzura neza ibipimo byo gushyiramo nk'umuvuduko wa gaze, ubucucike bw'ingufu, imiterere y'intego n'ubushyuhe bwa substrate. Izi ntambwe zinoza imikorere ya filime kandi zigatuma filime zikozwe mu buryo bujyanye n'imikorere yihariye.
Byongeye kandi, iterambere rihoraho mu bijyanye n'ikoranabuhanga rya nanotechnology naryo ryungukira cyane ku mashini zikoresha sputter. Abashakashatsi barimo gukoresha izi mashini mu gukora sputter structures na nanostructure coatings mu buryo bunoze cyane. Imashini zikoresha sputter zirashobora gushyira filime nto ku miterere igoye no mu bice binini, bigatuma ziba nziza cyane mu gukoresha nanoscale zitandukanye.
Biherutse gutangazwa ko itsinda ry’abahanga mu bya siyansi bo mu kigo kizwi cyane cy’ubushakashatsi bakoze neza imashini nshya yo kubikamo sputter ishobora gushyiramo filime ntoya mu buryo budasanzwe. Iyi mashini igezweho ihuza algorithms zigezweho zo kugenzura hamwe n’igishushanyo gishya cya magnetron kugira ngo igere ku bufatanye bwiza bwa filime no kugenzura ubugari. Itsinda ry’ubushakashatsi riteganya ko imashini yaryo izahindura inzira yo gukora ibikoresho by’ikoranabuhanga byo mu gihe kizaza hamwe na sisitemu zo kubika ingufu.
Guteza imbere ibikoresho bishya bifite imikorere myiza ni igikorwa gikomeje gukorwa n'umuryango wa siyansi. Imashini zikoresha sputter depositions zabaye igikoresho cy'ingenzi muri ubu bushakashatsi, byorohereza kuvumbura no guhuza ibikoresho bishya bifite imiterere yihariye. Abashakashatsi bakoresha izi mashini mu kwiga uburyo bwo gukura kwa filime, kwiga ibikoresho bifite imiterere yihariye, no kuvumbura ibikoresho bishya bishobora kugira uruhare mu hazaza h'ikoranabuhanga.
–Iyi nkuru yasohotse nauruganda rukora imashini zikora imashini zikoresha umwuka ushyushyeGuangdong Zhenhua
Igihe cyo kohereza: 30 Ukwakira 2023