Makina oika ma sputter, omwe amadziwikanso kuti ma sputtering system, ndi zida zapadera kwambiri zomwe zimagwiritsidwa ntchito poika ma sputtering thin film. Amagwira ntchito motsatira mfundo yoika ma sputtering, yomwe imaphatikizapo kuponya ma ion kapena ma atomu amphamvu kwambiri pa chinthu chomwe akufuna. Njirayi imatulutsa ma atomu ambiri kuchokera ku chinthu chomwe akufuna, chomwe chimayikidwa pa substrate kuti apange filimu yopyapyala.
Kugwiritsa ntchito makina osungira ma sputter kwakula kwambiri chifukwa cha kuthekera kwawo kupanga mafilimu oyera kwambiri, ofanana bwino komanso makulidwe olamulidwa. Mafilimu oterewa amagwiritsidwa ntchito kwambiri mu ma microelectronics, optics, solar cells, maginito storage media ndi zina.
Zomwe zachitika posachedwapa m'munda wa makina oikamo ma sputter zapangitsa kuti magwiridwe antchito awonjezeke komanso makhalidwe awo akhale abwino. Kupita patsogolo kodziwika bwino ndikugwiritsa ntchito ukadaulo woika ma sputter a magnetron, womwe umalola kuti pakhale kuchuluka kwa ma sputter komanso kuti mafilimu akhale abwino. Kapangidwe kameneka kamalola kuti zinthu zosiyanasiyana zigwiritsidwe ntchito, kuphatikizapo zitsulo, zitsulo zotayidwa ndi ma semiconductors.
Kuphatikiza apo, makina oikamo ma sputter tsopano ali ndi makina apamwamba owongolera omwe amatsimikizira kuwongolera kolondola kwa magawo oikamo monga kuthamanga kwa mpweya, kuchuluka kwa mphamvu, kapangidwe ka cholinga ndi kutentha kwa substrate. Izi zimapangitsa kuti filimu igwire bwino ntchito ndipo zimathandiza kupanga mafilimu okhala ndi mawonekedwe ogwirizana ndi ntchito zinazake.
Kuphatikiza apo, chitukuko chopitilira m'munda wa nanotechnology chimapindulanso kwambiri ndi makina oikamo ma sputter. Ofufuza akugwiritsa ntchito makinawa popanga ma nanostructures ndi zokutira zomangidwa ndi nanostructured molondola kwambiri. Makina oikamo ma sputter amatha kuyika mafilimu opyapyala pamwamba pa mawonekedwe ovuta komanso madera akuluakulu, zomwe zimapangitsa kuti akhale abwino kwambiri pa ntchito zosiyanasiyana za nanoscale.
Posachedwapa zanenedwa kuti gulu la asayansi ochokera ku bungwe lodziwika bwino lofufuza lapanga bwino makina atsopano osungira ma sputter omwe amatha kuyika mafilimu opyapyala molondola kwambiri. Makina apamwamba awa amaphatikiza ma algorithms apamwamba kwambiri owongolera ndi kapangidwe katsopano ka magnetron kuti akwaniritse kufanana kwapamwamba kwa mafilimu ndi kuwongolera makulidwe. Gulu lofufuza likuganiza kuti makina ake adzasintha njira zopangira zida zamagetsi zam'badwo wotsatira ndi makina osungira mphamvu.
Kupanga zipangizo zatsopano zokhala ndi magwiridwe antchito abwino ndi ntchito yosalekeza ya gulu la asayansi. Makina osungira zinthu zotayira zinthu akhala chida chofunikira kwambiri pakufufuza kumeneku, zomwe zimathandiza kupeza ndi kupanga zinthu zatsopano zokhala ndi mawonekedwe apadera. Ofufuza akugwiritsa ntchito makinawa kuphunzira njira zokulira mafilimu, kuphunzira zipangizo zokhala ndi mawonekedwe apadera, ndikupeza zinthu zatsopano zomwe zingasinthe tsogolo la ukadaulo.
– Nkhaniyi yatulutsidwa ndiwopanga makina ophikira vacuumGuangdong Zhenhua
Nthawi yotumizira: Okutobala-30-2023
