Cov tshuab tso cov tshuaj sputtering, tseem hu ua sputtering systems, yog cov khoom siv tshwj xeeb siv rau hauv cov txheej txheem tso cov zaj duab xis nyias. Nws ua haujlwm raws li lub hauv paus ntsiab lus ntawm sputtering, uas cuam tshuam nrog kev foob pob rau cov khoom siv nrog cov ions lossis atoms muaj zog siab. Cov txheej txheem no tso tawm cov kwj deg ntawm cov atoms los ntawm cov khoom siv, uas tom qab ntawd tso rau ntawm lub substrate los tsim cov zaj duab xis nyias.
Kev siv cov tshuab sputter deposition tau nthuav dav heev vim lawv muaj peev xwm tsim cov yeeb yaj kiab uas muaj kev ntshiab siab, kev sib npaug zoo heev thiab kev tswj qhov tuab. Cov yeeb yaj kiab no muaj kev siv dav hauv microelectronics, optics, solar cells, magnetic storage media thiab lwm yam teb.
Cov kev txhim kho tsis ntev los no hauv kev siv tshuab sputter deposition tau ua rau muaj kev ua haujlwm zoo dua thiab cov yam ntxwv zoo dua. Ib qho kev nce qib tseem ceeb yog kev siv tshuab magnetron sputtering, uas ua rau muaj kev tso tawm ntau dua thiab zoo dua cov yeeb yaj kiab. Qhov kev tsim kho tshiab no tso cai rau kev tso tawm ntawm ntau yam khoom siv, suav nrog cov hlau, cov hlau oxides thiab cov semiconductors.
Ntxiv rau, cov tshuab tso cov tshuaj sputter tam sim no tau nruab nrog cov txheej txheem tswj hwm siab heev uas ua kom muaj kev tswj hwm qhov tseeb ntawm cov kev tso cov tshuaj xws li lub zog roj, lub zog ceev, cov khoom sib xyaw thiab qhov kub ntawm cov substrate. Cov kev nce qib no txhim kho kev ua tau zoo ntawm zaj duab xis thiab ua rau muaj peev xwm tsim cov yeeb yaj kiab nrog cov khoom tsim rau cov ntawv thov tshwj xeeb.
Ntxiv mus, kev txhim kho tas mus li hauv thaj chaw ntawm nanotechnology kuj tau txais txiaj ntsig zoo los ntawm cov tshuab sputter deposition. Cov kws tshawb fawb siv cov tshuab no los tsim cov nanostructures thiab nanostructured coatings nrog qhov tseeb siab heev. Cov tshuab Sputter deposition muaj peev xwm tso cov yeeb yaj kiab nyias nyias hla cov duab nyuaj thiab thaj chaw loj, ua rau lawv zoo tagnrho rau ntau yam kev siv nanoscale.
Tsis ntev los no muaj xov xwm tshaj tawm tias ib pab kws tshawb fawb los ntawm ib lub tsev kawm tshawb fawb nto moo tau tsim lub tshuab tso cov yeeb yaj kiab tshiab uas tuaj yeem tso cov yeeb yaj kiab nyias nyias nrog qhov tseeb tsis tau muaj dua. Lub tshuab txiav no sib xyaw cov algorithms tswj hwm zoo tshaj plaws thiab kev tsim magnetron tshiab kom ua tiav cov yeeb yaj kiab sib xws thiab kev tswj qhov tuab. Pab pawg tshawb fawb xav tias nws lub tshuab yuav hloov pauv cov txheej txheem tsim khoom ntawm cov khoom siv hluav taws xob tiam tom ntej thiab cov tshuab khaws cia hluav taws xob.
Kev tsim cov ntaub ntawv tshiab nrog kev ua haujlwm zoo dua yog ib qho kev tshawb nrhiav tsis tu ncua ntawm lub zej zog kev tshawb fawb. Cov tshuab tso dej tawm tau dhau los ua ib qho cuab yeej tseem ceeb hauv kev tshawb nrhiav no, pab txhawb kev tshawb pom thiab kev tsim cov ntaub ntawv tshiab nrog cov yam ntxwv tshwj xeeb. Cov kws tshawb fawb siv cov tshuab no los kawm txog cov txheej txheem loj hlob ntawm zaj duab xis, kawm cov ntaub ntawv nrog cov yam ntxwv tshwj xeeb, thiab tshawb pom cov ntaub ntawv tshiab uas tuaj yeem hloov pauv yav tom ntej ntawm thev naus laus zis.
– Tsab xov xwm no yog tso tawm los ntawmlub tshuab nqus tsev txheej tshuab chaw tsim khoomGuangdong Zhenhua
Lub sijhawm tshaj tawm: Lub Kaum Hli-30-2023