Oomatshini bokufaka i-sputter, abakwaziwa ngokuba ziinkqubo zokutshiza, zizixhobo ezikhethekileyo kakhulu ezisetyenziswa kwinkqubo yokutshiza ifilimu encinci. Isebenza ngomgaqo wokutshiza, oquka ukuqhumisa izinto ezijoliswe kuzo ngee-ion okanye iiathom ezinamandla aphezulu. Le nkqubo ikhupha umsinga weeathom kwizinto ezijoliswe kuzo, ezithi emva koko zibekwe kwi-substrate ukuze zenze ifilimu encinci.
Ukusetyenziswa koomatshini bokufaka i-sputter kwande kakhulu ngenxa yokukwazi kwabo ukuvelisa iifilimu ezicocekileyo kakhulu, ezifanayo kakhulu kunye nobukhulu obulawulwayo. Ezi filimu zisetyenziswa kakhulu kwi-microelectronics, i-optics, iiseli zelanga, imidiya yokugcina i-magnetic kunye nezinye iindawo.
Uphuhliso lwakutshanje kwicandelo loomatshini bokufaka i-sputter luye lwaphumela ekusebenzeni ngcono kunye neempawu eziphuculweyo. Inkqubela phambili ephawulekayo kukufakwa kwetekhnoloji yokufakela i-sputter ye-magnetron, evumela amazinga aphezulu okufaka kunye nomgangatho ophuculweyo wefilimu. Olu tshintsho luvumela ukufakwa kwezinto ezahlukeneyo, kubandakanya iintsimbi, ii-oxide zesinyithi kunye nee-semiconductors.
Ukongeza, oomatshini bokufaka i-sputter ngoku baxhotyiswe ngeenkqubo zolawulo eziphambili eziqinisekisa ulawulo oluchanekileyo lweeparamitha zokufaka ezifana noxinzelelo lwegesi, uxinano lwamandla, ukwakheka kwethagethi kunye nobushushu be-substrate. Ezi nkqubela phambili ziphucula ukusebenza kwefilimu kwaye zivumela ukuveliswa kweefilimu ezineempawu ezenzelwe usetyenziso oluthile.
Ukongeza, uphuhliso oluqhubekayo kwicandelo le-nanotechnology lukwanceda kakhulu kwiimashini zokufaka i-sputter. Abaphandi basebenzisa ezi mashini ukwenza izakhiwo ezincinci kunye neengubo ezicwangcisiweyo ngokuchanekileyo okuphezulu kakhulu. Iimashini zokufaka i-sputter ziyakwazi ukufaka iifilimu ezincinci phezu kweemilo ezinzima kunye neendawo ezinkulu, nto leyo eyenza ukuba zilungele ukusetyenziswa kweentlobo ngeentlobo zezixhobo ze-nanoscale.
Kutshanje kuye kwaxelwa ukuba iqela lezazinzulu ezivela kwiziko lophando elaziwayo liphumelele ekuphuhliseni umatshini omtsha wokufaka i-sputter onokubeka iifilimu ezincinci ngokuchanekileyo okungazange kubonwe ngaphambili. Lo matshini uphambili udibanisa ii-algorithms zolawulo zanamhlanje kunye noyilo olutsha lwe-magnetron ukuze kufezekiswe ukufana okuphezulu kwefilimu kunye nolawulo lobukhulu. Iqela lophando licinga ukuba umatshini walo uya kuguqula inkqubo yokwenziwa kwezixhobo ze-elektroniki zesizukulwana esilandelayo kunye neenkqubo zokugcina amandla.
Ukuphuhlisa izixhobo ezintsha ezinemisebenzi ephucukileyo yinto eqhubekayo kuluntu lwezenzululwazi. Oomatshini bokufaka i-sputter baye baba sisixhobo esibalulekileyo kolu phando, besenza kube lula ukufunyanwa kunye nokuhlanganiswa kwezinto ezintsha ezineempawu ezizodwa. Abaphandi basebenzisa ezi matshini ukufunda iindlela zokukhula kwefilimu, ukufunda izixhobo ezineempawu ezilungiselelwe wena, kunye nokufumana izixhobo ezintsha ezinokubumba ikamva lobuchwepheshe.
–Eli nqaku likhutshwe nguumenzi womatshini wokugquma nge-vacuumGuangdong Zhenhua
Ixesha lokuthumela: Okthobha-30-2023