Iinkqubo zokugquma i-vacuum ezisebenzisa i-Magnetron sputtering optical in-line zibuchwepheshe obuphambili obusetyenziselwa ukufaka iifilimu ezincinci kwiintlobo ngeentlobo ze-substrates, zihlala zisetyenziswa kumashishini afana ne-optics, i-electronics kunye nesayensi yezinto. Oku kulandelayo sisishwankathelo esineenkcukacha:
Izinto kunye neempawu:
1. Umthombo we-sputter ye-magnetron:
I-magnetron isetyenziselwa ukuvelisa i-plasma enoxinano oluphezulu.
Izinto ekujoliswe kuzo (umthombo) zihlaselwa ngee-ion, nto leyo ebangela ukuba ii-athomu zikhutshwe (zitshizwe) zize zibekwe kwi-substrate.
I-magnetron ingayilelwa ukusebenza kwe-DC, i-pulsed DC, okanye i-RF (i-radio frequency), kuxhomekeke kwinto etshizwayo.
2. Inkqubo ekwi-intanethi:
I-substrate ishukunyiswa rhoqo okanye ngokuthe chu ngokusebenzisa igumbi lokugquma.
Ivumela imveliso ephezulu kunye nokufakwa okufanayo kweendawo ezinkulu.
Ngokwesiqhelo isetyenziselwa ukugquma iglasi, iplastiki okanye amaphepha esinyithi kwiinkqubo zokuqengqeleka okanye zokusonga.
3. igumbi lokucoca ulwelo:
Igcina indawo elawulwayo enoxinzelelo oluphantsi ukuze kube lula ukutshiza.
- Ithintela ungcoliseko kwaye iqinisekisa ubunyulu obuphezulu beefilimu ezigciniweyo.
- Ihlala ixhotyiswe ngezihluthulelo zomthwalo ukuze kuncitshiswe ukuvezwa kwiimeko zomoya ngexesha lokulayisha nokukhupha izinto phantsi komhlaba.
4. izakhono zokugquma ezibonakalayo:
- Yenzelwe ngokukodwa ukuvelisa izinto zokugquma ezibonakalayo ezifana nezinto zokugquma ezingabonisi kukhanya, izibuko, izihluzi, kunye nezihluzi zemitha.
- Ivumela ulawulo oluchanekileyo lobukhulu befilimu kunye nokufana, nto leyo ibalulekileyo kwizicelo ze-optical.
5. iinkqubo zolawulo lwenkqubo:
- Iinkqubo zokubeka esweni eziphambili kunye nempendulo yokulawula iiparameter ezifana namandla, uxinzelelo kunye nesantya sesiseko.
- Ukuxilongwa kwindawo yokulinganisa iipropati zefilimu ngexesha lokufakwa kwayo ukuqinisekisa umgangatho kunye nokuhambelana.
Izicelo:
1. I-Optics:
- Iilensi zokugquma, izibuko kunye nezinye izinto ezibonakalayo ukuphucula ukusebenza.
- Ivelisa ii-multilayer coatings ze-interference filters kunye nezinye izixhobo ze-optical ezintsonkothileyo.
2. Izixhobo zombane:
- Iitransistors zefilimu ezincinci, izinzwa kunye nezinye izixhobo ze-elektroniki.
- Iingubo ezibonisa umbane ezikhanyayo nezibonisayo kunye nezikrini zokuchukumisa. 3.
3. iiphaneli zelanga:
- Iingubo ezingabonisi kukhanya neziqhuba umbane ukuze kuphuculwe ukusebenza kakuhle.
- Iileya ezigqunyiweyo ukuze zihlale ixesha elide.
4. iingubo zokuhombisa:
- Ukupeyinta ubucwebe, iiwotshi nezinye izinto ngeenjongo zobuhle.
Iingenelo:
1. Ubuchule obuphezulu:
- Ibonelela ngengubo efanayo nephinda-phindayo enolawulo oluchanekileyo lobukhulu kunye nokwakheka kwayo. 2.
2. Ukukhula:
- Ifanelekile kuphando oluncinci kunye nemveliso yemizi-mveliso emikhulu. 3.
3. Ukuguquguquka:
- Ibeka izinto ezahlukeneyo, kuquka iintsimbi, ii-oxide, ii-nitrides kunye neekhompawundi ezidityanisiweyo.
4. Ukusebenza kakuhle:
- Iinkqubo ezikwi-intanethi zivumela ukuqhubekeka kokucubungula, ukunciphisa ixesha lokungasebenzi kunye nokwandisa ukwenziwa komsebenzi.
Ixesha leposi: Juni-29-2024