Ko ngā pūnaha paninga korehau whatu Magnetron sputtering he hangarau matatau e whakamahia ana hei whakatakoto i ngā kiriata angiangi ki runga i ngā momo papa, e whakamahia whānuitia ana i roto i ngā ahumahi pēnei i te whatu, te hikohiko me te pūtaiao rauemi. Anei tētahi tirohanga whānui:
Ngā wāhanga me ngā āhuatanga:
1. pūtake pupuhi magnetron:
Ka whakamahia te magnetron hei whakaputa i te plasma kiato teitei.
Ka pāngia te rauemi ūnga (pūtake) e ngā katote, ka puta te pana (te pupuhi) o ngā ngota, ka whakatakotoria ki runga i te papa.
Ka taea te hoahoa i te aukumetoroni mō te mahi DC, DC pāorooro, RF (auau reo irirangi) rānei, i runga i te rauemi e pupuhihia ana.
2. Pūnaha ā-roto:
Ka nekehia haere tonu, ka nekehia haere rānei te papa i roto i te ruma paninga.
Ka āhei te whakaputanga tere me te paninga ōrite o ngā wāhi whānui.
He tikanga tēnei hei pani i ngā rau karāhe, kirihou, whakarewa rānei i roto i ngā tukanga hurihuri-ki-rōra, papatahi rānei.
3. rūma korehau:
Ka pupuri i te taiao pēhanga iti e whakahaeretia ana hei whakahaere i te pupuhi.
- Ka ārai i te poke, ā, ka whakarite kia tino parakore ngā kiriata kua whakatakotoria.
- He maha ngā wā ka mau ki ngā raka kawenga hei whakaiti i te pānga ki ngā āhuatanga o te hau i te wā e utaina ana, e tangohia ana rānei te uta o te papa.
4. ngā āheinga paninga whatu:
- He mea hanga motuhake hei hanga paninga whatu pēnei i ngā paninga ārai-whakaata, ngā whakaata, ngā tātari, me ngā wehewehe hihi.
- Ka taea te whakahaere tika i te matotoru me te ōritetanga o te kiriata, he mea nui tēnei mō ngā tono whatu.
5. ngā pūnaha whakahaere tukanga:
- Ngā pūnaha aroturuki me te urupare matatau mō te whakahaere i ngā tawhā pēnei i te mana, te pēhanga me te tere o te papa.
- Ngā tātaritanga i te papaanga hei ine i ngā āhuatanga o te kiriata i te wā e whakatakotoranga ana hei whakarite i te kounga me te ōritetanga.
Ngā tono:
1. Ngā Tirohanga Mata:
- Te paninga i ngā karāhe, ngā whakaata me ētahi atu wāhanga whatu hei whakapai ake i te mahi.
- Ka whakaputa i ngā paninga paparanga maha mō ngā tātari pokanoa me ētahi atu taputapu whatu matatini.
2. Ngā Hikohiko:
- Ngā transistors kiriata angiangi, ngā pūoko me ētahi atu taputapu hiko.
- Ngā paninga arataki mārama mō ngā whakaaturanga me ngā mata pā. 3.
3. ngā panera rā:
- He paninga ārai-whakaata me te paninga kawe hiko hei whakapai ake i te whai huatanga.
- Ngā paparanga kua takaihia hei pupuri i te roa.
4. ngā paninga whakapaipai:
- Te paninga i ngā whakapaipai, i ngā wati me ētahi atu taonga hei whakapaipai i te tinana.
Ngā Painga:
1. Teitei o te Tika:
- Ka whakarato i tētahi paninga ōrite, ka taea te whakahoki, me te whakahaere tika i te matotoru me te hanganga. 2.
2. Te Āhuatanga Tauine:
- He pai mō ngā rangahau iti me ngā mahi whakaputa ahumahi nui. 3.
3. Ngā mahi maha:
- Ka whakatakoto i te whānuitanga o ngā rauemi, tae atu ki ngā konganuku, ngā waikura, ngā nitride me ngā matū whakahiato.
4. Te Whai Hua:
- Ka taea e ngā pūnaha ā-roto te tukatuka tonu, ka whakaiti i te wā kore mahi me te whakanui ake i te putanga mahi.
Wā tuku: Pipiri-29-2024