Inkqubo yokufaka umphunga wevacuum ngokubanzi ibandakanya ukucocwa komphezulu we-substrate, ukulungiswa ngaphambi kokugquma, ukufakwa komphunga, ukulayisha, emva kokugquma unyango, ukuvavanywa, kunye neemveliso ezigqityiweyo.
(1) Ukucocwa komphezulu we-substrate. Iindonga zegumbi lokucoca umoya, isakhelo se-substrate kunye neoyile yomphezulu, umhlwa, izinto zokugquma eziseleyo kulula ukuzikhupha kwi-vacuum, nto leyo echaphazela ngokuthe ngqo ubunyulu bomaleko wefilimu kunye namandla okubopha, kufuneka zicocwe ngaphambi kokuba zigqunywe.
(2) Ukulungiselela ngaphambi kokufaka i-coating. Ukugquma i-vacuum engenanto ukuya kwinqanaba elifanelekileyo le-vacuum, i-substrate kunye nezinto zokugquma ukuze kulungiswe kwangaphambili. Ukufudumeza i-substrate, injongo kukususa umswakama kunye nokuphucula amandla okubopha isiseko se-membrane. Ukufudumeza i-substrate phantsi kwe-vacuum ephezulu kunokususa igesi efakwe kumphezulu we-substrate, kwaye emva koko kukhuphe igesi kwigumbi le-vacuum ngepompo ye-vacuum, enceda ekuphuculeni inqanaba le-vacuum kwigumbi lokugquma, ubumsulwa bomaleko wefilimu kunye namandla okubopha esiseko sefilimu. Emva kokufikelela kwinqanaba elithile le-vacuum, umthombo wokuqala wokufudumeza ngamandla ombane aphantsi, ifilimu ifudumeza kwangaphambili okanye inyibilike kwangaphambili. Ukuze kuthintelwe ukufuma kwi-substrate, gquma umthombo wokufudumeza kunye nezinto zomthombo nge-baffle, uze emva koko ufake amandla ombane aphezulu, izinto zokugquma zifudunyezwa ngokukhawuleza ukuya kubushushu bokufuma, ukufuma emva koko zisuse i-baffle.
(3) Ukufuma. Ukongeza kwinqanaba lokufuma ukuze ukhethe ubushushu obufanelekileyo be-substrate, ubushushu bokufuma kwezinto zokuplata ngaphandle kokufakwa koxinzelelo lomoya nako kuyiparameter ebaluleke kakhulu. Ukususwa koxinzelelo lwegesi oluyi-vacuum yegumbi lokugquma, kumisela umgama ophakathi weemolekyuli zegesi ezihamba kwindawo yokufuma kunye nomgama othile wokufuma phantsi komphunga kunye neeathom zegesi eziseleyo kunye nenani lokungqubana phakathi kweeathom zomphunga.
(4) Ukukhulula. Emva kokuba ubukhulu bomaleko wefilimu bufikelele kwiimfuno, gquma umthombo wokufuma nge-baffle uze uyeke ukufudumeza, kodwa ungawukhokeli umoya ngoko nangoko, kufuneka uqhubeke uphola phantsi kweemeko zomoya ongcolileyo ixesha elithile ukuze uphole, ukuthintela ukugquma, izinto zokugquma eziseleyo kunye nokumelana, umthombo wokufuma kunye nokunye okufakwe i-oxidized, uze uyeke ukupompa, uze emva koko uvuthele umoya, uvule igumbi lokufutha ukuze ukhuphe i-substrate.
–Eli nqaku likhutshwe nguumenzi womatshini wokugquma nge-vacuumGuangdong Zhenhua
Ixesha leposi: Sep-27-2024