Inkqubo yokubeka umphunga wevacuum ngokubanzi ibandakanya ukucocwa komphezulu we-substrate, ukulungiswa ngaphambi kokugquma, ukubekwa komphunga, ukulayishwa, emva konyango lokutyabeka, uvavanyo kunye neemveliso ezigqityiweyo.
(1) Ukucoca umphezulu wesubstrate. Iindonga zegumbi le-vacuum, isakhelo se-substrate kunye nenye i-oyile engaphezulu, i-rust, i-residual plating imathiriyeli kulula ukuyikhupha kwi-vacuum, echaphazela ngokuthe ngqo ukucoceka komgangatho wefilimu kunye namandla okudibanisa, kufuneka acocwe ngaphambi kokufakwa.
(2) Ukulungiswa ngaphambi kokugquma. Ukugquma i-vacuum engenanto kwiqondo elifanelekileyo le-vacuum, i-substrate kunye nezixhobo zokugquma ukulungiselela ukunyangwa kwangaphambili. Ukufudumeza i-substrate, injongo kukususa umswakama kunye nokuphucula i-membrane base bonding force. Ukufudumeza i-substrate phantsi kwe-vacuum ephezulu kunokunciphisa i-gas ye-adsorbed kumphezulu we-substrate, kwaye emva koko ukhuphe igesi ngaphandle kwegumbi lokucoca ngempompo yokucoca, ekhuthaza ukuphucula iqondo le-vacuum yegumbi lokugubungela, ukucoceka komgangatho wefilimu kunye namandla okudibanisa isiseko sefilimu. Emva kokufikelela kwiqondo elithile le-vacuum, umthombo wokuqala we-evaporation onegunya eliphantsi lombane, ifilimu yokufudumeza okanye ukunyibilika kwangaphambili. Ukuze uthintele ukuphuphuma komphunga kwi-substrate, gubungela umthombo wokuphuphuma kunye nomthombo wezinto kunye ne-baffle, uze ufake amandla aphezulu ombane, izinto zokugquma zifudunyezwa ngokukhawuleza kubushushu bokufudumala, ukukhupha kwaye emva koko kususe i-baffle.
(3) Ukuba ngumphunga. Ukongeza kwinqanaba lokunyuka komphunga ukukhetha ubushushu obufanelekileyo be-substrate, i-plating ye-evaporation iqondo lobushushu ngaphandle kwe-deposition yoxinzelelo lomoya ikwayiparameter ebaluleke kakhulu. Ukubekwa koxinzelelo lwerhasi olusivacuum lwegumbi lokugquma, lumisela umndilili okhululekileyo woluhlu lweeathom zerhasi ezihamba kwindawo yokuphuphuma komphunga kunye nomgama othile womphunga phantsi komphunga kunye nentsalela yeeathom zerhasi kunye nenani lokungqubana phakathi kweeathom zomphunga.
(4) Ukothula. Emva kobunzima bomaleko wefilimu ukuhlangabezana neemfuno, gubungela umthombo womphunga nge-baffle kwaye uyeke ukufudumeza, kodwa ungakhokeleli ngokukhawuleza umoya, imfuneko yokuqhubeka upholisa phantsi kweemeko ze-vacuum ixesha elithile ukuze uphole, ukuthintela i-plating, intsalela yezinto kunye nokuxhathisa, umthombo wokunyuka komphunga kunye nokunye oxidized, kwaye emva koko uyeke ukumpompa, kwaye emva koko ukhuphe i-vacuum, uvule i-substrate.
–Eli nqaku likhutshwa nguumenzi womatshini wokugqumaGuangdong Zhenhua
Ixesha lokuposa: Sep-27-2024