Magnetron sputtering optical in-line vacuum coating system ke theknoloji e tsoetseng pele e sebelisetsoang ho beha lifilimi tse tšesaane ho li-substrates tse fapaneng, tse sebelisoang haholo liindastering tse kang tsa optics, elektroniki le mahlale a thepa. Se latelang ke kakaretso e felletseng:
Likarolo le likarolo:
1. Mohloli oa magnetron sputter:
Magnetron e sebelisoa ho hlahisa plasma e phahameng haholo.
Lintho tse shebiloeng (mohloli) li hlasetsoe ka li-ion, tse etsang hore liathomo li ntše (spttered) ebe li kenngoa holim'a substrate.
Magnetron e ka etsoa bakeng sa ts'ebetso ea DC, pulsed DC, kapa RF (radio frequency), ho ipapisitse le thepa e ts'oaroang.
2. Sistimi ea inthaneteng:
The substrate e tsamaisoa ka ho tsoelang pele kapa butle-butle ka kamoreng ea ho roala.
E lumella tlhahiso e phahameng ea tlhahiso le ho roala junifomo ea libaka tse kholo.
Ka tloaelo e sebelisoa ho roala likhalase, polasetiki kapa lishiti tsa tšepe ka har'a roll-to-roll kapa flatbed process.
3. kamore ea vacuum:
E boloka tikoloho e laoloang ea khatello e tlase ho thusa ho sputtering.
- E thibela tšilafalo le ho netefatsa bohloeki bo phahameng ba lifilimi tse kentsoeng.
- Hangata e na le linotlolo tsa mojaro ho fokotsa ho pepesehela maemo a sepakapaka nakong ea ho kenya le ho laolla substrate.
4. bokhoni ba ho roala ka optical:
- E etselitsoe ka ho khetheha ho hlahisa liphahlo tsa optical joalo ka li-anti-reflective coatings, liipone, li-filters le li-splitters tsa borokho.
- E lumella taolo e nepahetseng ea botenya ba filimi le ho ts'oana, e leng bohlokoa bakeng sa lits'ebetso tsa optical.
5. Sistimi ea taolo ea ts'ebetso:
- Sistimi e tsoetseng pele ea ho lekola le ho fana ka maikutlo bakeng sa ho laola liparamente tse joalo ka matla, khatello le lebelo la substrate.
- Litlhahlobo tsa setšeng bakeng sa ho lekanya thepa ea lifilimi nakong ea deposition ho netefatsa boleng le botsitso.
Lisebelisoa:
1. Optics:
- Lilense tsa ho roala, liipone le likarolo tse ling tsa mahlo ho ntlafatsa ts'ebetso.
- E hlahisa likoti tsa multilayer bakeng sa li-filters tsa tšitiso le lisebelisoa tse ling tse rarahaneng tsa optical.
2. Tsa elektroniki:
- Li-transistors tsa filimi tse tšesaane, li-sensor le lisebelisoa tse ling tsa elektroniki.
- Liaparo tsa transparent conductive bakeng sa lipontšo le li-skrini tsa ho ama. 3.
3. liphanele tsa letsatsi:
- Li-anti-reflective le li-conductive coatings bakeng sa ts'ebetso e ntlafetseng.
- Mekhahlelo e kentsoeng bakeng sa ho tšoarella.
4. mekhabiso e khabisitsoeng:
- Ho roala mabenyane, lioache le lintho tse ling molemong oa botle.
Melemo:
1. Nepahetse e Phahameng:
- E fana ka seaparo sa junifomo le se phetoang ka taolo e nepahetseng ea botenya le sebopeho. 2.
2. Scalability:
- E loketse bakeng sa lipatlisiso tse nyane le tlhahiso e kholo ea indasteri. 3.
3. Ho feto-fetoha ha maemo:
- E boloka mefuta e mengata e fapaneng ea lisebelisoa, ho kenyeletsoa litšepe, li-oxide, nitrides le metsoako e kopaneng.
4. Katleho:
- Litsamaiso tsa in-line li lumella ts'ebetso e tsoelang pele, ho fokotsa nako le ho eketsa tlhahiso.
Nako ea poso: Jun-29-2024
