Iyo vacuum vapor deposition process inowanzo sanganisira substrate kucheneswa kwepasi, kugadzirira usati wapfeka, vapor deposition, kurodha, mushure mekupotera kurapwa, kuyedzwa, uye zvigadzirwa zvapera.
(1) Substrate pamusoro pekuchenesa. Vacuum chamber madziro, substrate furemu uye mamwe mafuta epamusoro, ngura, zvakasara plating zvinhu zviri nyore kunyungudika muvacuum, zvichikanganisa kuchena kweiyo firimu layer uye simba rekubatanidza, rinofanira kucheneswa isati yaiswa.
(2) Kugadzirira kusati kwaputira. Kupfekedza vacuum isina chinhu kune yakakodzera vacuum degree, iyo substrate uye yekupfekedza zvinhu zve pretreatment. Kupisa iyo substrate, chinangwa ndechekubvisa hunyoro uye kuwedzera membrane base bonding simba. Kupisa iyo substrate pasi peyakanyanya vacuum inogona kubvisa gasi rinoshambadza pamusoro peiyo substrate, uyezve kupedza gasi kubva mukamuri yekutsvaira nepombi yevacuum, iyo inobatsira kuvandudza dhigirii yekutsvaira yekamuri yekuputira, kuchena kweiyo firimu layer uye simba rekubatanidza rebhaisikopo. Mushure mekusvika kune imwe vacuum degree, yekutanga evaporation sosi ine yakaderera simba remagetsi, iyo firimu preheating kana pre-kunyungudika. Kuti udzivise kubuda kwemvura kune substrate, vhara iyo evaporation sosi uye sosi zvinhu nebaffle, uye wobva waisa yakakwira simba remagetsi, iyo yekuputira zvinhu inokurumidza kupisa kune evaporation tembiricha, evaporation uye wozobvisa baffle.
(3) Kubuda mumhepo. Pamusoro peiyo evaporation nhanho yekusarudza yakakodzera substrate tembiricha, plating zvinhu evaporation tembiricha kunze kwekuiswa kwemhepo yekumanikidza zvakare yakakosha parameter. Deposition of gasi pressure inova iyo coating room vacuum, inotara avhareji yemahara egasi mamorekuru anofamba munzvimbo yekufefeya uye imwe nzvimbo yekufefetera pasi pemhute nemaatomu egasi asara uye huwandu hwekudhumhana pakati pemaatomu emhute.
(4) Kuburutsa. Mushure mekukora kweiyo firimu layer kuti isangane nezvinodiwa, vhara iyo evaporation sosi nebaffle uye kumisa kudziyisa, asi usakurumidza kutungamira mhepo, kukosha kwekuenderera kutonhora pasi pevacuum mamiriro kwenguva yekutonhora pasi, kudzivirira plating, yakasara plating zvinhu uye kuramba, evaporation sosi uye zvichingodaro oxidized, uye wobva wamira kupomba, uye ipapo inflate the substrate, vhura iyo substrate.
-Chinyorwa ichi chakaburitswa navacuum coating machine mugadziriGuangdong Zhenhua
Nguva yekutumira: Sep-27-2024