Magnetron sputtering optical in-line vacuum coating systems o se tekonolosi faʻaogaina e teu ai ata manifinifi i luga o le tele o substrates, e masani ona faʻaaogaina i alamanuia e pei o optics, electronics and materials science. O lo'o i lalo se fa'amatalaga auiliili:
Vaega ma foliga:
1. magnetron sputter puna:
O le magnetron e faʻaaogaina e gaosia ai se plasma maualuga maualuga.
O mea fa'atatau (puna) o lo'o tu'ia i ions, ma i'u ai i atoms e fa'ate'a (sputtered) ma tu'u i luga o le mea'ai.
O le magnetron e mafai ona mamanuina mo le DC, pulsed DC, poʻo le RF (leitio faʻasolosolo), faʻalagolago i mea o loʻo faʻafefe.
2. Faiga i-laina:
O le mea'ai e fa'agasolo pea pe fa'asolosolo i totonu o le potu fa'apipi'i.
Fa'ataga le maualuga o le gaosiga o le gaosiga ma le faʻapipiʻiina tutusa o vaega tetele.
E masani ona fa'aoga e fa'aofuofu tioata, palasitika po'o pepa u'amea i faiga ta'avale-to-roll po'o fa'amafolafola.
3. potu gaogao:
Fa'atumauina se si'osi'omaga fa'atonutonu maualalo o'omi e fa'afaigofie ai le sputtering.
- Puipuia le faʻaleagaina ma faʻamautinoa le maualuga o le mama o ata na teuina.
- E masani ona faʻapipiʻiina i loka uta e faʻaitiitia ai le faʻaalia i tulaga o le ea i le taimi o le utaina ma le laʻuina o mea.
4. mafai fa'apipi'i fa'apitoa:
- Fa'ata'ita'i fa'apitoa e gaosia ai fa'alava fa'apitoa e pei o fa'alava fa'aanti-reflective coatings, fa'ata, fa'amama, ma fa'alava fa'alava.
- Fa'ataga le pulea sa'o o le mafiafia o ata tifaga ma le tutusa, lea e taua tele mo fa'aoga mata.
5. faiga fa'atonutonu faiga:
- Faiga mata'ituina ma fa'amatalaga fa'apitoa mo le fa'atonutonuina o ta'iala e pei o le malosi, mamafa ma le saoasaoa o le substrate.
- Su'esu'ega i luga ole laiga mo le fuaina o meatotino i le taimi o le teuina ina ia mautinoa lelei ma tumau.
Talosaga:
1. Matamata:
- Ufiufi tioata, fa'ata ma isi vaega fa'apitoa e fa'aleleia ai le fa'atinoga.
- Fa'atupu fa'alavalava fa'apipi'i mo fili fa'alavelave ma isi masini fa'apitoa lavelave.
2. Fa'aeletonika:
- Transistors ata tifaga manifinifi, sensors ma isi masini faaeletonika.
- Uiga fa'aa'e manino mo fa'aaliga ma mata pa'i. 3.
3. paneta sola:
- Anti-reflective ma conductive coatings mo le faʻaleleia lelei.
- La'ei fa'apipi'i mo le tumau.
4. ufiufi teuteu:
- Ufiufi mea teuteu, uati ma isi mea mo faamoemoega matagofie.
Tulaga lelei:
1. Sa'o Maualuga:
- Tuuina atu se toniga ma faʻapipiʻi faʻapipiʻi faʻatasi ma le faʻatonuga saʻo o le mafiafia ma le tuʻufaʻatasia. 2.
2. Scalability:
- E talafeagai mo suʻesuʻega laʻititi ma le tele o gaosiga o pisinisi. 3.
3. Fetuuna'i:
- Teuina le tele o mea eseese, e aofia ai metala, oxides, nitride ma mea faʻafefiloi.
4. Lelei:
- O faiga fa'a-in-line e mafai ai ona fa'aauau le fa'agaioiga, fa'aitiitia taimi fa'aletonu ma fa'ateleina le gaosiga.
Taimi meli: Iuni-29-2024