Uburyo bwo guhumeka

Uburyo bwo kubika imyuka ya vacuum muri rusange burimo gusukura hejuru yubutaka, gutegura mbere yo gutwikira, kubitsa imyuka, gupakira, nyuma yo kuvura ibishishwa, kugerageza, nibicuruzwa byarangiye.

(1) Gukuramo isuku hejuru. Urukuta rwa chambre ya vacuum, ikariso yububiko hamwe nandi mavuta yubuso, ingese, ibikoresho bisigaje byoroshye biroroshye guhinduka mumyuka, bigira ingaruka itaziguye kumasuku ya firime nimbaraga zihuza, bigomba gusukurwa mbere yo kubisiga.
(2) Kwitegura mbere yo gutwikira. Gupfukirana icyuho cyubusa kurwego rukwiye rwa vacuum, substrate nibikoresho byo gutwikira. Gushyushya substrate, ikigamijwe ni ugukuraho ubuhehere no kuzamura imbaraga zifatizo zifatika. Gushyushya substrate munsi yumuvuduko mwinshi birashobora kwangiza gaze ya adsorbed hejuru yubutaka bwa substrate, hanyuma igasohora gaze mu cyumba cya vacuum na pompe ya vacuum, ikaba ifasha kuzamura urwego rwa vacuum rwicyumba cyitwikiriye, ubuziranenge bwurwego rwa firime hamwe nimbaraga zihuza za firime. Nyuma yo kugera ku ntera runaka ya vacuum, isoko yambere yo guhumeka ifite ingufu nkeya zamashanyarazi, firime irashyuha cyangwa mbere yo gushonga. Kugirango wirinde guhumeka kuri substrate, upfundikire isoko yumwuka hamwe nibikoresho byatanzwe hamwe na bafle, hanyuma winjire mumashanyarazi menshi, ibikoresho byo gutwikira bishyuha byihuse ubushyuhe bwumuyaga, guhumeka hanyuma ukureho urujijo.
(3) Umwuka. Usibye icyiciro cyo guhumeka kugirango uhitemo ubushyuhe bukwiye bwa substrate, ubushyuhe bwibikoresho byo guhumeka hanze yubushyuhe bwumuyaga nabyo ni ikintu cyingenzi. Gushyira ingufu za gaze aricyo cyumba cyo gutwikamo icyumba, kigena impuzandengo yubusa ya molekile ya gaze igenda mu mwanya wumuyaga hamwe nintera runaka yo guhumeka munsi yumuyaga hamwe na atome ya gaze isigaye n'umubare wo kugongana hagati ya atome ziva mumyuka.
(4) Kupakurura. Nyuma yubunini bwurwego rwa firime kugirango wuzuze ibisabwa, upfundikire isoko yumwuka uhumeke kandi uhagarike gushyushya, ariko ntugahite uyobora ikirere, gukenera gukomeza gukonja mugihe cyimyuka mugihe runaka kugirango ukonje, kugirango wirinde isahani, ibikoresho bisigaje ibisigazwa hamwe nibirwanya, isoko yumwuka nibindi kuri okiside, hanyuma uhagarike, ufungure icyumba cya vacuum.

–Iyi ngingo yasohowe naimashini ikora imashiniGuangdong Zhenhua