Ikoranabuhanga rya filime z'udupira duto twa diyama-igice cya 1

Umugozi ushyushye wa CVD ni bwo buryo bwa mbere kandi buzwi cyane bwo guhinga diyama ku muvuduko muto. 1982 Matsumoto n'abandi bashyushye umugozi w'icyuma udashobora kurenza 2000°C, aho ubushyuhe bwa gazi ya H2 inyura muri uwo mugozi butuma atome za hydrogène zikora byoroshye. Gukora hydrogen atome mu gihe cyo kuyikoresha mu buryo bwa hydrogène byongereye igipimo cyo kuyikoresha mu mafilime ya diyama. Diyama ishyirwa mu buryo butoranijwe kandi imiterere ya grafiti irakumirwa, bigatuma umuvuduko wo kuyikoresha mu mafilime ya diyama ugera kuri mm/h, ari na wo muvuduko wo kuyikoresha mu nganda. HFCVD ishobora gukorwa hakoreshejwe amasoko atandukanye ya karuboni, nka methane, propane, acetylene, n'izindi hydrogène, ndetse na hydrogène zimwe na zimwe zirimo ogisijeni, nka acetone, ethanol, na methanol. Kongeramo amatsinda agizwe na ogisijeni byongera ubushyuhe bwo kuyikoresha mu mafilime ya diyama.

Uretse sisitemu isanzwe ya HFCVD, hari impinduka nyinshi kuri sisitemu ya HFCVD. Ikunze kugaragara cyane ni sisitemu ya DC plasma na HFCVD. Muri iyi sisitemu, voltage ya bias ishobora gushyirwa kuri substrate na filament. Bias nziza ihoraho kuri substrate hamwe na bias mbi runaka kuri filament bituma electron zitera substrate, bigatuma hydrogen yo hejuru ivamo. Ingaruka zo kuvamo ni ukwiyongera k'umuvuduko w'ifatizo rya diyama (hafi mm 10 / h), tekiniki izwi nka HFCVD ifashijwe na electron. Iyo voltage ya bias iri hejuru bihagije kugira ngo habeho plasma ihindagurika, gusenyuka kwa H2 na hydrocarbons biriyongera cyane, amaherezo bigatera kwiyongera k'umuvuduko wo gukura. Iyo polarity ya bias isubijwe inyuma (substrate iba iri hasi), kubomba kwa iyoni biba kuri substrate, bigatuma diyama yiyongera ku substrate zitari diyama. Indi mpinduka ni ugusimbuza umugozi umwe ushyushye n'imigozi myinshi itandukanye kugira ngo haboneke ahantu hamwe kandi amaherezo habeho agace kanini k'umugozi wa diyama. Ingorane ya HFCVD ni uko ubushyuhe bw'umugozi bushobora gutera umwanda muri uwo mugozi wa diyama.

(2) Microwave Plasma CVD (MWCVD)

Mu myaka ya 1970, abahanga mu bya siyansi bavumbuye ko igipimo cya atome hidrojeni cyashoboraga kwiyongera hakoreshejwe plasma ya DC. Kubera iyo mpamvu, plasma yabaye ubundi buryo bwo guteza imbere ikorwa rya filime za diyama binyuze mu kubora H2 muri hydrogen atome no gukora amatsinda ya atome ashingiye kuri karuboni. Uretse plasma ya DC, hari ubundi bwoko bubiri bwa plasma bwitabwaho. Microwave plasma CVD ifite frequency yo gushyushya ya 2.45 GHZ, naho RF plasma CVD ifite frequency yo gushyushya ya 13.56 MHz. Microwave plasma ni umwihariko kuko frequency ya microwave itera vidification za electron. Iyo electron zigonganye na atome za gaze cyangwa molekile, hakorwa umuvuduko mwinshi wo kwitandukanya. Microwave plasma ikunze kwitwa ibintu bifite electron "zishyushye", iyoni "zikonje" n'uduce duto. Mu gihe cyo gushyira filime nto, microwave zinjira mu cyumba cya CVD cya plasma binyuze mu idirishya. Plasma irabagirana muri rusange ifite ishusho y'uruziga, kandi ingano y'umubumbe iriyongera iyo microwave ikoresha imbaraga. Uduce tw’udupira tw’udupira duto duhingwa ku gice cy’ubutaka kiri mu mfuruka y’agace k’ubutaka, kandi icyo gice cy’ubutaka ntikigomba kuba gihuye n’agace k’ubutaka.

–Iyi nkuru yasohotse nauruganda rukora imashini zikora imashini zikoresha umwuka ushyushyeGuangdong Zhenhua