Ko te CVD miro wera te tikanga tuatahi me te tino rongonui mō te whakatipu taimana i te pēhanga iti. 1982 I whakamahana a Matsumoto me ētahi atu i tētahi miro whakarewa ātete ki runga ake i te 2000°C, ā, i taua pāmahana ka tere te whakaputa o ngā ngota hauwai i te hau H2 e haere ana i roto i te miro. Nā te whakaputanga o te hauwai ngota i te wā o te pyrolysis hauwai i piki ake te tere whakatakoto o ngā kiriata taimana. Ka whakatakotoria te taimana i runga i te whiriwhiringa, ā, ka āraihia te hanganga graphite, ka hua ake ngā tere whakatakoto kiriata taimana i te ota o mm/h, he tere whakatakoto tino teitei mō ngā tikanga e whakamahia whānuitia ana i roto i te ahumahi. Ka taea te mahi HFCVD mā te whakamahi i ngā momo pūtake waro, pērā i te methane, te propane, te acetylene, me ētahi atu hauwai, tae atu ki ētahi hauwai kei roto te hāora, pērā i te acetone, te etanoru, me te methanol. Mā te tāpiri i ngā rōpū kei roto te hāora ka whānui ake te awhe pāmahana mō te whakatakoto taimana.
Haunga te pūnaha HFCVD noa, he maha ngā whakarerekētanga ki te pūnaha HFCVD. Ko te mea tino noa ko te pūnaha plasma DC me te HFCVD whakakotahi. I roto i tēnei pūnaha, ka taea te whakamahi i te ngaohiko pīwari ki te papa me te miro. Mā te pīwari pai tonu ki te papa me te pīwari kino ki te miro ka pupuhihia e ngā irahiko te papa, ka taea ai te mimiti i te hauwai mata. Ko te hua o te mimiti he pikinga o te tere whakatakotoranga o te kiriata taimana (tata ki te 10 mm/h), he tikanga e mōhiotia ana ko te HFCVD āwhina-irahiko. Ina teitei te ngaohiko pīwari hei hanga i te tukunga plasma pumau, ka tino piki te pirau o te H2 me ngā warowaihā, ā, i te mutunga ka piki ake te tere tipu. Ina hurihia te polarity o te pīwari (ka pīwari kino te papa), ka puta te pupuhi katote ki te papa, ka piki ake te nucleation taimana i runga i ngā papa kore-taimana. Ko tētahi atu whakarerekētanga ko te whakakapinga o tētahi miro wera kotahi ki ētahi miro rerekē kia tutuki ai te whakatakotoranga ōrite, ā, hei mutunga, he nui te wāhi o te kiriata taimana. Ko te ngoikoretanga o te HFCVD ko te mimiti wera o te miro ka taea te hanga poke i roto i te kiriata taimana.
(2) Te Mate Pukupuku Ngaruiti (MWCVD)
I ngā tau 1970, i kitea e ngā kaipūtaiao ka taea te whakanui ake i te kukū o te hauwai ngota mā te whakamahi i te plasma DC. Nō reira, kua noho te plasma hei tikanga anō hei whakatairanga i te hanganga o ngā kiriata taimana mā te wehewehe i te H2 ki te hauwai ngota me te whakahohe i ngā rōpū ngota waro. Haunga te plasma DC, e rua atu ngā momo plasma kua arohia. Ko te plasma ngaruiti CVD he auau whakaoho o te 2.45 GHZ, ā, ko te plasma RF CVD he auau whakaoho o te 13.56 MHz. He ahurei ngā plasma ngaruiti nā te mea ka whakaoho te auau ngaruiti i ngā wiri irahiko. Ina tukinga ngā irahiko ki ngā ngota hau, ki ngā ngota rānei, ka puta he tere wehewehe teitei. He maha ngā wā ka kiia te plasma ngaruiti he mea me ngā irahiko "wera", ngā katote "matao" me ngā matūriki kūpapa. I te wā e whakatakotoria ana te kiriata angiangi, ka tomo ngā ngaruiti ki te rūma whakahiato CVD whakarei ake i te plasma mā te matapihi. Ko te plasma kanapa he porowhita te āhua, ā, ka piki ake te rahi o te porowhita me te mana ngaruiti. Ka whakatōkia ngā kiriata angiangi taimana ki runga i tētahi papa i te kokonga o te rohe kanapa, ā, kāore e hiahiatia kia pā tika te papa ki te rohe kanapa.
–Nā tekaihanga mīhini paninga korehauGuangdong Zhenhua
Wā tuku: Pipiri-19-2024