Diamond yoroheje ya firime ikoranabuhanga-igice cya 1

Filament ishyushye CVD nuburyo bwambere kandi buzwi cyane bwo gukura diyama kumuvuduko muke. 1982 Matsumoto n'abandi. yashyushya icyuma cyangiritse kugeza hejuru ya 2000 ° C, ubwo ubushyuhe bwa gaze H2 inyura muri filament byoroshye kubyara atome ya hydrogen. Umusaruro wa hydrogène atome mugihe cya hydrocarbon pyrolysis wongereye igipimo cyo gushira kwa firime ya diyama. Diyama yashyizwe muburyo butandukanye kandi ibishushanyo mbonera bya grafite birabujijwe, bigatuma igipimo cya firime ya diyama gitondekanya kuri mm / h, kikaba ari igipimo kinini cyane cyo kubika kuburyo bukoreshwa mu nganda. HFCVD irashobora gukorwa hifashishijwe amasoko atandukanye ya karubone, nka metani, propane, acetylene, hamwe na hydrocarbone, ndetse na hydrocarbone irimo ogisijeni nka acetone, Ethanol, na methanol. Kwiyongera kwamatsinda arimo ogisijeni yagura ubushyuhe bwo gushira diyama.

Usibye sisitemu isanzwe ya HFCVD, hariho umubare munini wo guhindura sisitemu ya HFCVD. Bikunze kugaragara cyane ni DC plasma hamwe na sisitemu ya HFCVD. Muri iyi sisitemu, kubogama kubogamye kurashobora gukoreshwa kuri substrate na filament. Guhora kubogama kubutaka hamwe no kubogama kubi kuri filime bitera electron gutera ibisasu, bigatuma hydrogène yo hejuru iba desorb. Igisubizo cya desorption niyongera mubipimo byo gushira kwa firime ya diyama (hafi 10 mm / h), tekinike izwi nka HFCVD ifashwa na electron. iyo voltage ibogamye ari ndende bihagije kugirango habeho gusohora plasma ihamye, kubora kwa H2 na hydrocarbone byiyongera cyane, amaherezo bigatuma kwiyongera kwiterambere. Iyo polarite yo kubogama ihinduwe (substrate ibogamye muburyo bubi), ibisasu bya ion bibaho kuri substrate, bigatuma habaho kwiyongera kwa nucleation ya diyama kubutaka butari diyama. Ubundi buryo bwo guhindura ni ugusimbuza filime imwe ishyushye hamwe na fayili zitandukanye zitandukanye kugirango ugere kumurongo umwe kandi amaherezo agace kanini ka firime ya diyama.Ibibi bya HFCVD nuko guhumeka ubushyuhe bwa firimu bishobora gukora umwanda muri firime ya diyama.

(2) Microwave Plasma CVD (MWCVD)

Mu myaka ya za 70, abahanga bavumbuye ko hydrogène ya atome ishobora kwiyongera hifashishijwe plasma ya DC. Kubera iyo mpamvu, plasma yabaye ubundi buryo bwo guteza imbere ishingwa rya firime ya diyama mu kubora H2 muri hydrogen atom no gukora amatsinda ya atome ashingiye kuri karubone. Usibye plasma ya DC, ubundi bwoko bubiri bwa plasma nabwo bwitabweho. Microwave plasma CVD ifite inshuro zishimishije za 2,45 GHZ, naho plasma CVD ya RF ifite inshuro 13,56 MHz. microwave plasmas irihariye kuko microwave inshuro nyinshi itera vibrasi ya electron. Iyo electron zihuye na atome ya gaze cyangwa molekile, hakorwa umuvuduko mwinshi wo gutandukana. Plasma ya Microwave ikunze kwitwa ibintu hamwe na electron "zishyushye", "ubukonje" ion hamwe nuduce duto tutabogamye. Mugihe cyo gushira firime yoroheje, microwave yinjira muri plasma-yazamuye CVD synthesis chambre ikoresheje idirishya. Plasma ya luminescent muri rusange iba ifite imiterere, kandi ubunini bwumuzingi bwiyongera hamwe nimbaraga za microwave. Filime yoroheje ya diamant ihingwa kuri substrate mu mfuruka yakarere ka luminescent, kandi substrate ntigomba guhura neza nakarere ka luminescent.

–Iyi ngingo yasohowe naimashini ikora imashiniGuangdong Zhenhua