Ko te tukanga whakatakoto kohu korehau ko ngā mahi pēnei i te horoi i te mata o te papa, te whakarite i mua i te paninga, te whakatakoto kohu, te kohikohi i ngā wahi, te maimoatanga i muri i te paninga, te whakamātautau, me ngā hua kua oti. (1) Te horoi i te mata o te papa. Ngā pakitara rūma korehau, te anga papa me ētahi atu...
He aha i whakamahia ai te korehau? Te ārai i te poke: I roto i te korehau, ko te korenga o te hau me ētahi atu hau ka ārai i te tauhohenga o te rauemi whakatakotoranga ki ngā hau o te āhuarangi, ka poke pea te kiriata. Te Piritanga Pai Ake: Ko te korenga o te hau ko te tikanga ka piri tika te kiriata ki te papa me te kore he hau...
He tukanga taketake te whakatakoto kiriata angiangi i roto i te umanga haurua-ira, tae atu ki ngā momo wāhanga maha o te pūtaiao rauemi me te hangarau. Kei roto i tēnei ko te waihanga i tētahi paparanga angiangi o te rauemi ki runga i tētahi papa. He whānuitia ngā matotoru o ngā kiriata kua whakatakotoria, mai i ētahi noa iho...
I roto i te mara o ngā whatu, i roto i te mata karaihe whatu, i te mata quartz rānei e whakakikoruatia ana he paparanga, he maha rānei o ngā matū rerekē i muri i te kiriata, ka taea e koe te whiwhi i te whakaata teitei, te kore whakaata rānei (arā, te whakanui ake i te urunga o te kiriata) te ōwehenga rānei o te whakaata, te tuku rānei o te hihi...
Ko ngā taputapu paninga korehau he momo hangarau whakatakoto kiriata angiangi i roto i te taiao korehau, e whakamahia whānuitia ana i roto i ngā hikohiko, ngā whatu, te pūtaiao rauemi, te pūngao me ērā atu. Ko ngā taputapu paninga korehau te nuinga o ngā wāhanga e whai ake nei: Rūma Korehau: Koinei te wāhanga matua o te korehau ...
He whānuitia ngā momo whakamahinga o ngā taputapu paninga korehau, e kapi ana i te maha o ngā ahumahi me ngā mara. Ko ngā momo whakamahinga matua ko: Ngā hikohiko kaihoko me ngā ara iahiko whakauru: He whānuitia ngā whakamahinga o te hangarau paninga korehau i roto i ngā hikohiko kaihoko, pērā i ngā hanganga whakarewa...
Ko te rama tētahi o ngā wāhanga nui o te motuka, ā, ka taea e te maimoatanga mata whakaata rama te whakarei ake i tana mahi me te whakapaipai, ko te tukanga maimoatanga mata kapu rama noa he whakakikorua matū, he peita, he paninga korehau. Ko te tukanga rehu peita me te whakakikorua matū ko te kapu rama tuku iho...
Ko ngā taputapu paninga korehau he mea tito mai i ētahi wāhanga matua, he mahi motuhake tā ia wāhanga, e mahi tahi ana kia tutuki ai te whakatakotoranga kiriata whai hua, ōrite hoki. Kei raro nei he whakaahuatanga o ngā wāhanga matua me ā rātou mahi: Ngā Wāhanga Matua Rūma korehau: Mahi: E whakarato ana...
Ko ngā taputapu paninga mimiti he momo taputapu e whakamahia ana hei whakatakoto i ngā rauemi kiriata angiangi ki runga i te mata o te papa, e whakamahia whānuitia ana i roto i ngā mara o ngā taputapu whatu, ngā taputapu hiko, ngā paninga whakapaipai me ētahi atu. Ko te paninga mimiti te nuinga o te wā ka whakamahia te pāmahana teitei hei huri i te totoka...
He momo pūnaha paninga matatau te mīhini paninga korehau kua hangaia mō ngā taiao whakaputa tere tonu. Kāore i rite ki ngā mīhini paninga puranga, e tukatuka ana i ngā papa i roto i ngā rōpū motuhake, ka taea e ngā mīhini paninga tere te neke haere tonu i roto i ngā wāhanga rerekē o te tukanga paninga. Ko tana...
He taputapu te paninga korehau e whakamahia ana hei whakatakoto i ngā kiriata angiangi o te rauemi ki runga i te papa. He mea whakamahi noa tēnei tukanga i roto i te hanga i ngā haurua-ira, ngā pūtau rā, me ngā momo paninga rerekē mō ngā tono whatu me ngā tono hiko. Anei tētahi tirohanga whānui mō tana mahi: 1.V...
Ko te pūnaha paninga korehau he hangarau e whakamahia ana hei pani i tētahi kiriata angiangi, paninga rānei ki tētahi mata i roto i te taiao korehau. Mā tēnei tukanga ka whakarite kia kounga teitei, kia ōrite, kia pakari hoki te paninga, he mea nui tēnei i roto i ngā momo ahumahi pēnei i te hikohiko, te whatu, te motuka, me te rererangi. He rerekē ...
Ko ngā pūnaha paninga korehau ā-roto Magnetron sputtering he hangarau matatau e whakamahia ana hei whakatakoto i ngā kiriata angiangi ki runga i ngā momo papa, e whakamahia whānuitia ana i roto i ngā ahumahi pēnei i te whatu, te hikohiko me te pūtaiao rauemi. Koinei te tirohanga whānui: Ngā wāhanga me ngā āhuatanga: 1...
(3) Te Auautanga Reo Irirangi CVD (RFCVD) Ka taea te whakamahi i te RF hei whakaputa i te plasma mā roto i ngā tikanga e rua, te tikanga hononga capacitive me te tikanga hononga inductive. Ka whakamahia e te RF plasma CVD te auau o te 13.56 MHz. Ko te painga o te RF plasma ko tōna horapa ki runga i te rohe nui atu i te ngaruiti...
Ko te CVD miro wera te tikanga tuatahi me te tikanga rongonui mō te whakatipu taimana i te pēhanga iti. 1982 Ko te whakamahana a Matsumoto me ētahi atu i tētahi miro whakarewa ātete ki te neke atu i te 2000°C, ā, i taua pāmahana ka puta ngā ngota hauwai i te hau H2 e tika ana mā te miro. Ko te whakaputanga o te hauwai ngota i te wā...