ʻO ke kaʻina hana hoʻokahe mahu hakahaka e pili ana i nā ʻanuʻu e like me ka hoʻomaʻemaʻe ʻana i ka ʻili substrate, ka hoʻomākaukau ʻana ma mua o ka uhi ʻana, ka hoʻokahe mahu, ka ʻohi ʻana i nā ʻāpana, ka mālama ʻana ma hope o ka plating, ka hoʻāʻo ʻana, a me nā huahana i hoʻopau ʻia. (1) Hoʻomaʻemaʻe ʻili substrate. Nā paia o ke keʻena vacuum, ka mōlina substrate a me nā mea ʻē aʻe...
No ke aha e hoʻohana ai i kahi Vacuum? Ke kāohi nei i ka haumia: I loko o kahi vacuum, ʻo ka nele o ka ea a me nā kinoea ʻē aʻe e pale ai i ka mea waiho ʻana mai ka pane ʻana me nā kinoea lewa, hiki ke haumia i ka ʻiliʻili. Hoʻomaikaʻi ʻia ka hoʻopili ʻana: ʻO ka nele o ka ea ʻo ia hoʻi ke pili pololei ka ʻiliʻili i ka substrate me ka ʻole o ka ea...
ʻO ka waiho ʻana o ka ʻili lahilahi kahi hana kumu i hoʻohana ʻia i ka ʻoihana semiconductor, a me nā wahi ʻē aʻe o ka ʻepekema mea a me ka ʻenekinia. Pili ia i ka hana ʻana o kahi papa lahilahi o ka mea ma luna o kahi substrate. Hiki i nā ʻili i waiho ʻia ke loaʻa i kahi ākea o nā mānoanoa, mai kekahi mau ato...
Ma ke kahua o nā optics, ma ke aniani optical a i ʻole ka ʻili quartz e uhi ana i kahi papa a i ʻole kekahi mau papa o nā mea like ʻole ma hope o ke kiʻiʻoniʻoni, hiki iā ʻoe ke loaʻa i kahi noʻonoʻo kiʻekiʻe a i ʻole non-reflective (ʻo ia hoʻi, hoʻonui i ka permeability o ke kiʻiʻoniʻoni) a i ʻole kahi hapa o ka noʻonoʻo a i ʻole ka hoʻoili ʻana o ka m...
ʻO nā lako hana uhi hakahaka kahi ʻano ʻenehana waiho ʻili lahilahi i loko o kahi ʻano hakahaka, kahi i hoʻohana nui ʻia i nā mea uila, optics, ʻepekema mea, ikehu a pēlā aku. ʻO nā lako hana uhi hakahaka ka mea nui i haku ʻia me nā ʻāpana penei: Vacuum Chamber: ʻO kēia ka ʻāpana nui o ka hakahaka ...
Loaʻa i nā lako hana uhi hakahaka kahi ākea o nā wahi noi, e uhi ana i nā ʻoihana a me nā kahua. ʻO nā wahi noi nui e pili ana i: Nā mea uila mea kūʻai aku a me nā kaapuni i hoʻohui ʻia: Loaʻa i ka ʻenehana uhi hakahaka kahi ākea o nā noi i nā mea uila mea kūʻai aku, e like me ke kūkulu metala ...
ʻO ke kukui kekahi o nā ʻāpana koʻikoʻi o ke kaʻa, a me ka mālama ʻana i ka ʻili reflector kukui, hiki ke hoʻonui i kāna hana a me ka hoʻonaninani, ʻo ke kaʻina hana mālama ʻili kīʻaha kukui maʻamau he plating kemika, pena, uhi vacuum. ʻO ke kaʻina hana pīpī pena a me ka plating kemika ka kīʻaha kukui kuʻuna ...
ʻO ka maʻamau, ua hana ʻia nā lako uhi vacuum i kekahi mau ʻāpana koʻikoʻi, kēlā me kēia me kāna hana ponoʻī, e hana pū ana e hoʻokō i ka waiho ʻana o ka ʻiliʻili maikaʻi a like. Aia ma lalo kahi wehewehe o nā ʻāpana nui a me kā lākou mau hana: Nā ʻĀpana Nui Keʻena vacuum: Hana: Hāʻawi...
ʻO nā lako hana uhi evaporative kahi ʻano lako i hoʻohana ʻia e waiho i nā mea ʻili lahilahi ma luna o ka ʻili o ka substrate, kahi i hoʻohana nui ʻia ma nā kahua o nā mea optical, nā mea uila, nā uhi hoʻonaninani a pēlā aku. Hoʻohana nui ka uhi evaporative i ka mahana kiʻekiʻe e hoʻololi i nā mea paʻa...
ʻO kahi vacuum inline coater kahi ʻano ʻōnaehana uhi holomua i hoʻolālā ʻia no nā wahi hana hoʻomau, kiʻekiʻe. ʻAʻole e like me nā batch coaters, kahi e hana ai i nā substrates i nā hui discrete, ʻae nā inline coaters i nā substrates e neʻe mau ma o nā pae like ʻole o ke kaʻina hana uhi. ʻO kāna...
ʻO kahi mea hoʻopili hakahaka sputtering kahi mea hana i hoʻohana ʻia e waiho i nā ʻili lahilahi o nā mea ma luna o kahi substrate. Hoʻohana pinepine ʻia kēia kaʻina hana i ka hana ʻana o nā semiconductors, nā cell solar, a me nā ʻano uhi like ʻole no nā noi optical a me nā uila. Eia kahi ʻike kumu o ke ʻano o kāna hana: 1.V...
ʻO kahi ʻōnaehana uhi hakahaka kahi ʻenehana i hoʻohana ʻia e hoʻopili i kahi ʻili lahilahi a i ʻole ka uhi ʻana i kahi ʻili i loko o kahi ʻano hakahaka. Hōʻoia kēia kaʻina hana i kahi uhi kiʻekiʻe, like, a paʻa hoʻi, he mea nui ia i nā ʻoihana like ʻole e like me nā mea uila, optics, automotive, a me aerospace. Aia nā ʻano like ʻole ...
ʻO nā ʻōnaehana uhi hakahaka Magnetron sputtering optical in-line he ʻenehana holomua i hoʻohana ʻia e waiho i nā kiʻiʻoniʻoni lahilahi ma luna o nā ʻano substrates like ʻole, hoʻohana pinepine ʻia i nā ʻoihana e like me optics, electronics a me ka ʻepekema mea. Eia kahi ʻike kikoʻī: Nā ʻāpana a me nā hiʻohiʻona: 1...
(3) Radio Frequency Plasma CVD (RFCVD)Hiki ke hoʻohana ʻia ka RF e hana i ka plasma ma o ʻelua mau ʻano like ʻole, ke ʻano hoʻopili capacitive a me ke ʻano hoʻopili inductive.Hoʻohana ka RF plasma CVD i ka alapine o 13.56 MHz.ʻO ka pōmaikaʻi o ka RF plasma ʻo ia ka hoʻolaha ʻana ma luna o kahi ʻāpana nui aʻe ma mua o ka microwave plas...
ʻO ke kaula wela CVD ke ʻano mua loa a kaulana loa o ka ulu ʻana i ka daimana ma ke kaomi haʻahaʻa. 1982 Ua hoʻomehana ʻo Matsumoto et al. i kahi kaula metala refractory ma luna o 2000°C, ma kahi mahana e hana maʻalahi ai ke kinoea H2 e hele ana ma o ka filament i nā ʻātoma hydrogen. ʻO ka hana ʻana o ka hydrogen atomic i ka wā...