Hangarau Maimoatanga Mata PVD i roto i ngā Paninga Mārō

I te mea kei te hiahia tonu ngā mahi hanga hou ki te mahi teitei ake mai i ngā wāhanga, inā koa ko ērā e mahi ana i raro i ngā āhuatanga tino kino pēnei i te pāmahana teitei, te pēhanga teitei, me te waku kaha, kua piki haere te hiranga o te hangarau paninga. He mea nui te whakamahinga o ngā paninga mārō ki te whakarei ake i te roa o te taputapu, te tika o te miihini, me te mahi whānui o te hua. Ko te hangarau maimoatanga mata PVD (Physical Vapor Deposition) kei mua i te auahatanga i tēnei mara, e akiaki ana i ngā whanaketanga i roto i te hangarau paninga.

Nama 1 He aha te Tukanga PVD?

Ko te tukanga PVD e whakamahi ana i ngā tikanga ā-tinana hei huri i ngā rauemi paninga mai i te āhua totoka, wai rānei ki te āhua hau, kātahi ka whakatakotoria ki runga i te mata o te papa mā te whakatakotoranga kohu hei hanga i tētahi paninga ōrite, mārō, me te pakari. Ki te whakatauritea ki te whakatakotoranga kohu matū tuku iho (CVD), ko ngā painga matua o te PVD kei roto i tōna kaha ki te whakatakoto i ngā paninga i ngā pāmahana iti iho, te whakahaere tika i te matotoru me te hanganga o te paninga, me tōna āhua pai ki te taiao me te penapena pūngao.

Ngā Painga Nama 2 o te PVD i roto i ngā Paninga Mārō
Nā ōna painga ahurei, e mōhiotia whānuitia ana te hangarau PVD i roto i te whakamahinga o ngā paninga mārō, inā koa i ngā wāhi e hiahia ana kia tino pakeke, kia tino ātete ki te kakahu, kia tino ātete ki te waikura. Ko ngā painga matua o te tukanga PVD ko:

1. Te pakeke tino teitei me te ātete ki te kakahu
Ka whakanuia ake e ngā paninga mārō PVD te pakeketanga o ngā wāhanga. Mā te whakatakoto i ngā rauemi pēnei i te TiN (Titanium Nitride), TiAlN (Titanium Aluminium Nitride), me te CrN (Chromium Nitride), ka taea e te pakeketanga o te paninga te eke ki te 25GPa–63GPa, neke atu rānei. Ka whakapai ake ēnei paninga mārō i te ātete ki te kakahu, ka whakaiti i te pakū o te mata, ka whakanui ake i te ātete ki te waikura, ā, ka roa ake te ora o ngā taputapu, ngā pokepokea ai, me ētahi atu wāhanga.

2. Ātete Pai rawa atu ki te Pāmahana Teitei
He tino pai te ātete o ngā paninga PVD ki te pāmahana teitei, ā, he pai mō ngā wāhanga e pāngia ana e te pāmahana tino nui me te waku nui, te waikura matū rānei. Hei tauira, ehara i te mea ka tino pakari ngā paninga TiAlN engari ka pupuri hoki i te pumau hanganga i ngā pāmahana teitei, ā, ka whakamahia whānuitia i roto i ngā taputapu tapahi me ngā pokepokea ai mō ngā mahi miihini pāmahana teitei.

3. Tauwehenga Waku Iti mō te Whakapai Ake i te Whai Hua o te Mīhini
Mā ngā paninga PVD ka taea te whakatutuki i ngā tauwehenga waku tino iti, ka whakaiti i te waku me te kakahu o ngā rauemi, ka whakarei ake i te pai o te mahi miihini me te kounga o te mata. He tino whai hua tēnei mō te miihini tika me ngā tukanga tapahi tere-rahi.

4. He pai mō te taiao, ā, he tino whai hua
Ki te whakaritea ki ngā tikanga paninga tuku iho, kāore e hiahiatia he nui o ngā matū kino ki te tukanga PVD, ā, he hangarau pai mō te taiao. Hei tāpiri, he tino whai hua te mahi a ngā taputapu paninga PVD, e āhei ai te whakatakotoranga tere hei whakatutuki i ngā tono whakaputa nui.

Ngā Mara Whakamahinga Nama 3 o te Paninga Mārō PVD
He whānuitia te whakamahinga o ngā mīhini paninga mārō PVD mō ngā paninga mārō i roto i ngā ahumahi e hiahia ana ki te mahi mata pai rawa atu. Ko ētahi o ngā wāhi tono matua ko:

1. Ngā Utauta Tapahi me ngā Pokepoke
I roto i te hanga taputapu me te pokepokea ai, inā koa mō ngā taputapu tapahi e pāngia ana e ngā pāmahana teitei me te waku, ka tino whakarei ake ngā paninga PVD i te ātete ki te kakahu, te ātete ki te waikura, me te pakeke. He mea noa te whakamahi i ngā paninga TiN i roto i ngā taputapu huri, ngā taputapu mira, me ngā wiri, ko ngā paninga TiAlN ia e whakamahia whānuitia ana i roto i ngā mahi tapahi tere-rahi, e tino whakapai ake ana i te pai o te tapahi taputapu me te roa o te mahi.

2. Ngā Wāhanga Motuka
Mō ngā wāhanga miihini motuka pēnei i ngā rango, ngā piston, me ngā takirere, he tino pai te ātete o ngā paninga mārō PVD ki te pāmahana teitei me te ātete ki te kakahu, e whakaiti ana i te waku, e whakaroa ana i te roa o te wā e whakamahia ana te wāhanga, me te whakarei ake i te mahi whānui o te waka.

4. Whakataki o ngā Taputapu Paninga Mārō PVD Zhenhua FMA0605
Ngā Painga Taputapu
He tātari whai hua o ngā matūriki nui āwhata; Ka tukuna e ngā paninga Ta-C he tino whai hua me te mahi tino pai.
Ka tutuki te mārō tino teitei, ngā paninga tino mārō ātete ki te pāmahana teitei, te tauwehenga waku iti, me te ātete waikura tino pai. Ka eke te mārō toharite ki te 25GPa–63GPa.

Ka whakamahia e te katote tētahi hangarau puku-rua e whakakotahi ana i te koiri kei mua me te whakarārangi aukume tuturu, e mahi tahi ana me tētahi pūnaha whakairo katote me tētahi taputapu maha-koki-toru-ahu hei whakatutuki i te whakatakotoranga whai hua.
He pewa katote whānui te whānui, e whakarite ana i ngā āhuatanga whakamatao pai rawa atu i raro i ngā āhuatanga iahiko teitei. He tere te nekehanga o te ira pewa, he teitei te tere ionization, ā, he tere te tere whakatakotoranga. Mā tēnei ka taea te whakatakotoranga o ngā paninga matotoru ake, maeneene ake me te ātete pai ki te waikura me te mahi pāmahana teitei.
Whānuitanga o te tono:
Ka taea e ngā taputapu te whakatakoto i te AlTiN, AlCrN, TiCrAlN, TiAlSiN, CrN, me ētahi atu paninga tino mārō e ātete ana ki te pāmahana teitei, kua whakamahia whānuitia nei ki roto i ngā pokepokea ai, ngā taputapu tapahi, ngā mea werowero, ngā wāhanga motuka, ngā piston, me ētahi atu hua.

— Nā teNgā taputapu paninga mārō PVDZhenhua Vacuum