CVD filament na-ekpo ọkụ bụ ụzọ izizi na nke ama ama maka itolite diamond na obere nrụgide. 1982 Matsumoto et al. kpoo filament metal refractory ruo ihe karịrị 2000 Celsius, ebe okpomọkụ H2 gas na-agafe na filament na-emepụta atom hydrogen ngwa ngwa. Mmepụta hydrogen atomiki n'oge hydrocarbon pyrolysis mụbara ọnụego ntinye ihe nkiri diamond. A na-edobe diamond nke ahọpụtara ma gbochie imepụta eserese graphite, na-ebute ọnụego ntinye ihe nkiri diamond n'usoro mm/h, nke bụ oke ntinye ego maka ụzọ ndị a na-ejikarị na ụlọ ọrụ. Enwere ike ime HFCVD site na iji ụdị carbon dị iche iche, dị ka methane, propane, acetylene, na hydrocarbons ndị ọzọ, na ọbụna ụfọdụ hydrocarbons nwere oxygen, dị ka acetone, ethanol, na methanol. Mgbakwunye nke otu nwere oxygen na-agbasawanye oke okpomọkụ maka ntinye diamond.
Na mgbakwunye na usoro HFCVD a na-ahụkarị, enwere ọtụtụ mgbanwe na sistemụ HFCVD. Nke kachasị bụ ngwakọta DC plasma na sistemụ HFCVD. N'ime usoro a, enwere ike itinye voltaji na-adịghị mma na mkpụrụ na filament. Ọgba aghara dị mma mgbe niile na mkpụrụ na ụfọdụ ihe na-adịghị mma na filament na-eme ka electrons tụọ mkpụrụ osisi ahụ, na-ekwe ka hydrogen dị n'elu desorb. Nsonaazụ nke desorption bụ mmụba na ntinye ego nke ihe nkiri diamond (ihe dịka 10 mm / h), usoro a maara dị ka HFCVD na-enyere aka electron. mgbe voltaji elegide anya dị elu iji mepụta mwepu plasma kwụsiri ike, nbibi nke H2 na hydrocarbons na-abawanye nke ukwuu, nke n'ikpeazụ na-eduga n'ịba ụba nke uto. Mgbe a na-atụgharị polarity nke nhụsianya ahụ (mkpụrụedemede bụ ihe na-adịghị mma), bọmbụ ion na-eme na mkpụrụ, na-eduga na mmụba nke nucleation diamond na ihe ndị na-abụghị diamond. Mgbanwe ọzọ bụ ngbanwe nke otu filament na-ekpo ọkụ na ọtụtụ filaments dị iche iche iji nweta ntinye edo edo na n'ikpeazụ nnukwu ebe ihe nkiri diamond. Mwepu nke HFCVD bụ na ikuku evaporation nke filament nwere ike ịmepụta mmetọ na ihe nkiri diamond.
(2) Microwave Plasma CVD (MWCVD)
N'afọ ndị 1970, ndị ọkà mmụta sayensị chọpụtara na enwere ike ịbawanye ụba nke hydrogen atom site na iji plasma DC. N'ihi ya, plasma ghọrọ ụzọ ọzọ iji kwalite mmepụta ihe nkiri diamond site n'iwepụ H2 n'ime hydrogen atomiki na ịgbalite otu atomiki nke dabeere na carbon. Na mgbakwunye na plasma DC, ụdị plasma abụọ ọzọ enwetawokwa nlebara anya. Plasma microwave CVD nwere oge mkpali nke 2.45 GHZ, yana plasma RF CVD nwere oge mkpali nke 13.56 MHz. Plasma ngwa ndakwa nri pụrụ iche n'ihi na ugboro ugboro microwave na-ebute ịma jijiji eletrọn. Mgbe electrons na-adaba na atom gas ma ọ bụ ụmụ irighiri ihe, a na-emepụta ọnụego nkewa dị elu. A na-akpọkarị plasma Microwave dị ka ihe nwere electrons "ọkụ", ion "oyi" na ihe ndị na-anọpụ iche. N'oge a na-etinye ihe nkiri dị mkpa, microwaves na-abanye n'ọnụ ụlọ njikọ CVD kwalitere plasma site na windo. Plasma luminescent na-adịkarị okirikiri n'ụdị, na nha nke oghere na-abawanye site na ike ngwa ndakwa nri. A na-etolite ihe nkiri ndị dị mkpa nke diamond na mkpụrụ n'akụkụ mpaghara luminescent, na mkpụrụ ahụ ekwesịghị ịdị na-akpakọrịta ozugbo na mpaghara luminescent.
–E wepụtara akụkọ aonye na-emepụta igwe mkpuchi ikukuGuangdong Zhenhua
Oge nzipu: Jun-19-2024